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PI Japan

EstablishmentJapanese Corporation: 1991 Germany Headquarters: 1977
addressKanagawa/Kawasaki-shi, Saiwai-ku/580 Horikawacho, Solid Square West Building, 17th Floor
phone044-280-7676
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last updated:Mar 05, 2026
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Electric motor Electric motor
ピエゾアクチュエーター・コンポーネント ピエゾアクチュエーター・コンポーネント
ステアリングミラー ステアリングミラー
新製品 新製品
コントローラー コントローラー
ピエゾフレクシャステージ/高速スキャニングシステム ピエゾフレクシャステージ/高速スキャニングシステム
エアベアリング エアベアリング
静電容量センサー 静電容量センサー
Precision granite products Precision granite products
Piezo positioning system Piezo positioning system
Piesomota Piesomota
XY stage XY stage
Linear stage Linear stage
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Piezo drive Piezo drive
6-axis system 6-axis system
Motorized positioning Motorized positioning
Piezo

Piezo positioning system

○ Nano control positioning piezo scanner 1 to 6 axes ○ Z-axis piezo scanner for microscopes (PIFOC) ○ Controller ○ Capacitive sensor

Z-chip tilt aperture piezo stage for photonics

Optimize alignment in the field of photonics with nano-level operation and large apertures.

In the field of photonics, alignment work requires precise positioning of components such as optical fibers and lenses. In particular, misalignment of the optical axis can significantly affect measurement accuracy and efficiency, making precise positioning at the nano level crucial. The Z-Chip Tilt Aperture Piezo Stage P-5x8 addresses these challenges by contributing to high-precision positioning and enabling transmission light measurement through its wide aperture. 【Application Scenarios】 - Optical fiber alignment - Lens alignment - Interferometric measurement - Transmission light applications 【Benefits of Implementation】 - Improved alignment accuracy through precise positioning at the nano level - Enhanced efficiency of transmission light measurement with a 66mm x 66mm aperture - Increased longevity due to high-reliability PICMA piezo ceramics - High linearity achieved with capacitive sensors

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[Piezostage for Semiconductor Manufacturing] XYZ Axis P-616

For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.

In semiconductor processes and inspection equipment, position correction and focus adjustment at the submicron level are key to stabilizing quality. Particularly in inspection and fine processing stages, high-precision position control with nanometer resolution is required. The P-616 NanoCube is a compact XYZ piezo nano positioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for fine position adjustments with nanometer resolution. It is suitable for applications such as fine motion correction stages in semiconductor manufacturing equipment and integration into inspection devices. 【Application Scenarios】 - Fine position correction for wafer inspection equipment - Mask inspection processes - Focus adjustment for laser annealing devices - Fine motion control for probing equipment - Semiconductor research and development applications 【Benefits of Implementation】 - High-precision position correction with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into devices with compact design - Contributes to the stabilization of fine processes

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Optical XYZ Axis Piezo Stage P-616

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

In optical systems, even slight deviations in beam position or optical axis can significantly affect coupling efficiency and measurement accuracy. This is especially critical in applications such as interferometric measurements, laser focusing, and fiber alignment, where sub-micron positioning control is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm per axis. Its flexure guide structure enables backlash-free, highly linear motion. With nanometer resolution for fine positioning and high mechanical stability, it supports the precise alignment of optical systems with high reproducibility. Designed to accommodate a range of applications from research to device integration, it meets the advanced positioning control needs in the photonics field. 【Application Scenarios】 - Optical fiber alignment (optimization of coupling efficiency) - Fine adjustment of laser focusing positions - Interferometric and holography devices - Microscopy stage fine motion control - Integration into photonics research equipment 【Benefits of Implementation】 - Improved optical axis adjustment accuracy with nanometer resolution - High reproducibility due to backlash-free structure - Drift reduction through high-stiffness flexure design - Easier integration into devices due to compact design

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[Piezostage P-616 for Nanotechnology] XYZ Axis

Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.

