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  6. XYZ axis 300µm operation precision positioning stage P-561~563

XYZ axis 300µm operation precision positioning stage P-561~563

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P-561・P-562・P-563 PIMars(TM) XYZ Piezo System

last updated:Nov 04, 2025

ピーアイ・ジャパン
ピーアイ・ジャパン
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Precision positioning at the nano level with a 66 mm opening × maximum 300 µm on the XYZ axis.

The P-561 to P-563 series are XYZ-axis piezo nanopositioners that utilize a parallel kinematics structure and capacitive sensors. The operational range is 100/200/300 µm for each XYZ axis (depending on the model), with a reproducibility of ±2 nm and linearity of 0.03%. The aperture is 66×66 mm, ensuring a clear path for transmitted light and laser light. The direct drive type operates at 45 µm on the XY axis and 15 µm on the Z axis, with a resonance frequency of 1000 Hz under no load, achieving high resolution and fast response. Additionally, the PICMA piezo ceramics are fully insulated with all-ceramic construction, providing humidity resistance, high reliability, and long lifespan. They are ideal for semiconductor testing, super-resolution microscopy, and photonics alignment. *For more details, please download the PDF or contact us.*

    Piezoelectric DevicesActuatorCartesian Robot
csm_P-563.3CD_PIC_Print_zug_b95.tif_Bilder-Web_279495f68c.jpg

XYZ axis 300µm operation precision positioning stage P-561~563

csm_P-563.3CD_PIC_Print_zug_b95.tif_Bilder-Web_279495f68c.jpg
csm_P-563.3CD_PIC_Print_zug_b95.tif_Bilder-Web_279495f68c.jpg
  • Related Link - https://www.pi-japan.jp/ja/products/nanopositionin…
  • Special site - Product/service details - https://pr.mono.ipros.com/pi-japan/product/

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basic information

- Improved responsiveness through parallel control/measurement structure/multi-axis precision control - Operating axes: XYZ axes - Stroke: 100µm, 200µm, 300µm types - High linearity with capacitive sensors - Frictionless precision flexure guide system - Unmatched scanning flatness - High dynamic XYZ version available, custom types with up to 6 axes possible - Center opening 66 x 66mm *For more details, please download the PDF or contact us.*

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Applications/Examples of results

Application examples - Scanning microscope - Mask/Wafer alignment - Interferometer - Various measurements - Biotechnology - Micromanipulation

catalog(6)

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3-axis high-precision positioning piezo stage P-561 to P-563

3-axis high-precision positioning piezo stage P-561 to P-563

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P-620.2~P-629.2 PIHera(R) Small XY Axis Piezo Stage

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NanoCube 6-axis piezo system P-616.65S

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News about this product(2)

Enhancing the accuracy of research and development! Introduction to a special feature on "positioning" products for research environments.

  • Product news

Under strict standards and environments, high precision and reproducibility are required in research and development. At PI, we have been engaged in the development and manufacturing of components, systems, and solutions that can be smoothly integrated into existing experimental environments, backed by over 50 years of experience. With compatibility with major software such as LabVIEW, MATLAB, and Python, as well as an open interface, smooth integration into various research environments and flexible customization are possible. We have picked up a lineup of recommended products for implementation in research settings.

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[Addition of products for short delivery times] PI's high-speed XYZ nanopositioner

  • Product news

The PIMars XYZ Piezo Stage "P-561, P-562, P-563" is now available for short delivery times. The main features of the PIMars XYZ Piezo Stage are as follows: - Easy integration of high-precision motion: Achieves sub-nanometer resolution, 99.97% linearity, and long-term stability through capacitive sensors. Excellent scan flatness (straightness and flatness in the Z direction is ±30 nm) and a compact footprint enable accurate planar movement and easy integration even in space-constrained setups. - Versatile optical access: The aperture supports transmission light and beam alignment tasks, allowing for flexible use in photonics and microscopy applications. - High stability: Zero-play flexure guides provide high rigidity and frictionless operation, maintaining robustness against vibrations, shocks, and temperature changes. It caters to a wide range of application fields, including microscopy and life sciences, photonics and optics, and semiconductor and measurement fields. For more details, please visit the official website!

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ピーアイ・ジャパン

ピーアイ・ジャパン

Electronic Components and Semiconductors

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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.

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