XYZ axis 300µm operation precision positioning stage P-561~563
P-561・P-562・P-563 PIMars(TM) XYZ Piezo System
Precision positioning at the nano level with a 66 mm opening × maximum 300 µm on the XYZ axis.
The P-561 to P-563 series are XYZ-axis piezo nanopositioners that utilize a parallel kinematics structure and capacitive sensors. The operational range is 100/200/300 µm for each XYZ axis (depending on the model), with a reproducibility of ±2 nm and linearity of 0.03%. The aperture is 66×66 mm, ensuring a clear path for transmitted light and laser light. The direct drive type operates at 45 µm on the XY axis and 15 µm on the Z axis, with a resonance frequency of 1000 Hz under no load, achieving high resolution and fast response. Additionally, the PICMA piezo ceramics are fully insulated with all-ceramic construction, providing humidity resistance, high reliability, and long lifespan. They are ideal for semiconductor testing, super-resolution microscopy, and photonics alignment. *For more details, please download the PDF or contact us.*
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basic information
- Improved responsiveness through parallel control/measurement structure/multi-axis precision control - Operating axes: XYZ axes - Stroke: 100µm, 200µm, 300µm types - High linearity with capacitive sensors - Frictionless precision flexure guide system - Unmatched scanning flatness - High dynamic XYZ version available, custom types with up to 6 axes possible - Center opening 66 x 66mm *For more details, please download the PDF or contact us.*
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Applications/Examples of results
Application examples - Scanning microscope - Mask/Wafer alignment - Interferometer - Various measurements - Biotechnology - Micromanipulation
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.