In the field of nanotechnology, the precision of sample and probe positioning significantly affects the reproducibility of experimental results. Scanning Probe Microscopy (SPM) and nano-lithography applications require stable XYZ control with nanometer resolution. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for high-precision positioning at nanometer resolution. It is utilized as a positioning control platform that supports nanoscale measurement, processing, and evaluation, catering to both research applications and device integration. 【Application Scenarios】 - Scanning Probe Microscopy (SPM/AFM/STM) - Nano-lithography equipment - Nano material evaluation - Nano device research and development - High-precision sample positioning 【Benefits of Implementation】 - High-precision position control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning enabled by high-rigidity design - Compact design facilitates integration into vacuum systems and research equipment

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XYZ Axis Piezo Stage P-616 for Laser Processing

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

In laser microfabrication, even slight deviations in beam position or focus directly affect processing quality. This is especially true for microfabrication and high aspect ratio processing, where precise position control at the sub-micron level is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with 100 µm stroke on each axis. Its high-rigidity flexure guide structure enables backlash-free, highly linear motion, allowing for fine position adjustments with nanometer resolution. By integrating it into laser processing equipment, it supports: - Fine adjustment of beam position - High-precision control of focus position - Correction of processing position to enhance the stability of microfabrication. 【Application Scenarios】 - Integration into laser microfabrication equipment - Precise control of focus position - Position correction for micro-drilling processes - Thin film processing and precision patterning 【Benefits of Implementation】 - High-precision control of focus position with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into equipment with compact design - Stabilization of microfabrication quality

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[Piezostage for Microscopes] XYZ Axis P-616

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

In high-magnification microscopy, even slight positional shifts can significantly affect the clarity and reproducibility of images. This is especially true for confocal microscopes, fluorescence microscopes, and live cell observations, where precise XYZ control at sub-micron levels is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm on each axis. Its high-stiffness flexure guide structure enables smooth operation without backlash, allowing for fine positioning with nanometer resolution. It also supports Z-axis focus control and XY scanning applications, making it versatile for a wide range of research uses and equipment integration. 【Usage Scenarios】 - Z-axis focus control for confocal microscopes - Multi-point observation with fluorescence microscopes - Live cell imaging - Fine positioning under high-magnification objectives - Observation of nanoscale materials 【Benefits of Implementation】 - High-precision focus control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning operation due to high-stiffness design - Easy integration into existing microscopes with compact design

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PIMars XYZ Axis Aperture Piezo Stage for Microscopes

PIMars XYZ Nano Stage that achieves sample positioning for microscopes with nanometer precision.

In high-resolution observation using electron microscopes (SEM/TEM), the positioning accuracy of the sample affects image quality. Even slight vibrations or crosstalk can impact measurement precision, making a high-rigidity and high-response positioning stage essential. The P-561, P-562, P-563, and PIMars Nanopositioning Stages achieve high precision and positioning stability through capacitive sensors. The operational range is 100/200/300 µm in each XYZ direction (depending on the model), with a reproducibility of ±2nm and linearity of 0.03%. [Application Scenarios] - Sample positioning in electron microscope observation - Semiconductor inspection - Super-resolution microscopy - Photonics alignment [Benefits of Implementation] - Improved observation accuracy through precise positioning at the nanoscale - Efficient observation enabled by high resolution and fast response - Stable operation achieved through high reliability and long lifespan

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[For Measurement] XYZ Axis Precision Positioning Stage P-561~563

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

In high-precision measurement, the positioning accuracy of the probe affects the reliability of the measurement results. Even slight vibrations or crosstalk can be sources of error, necessitating stable nanopositioning achieved through high rigidity and closed-loop control. The P-561, P-562, and P-563 PIMars Nanopositioning Stages are XYZ multi-axis piezo flexure stages that utilize a parallel kinematics structure and capacitive sensors. They achieve a reproducibility of ±2 nm and linearity of 0.03%, enabling high-precision probe positioning with low crosstalk. With high resonance frequency and excellent dynamic characteristics, they are suitable for high-speed scanning measurements and micro-displacement measurements. They are ideal for precision measurement applications such as semiconductor inspection and nanomaterial analysis. 【Application Scenarios】 - Semiconductor inspection - Super-resolution microscopy - Photonics alignment 【Benefits of Implementation】 - Achievement of high-precision measurement results - Reduction of measurement time - Improvement of product quality

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Optical Alignment Chip Tilt Piezo Platform

Achieved high-speed beam steering with a convergence of ±5 mrad × 3 ms and a resolution of 0.1 µrad.

In the optical industry, alignment work requires precise positioning of laser beams and optical elements. In particular, high-precision alignment is a crucial factor that influences the performance of optical systems. Misalignment can lead to decreased measurement accuracy and system malfunctions. The S-335 chip/tilt piezo platform enables fast and high-precision beam steering, contributing to the efficiency and accuracy of optical alignment tasks. 【Use Cases】 - Precise positioning of laser beams - Angle adjustment of optical elements - Image stabilization - Laser beam control - Optical communication 【Benefits of Implementation】 - Reduced alignment time - Improved system performance - Enhanced measurement accuracy - Improved work efficiency

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S-335 Chip/Tilt Piezo Platform for Scanning Microscopy

Piezo chip/tilt platform achieving high-angle control of ±35 mrad and fast response.

The S-335 Chip/Tilt Piezo Platform is a high-performance stage that achieves both large deflection angles and high dynamic response. It enables high-precision angle control without friction or backlash through piezoelectric elements, and realizes equivalent high performance with a two-axis parallel kinematics design. It is ideal for applications such as microscope scanning, high-speed imaging, and beam steering, supporting stable and high-precision operation. For detailed performance, please refer to the catalog. 【Application Scenes】 - Laser scanning microscopy - High-speed sample scanning and optical imaging - Beam steering/scanning control - Image processing/beam stabilization devices 【Benefits of Implementation】 - Achieves a wide scanning range with ±35 mrad high angle control - Enables high-speed step and settle due to high dynamic performance - High reliability with high-precision angle control without friction or backlash

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Chip/Tilt Piezo Platform for Laser Processing

Improving the accuracy and throughput of laser beam control with a large deflection angle and high-speed response.

In laser processing, the precision and response speed of beam position and angle control greatly influence processing quality and productivity. Especially in fine processing and high-speed scanning, even slight fluctuations or delays in the beam can lead to decreased processing accuracy and defects. The "S-335" is a chip/tilt-type piezo platform that combines a large deflection angle of up to 35 mrad (optical deflection angle of 70 mrad) with high-speed response. Its parallel kinematics structure enables high-speed and high-precision two-axis control, making it ideal for beam steering and scanning applications. Additionally, the zero-backlash flexure guide and strain sensors ensure high linearity and excellent reproducibility, allowing for stable beam control even during high-speed operation. 【Application Scenarios】 - Precise positioning of laser beams - Image stabilization - Laser beam control - Optical communication 【Benefits of Implementation】 - Improvement in processing accuracy and efficiency - Realization of high-speed and high-precision processing - Response to diverse processing needs

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Actuator with 50N high thrust and vacuum specifications for semiconductor testing.

Maximum 12 mm/s, 50 N high thrust. Sub-nanometer resolution PICMAWalk actuator ideal for semiconductor inspection processes.

In the semiconductor manufacturing industry, high-precision control in the positioning of wafers and masks is essential due to the advancement of manufacturing processes. Particularly in fine processing and inspection stages, accurate positioning at the nanometer level significantly affects product quality and yield. Low positioning accuracy can lead to the occurrence of defective products and a decrease in manufacturing efficiency. The N-331 PICMAWalk is an embedded linear actuator that combines high thrust of up to 50 N with sub-nanometer resolution. It supports high-speed operation of up to 12 mm/s, contributing to the reduction of takt time in inspection equipment. The friction drive mechanism allows for position holding even when the power is off. Additionally, its vacuum-compatible specifications make it suitable for use in semiconductor inspection equipment and clean environments. 【Application Scenarios】 - Wafer positioning in semiconductor manufacturing equipment - Positioning in mask aligners - High-precision positioning in inspection equipment 【Benefits of Implementation】 - Achieves high-precision positioning at the nanometer level - Contributes to improved quality and yield in manufacturing processes - Usable in vacuum environments For details on thrust characteristics, other specifications, and vacuum-compatible options, please refer to the catalog.

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High thrust PICMAWalk actuator for optical adjustment

Maximum 12 mm/s, 50 N high thrust. Sub-nanometer resolution PICMAWalk actuator ideal for optical adjustments.

In the optical industry, precise positioning at the nanometer level is required for the adjustment of intricate optical systems. Particularly in situations such as optical axis alignment and lens positioning, where even slight misalignments can significantly impact system performance, high-precision positioning capability is essential. Inaccurate adjustments can lead to image distortion and reduced measurement accuracy. The high-thrust PICMAWalk actuator N-331 achieves positioning with nanometer precision, maximizing the performance of optical systems. 【Application Scenarios】 - Adjustment of objective lenses in optical microscopes - Optical axis alignment in laser processing machines - Wafer positioning in semiconductor manufacturing equipment 【Benefits of Implementation】 - High-precision positioning at the nanometer level - Improved performance of optical systems - Enhanced work efficiency

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P-737 PIFOC Z Stage for Biotechnology

High-speed, high-resolution piezo Z-focusing stage supporting live cell observation.

In the fields of life sciences and biotechnology, stable focusing during microscopic observation greatly affects the reproducibility of acquired data and the accuracy of analysis. Particularly in live cell imaging and 3D observation, high-speed and high-resolution Z-axis control is required. The P-737 PIFOC Z stage employs a piezo-flexure mechanism that directly drives the objective lens, achieving high-speed Z positioning with nanometer resolution. Depending on the model, it can secure sufficient stroke length, making it suitable for Z-stack acquisition and long-duration observations. Its compact design also allows for easy integration into existing microscope systems. 【Usage Scenarios】 - Live cell imaging - 3D observation using confocal microscopy - Cell culture and tissue observation 【Benefits of Implementation】 - Reduced measurement time through high-speed Z scanning - Precise focusing with nanometer resolution - Highly reproducible imaging - Easy integration into microscope systems

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P-737 Sample Focusing Z Stage for Microscopes

High-precision PIFOC Z stage for achieving high-speed focusing in microscopes.

In the field of research using microscopes, high-speed and high-precision focusing significantly impacts the quality of observation results and the reproducibility of acquired data. Particularly in 3D imaging and Z-stack acquisition using confocal and fluorescence microscopes, high-speed Z positioning with nanometer resolution is required. The P-737 PIFOC Z stage employs a piezo-flexure structure that directly drives the objective lens, achieving high-speed response and high-precision Z-axis control. Its compact design makes it easy to integrate into existing microscope systems, meeting the advanced focusing requirements in research applications. 【Usage Scenarios】 - 3D imaging with confocal microscopes - Z-stack acquisition with fluorescence microscopes - Live cell imaging - Observation of nanoscale structures 【Benefits of Implementation】 - Reduced measurement time through high-speed Z scanning - High-precision focusing with nanometer resolution - Highly reproducible imaging - Easy integration into microscope systems

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Objective Focus for Nanotechnology P-725.xCDE2

Sub-nanometer resolution, focus scanner P-725.xCDE2 with a maximum movement of 800 µm.

In the field of nanotechnology, high-resolution and stable focus position control is required for the observation and evaluation of nanoscale structures. The P-725.xCDE2 PIFOC is a focus scanner for objective lenses that features a maximum travel range of 800 µm (depending on the model) and sub-nanometer resolution (when used with the appropriate controller). It achieves smooth Z-axis motion without friction or backlash through a piezo actuator and flexure guide mechanism. It is suitable for focus adjustment and Z-scan applications at the nanoscale in microscopy systems. 【Application Scenarios】 - Z-scanning in confocal microscopy - Focus position control in multiphoton microscopy - Height adjustment in semiconductor wafer inspection - Precise focus control during the observation of nanostructures 【Benefits of Implementation】 - Sub-nanometer resolution focus position control - High reproducibility motion without backlash - Wide Z travel range of up to 800 µm (depending on the model) - Flexure guide structure with no wear parts

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High-Precision Parallel Kinematics P-733.2 for Semiconductor Manufacturing

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.

In the semiconductor manufacturing field, extremely high precision and stability are required for the positioning of wafers and masks. With the advancement of miniaturization, we have entered an era where nanometer-level positioning errors directly affect device performance and yield. Particularly in exposure and inspection equipment, precise control that combines reproducibility and stability is essential. The P-733.2 achieves high-precision XY nanopositioning with a reproducibility of ±1nm. With a 100µm stroke and a high-rigidity parallel kinematics structure, it is also suitable for integration into semiconductor manufacturing equipment. High-precision positioning contributes to process stabilization and yield improvement. 【Application Scenarios】 - Exposure equipment - Mask/Wafer positioning - Inspection and measurement equipment 【Benefits of Implementation】 - Process stabilization with reproducibility of ±1nm - Yield improvement through high-precision positioning - Maximization of equipment performance through stable operation

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High-precision parallel kinematics for optical adjustment P-733.2

Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.

Precise optical axis adjustment and positioning in the field of optics are crucial elements for maximizing system performance. Especially in high-resolution microscopes and precision measurement devices, even slight positional deviations can significantly impact measurement accuracy and reproducibility. The P-733.2, which employs a high-precision parallel kinematics structure, achieves nano-level positioning with a reproducibility of ±1nm and accommodates transmission light applications with a stroke of 100µm on the XY axis. It contributes to the high precision of optical systems and the efficiency of adjustment tasks, from research and development to device integration. 【Application Scenarios】 - High-precision microscopes - Mask/wafer positioning - Interferometers and optical measurement devices 【Benefits of Implementation】 - High-precision positioning with ±1nm reproducibility - Smooth integration into transmission light optical systems - Reduced optical axis adjustment time and improved development efficiency

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Long Stroke Objective Focus for Optical Measurement P-725.xCDE2

Sub-nanometer resolution, compatible with maximum 800 µm stroke, high-speed and high-precision PIFOC focus scanner.

In the field of optical measurement, the focus accuracy and stability of the detection position are directly linked to the precision of the results in optical imaging and precise measurement. Applications that require evaluation of fine structures or high-speed data acquisition demand high-resolution focus control and responsive operational performance. The P-725.xCDE2 PIFOC focus scanner achieves sub-nanometer resolution position control with a maximum stroke of 800 µm. Equipped with PICMA piezo actuators and high-precision capacitive sensors in a flexure guide mechanism, it provides high linearity and reproducibility in Z-direction focus adjustment for optical measurement devices. This helps to minimize the impact of focus position shifts in optical measurements, contributing to improved measurement accuracy and device yield. 【Use Cases】 - High-precision measurements with confocal microscopy - High-speed Z-scanning in multiphoton microscopy - High-resolution imaging evaluation devices - Optical interferometers and phase measurement devices 【Benefits of Implementation】 - Sub-nanometer resolution focus control - Wide measurement range with a maximum stroke of 800 µm - Reduced inspection and measurement time due to high-speed response - Long-term stability through PIFOC/flexure structure

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[P-725.xCDE2 Focus Scanner for Semiconductor Inspection]

High-precision Z-focus scanner for semiconductor inspection equipment with sub-nanometer resolution and maximum 800 µm stroke capability.

In semiconductor inspection equipment, high-resolution Z-axis position control and rapid step motion are required for detecting fine defects and evaluating 3D focus. The P-725.xCDE2 PIFOC focus scanner is a high-precision actuator that achieves sub-nanometer resolution with a maximum focus range of 800 µm. By combining the PICMA piezo actuator with a flexure guide mechanism that incorporates capacitive sensors, high linearity, reproducibility, and stability are realized. This enables high-precision control of Z focus and high-speed scanning in semiconductor inspection, contributing to improved accuracy in the inspection process and enhanced throughput of the equipment. [Application Scenarios] - Z focus control for wafer surface defect inspection - High-resolution imaging in chip and package inspection - High-speed Z scanning in optical and laser-based inspection equipment - Defect analysis using optical inspection and confocal optical microscopy [Benefits of Implementation] - Improved measurement accuracy through high-precision focus control - Enhanced inspection throughput due to rapid Z step motion - Increased reliability of the equipment with stable long-term operation

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High-Speed Tip/Tilt Piezo Stage S-331 for Photonics

Resonant frequency of 10 kHz. A tip/tilt stage for photonics that achieves both high speed and high resolution.

In the field of photonics, the angle control and position stability of laser beams greatly influence coupling efficiency and system performance. Particularly in fiber coupling, beam steering, and high-speed correction control, high responsiveness, resolution, and excellent dynamic characteristics are essential. The S-331 is a high-speed Tip/Tilt piezo stage boasting a maximum resonance frequency of 10 kHz. It achieves both high resolution and fast response, enabling real-time beam correction and precise angle control. It contributes to improved focusing efficiency and stable operation in photonics systems. 【Application Scenarios】 - Laser beam steering - High-efficiency coupling to optical fibers - High-speed beam correction control - Optical alignment/stabilization applications 【Benefits of Implementation】 - High-speed and high-precision beam angle control - Improved coupling efficiency and reduced losses - Stabilization through real-time correction - Maximization of photonics device performance

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Optical Large Deflection Angle Piezo Chip Tilt Platform S-330

High dynamics chip tilt stage ideal for high-speed steering mirror applications.

In optical systems, fine angle adjustments of light beams and optical axis control are crucial factors that influence performance. Particularly in fields such as laser processing, optical communication, and beam control, high-speed and high-precision angle control is required. The S-330 piezo chip/tilt platform is a Tip/Tilt stage that achieves high-speed response and high resolution through piezo actuators. With sub-millisecond response and excellent position stability, it is ideal for high-speed steering mirror applications and precise optical alignment. 【Application Scenarios】 - Precise angle control of laser beams - Optical fiber alignment - Optical axis adjustment in optical microscopes - Beam steering/beam stabilization 【Benefits of Implementation】 - Reduced adjustment time due to high-speed response - Increased precision of optical systems due to high resolution - Improved device performance through dynamic control

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XY stage U-723 equipped with ultrasonic piezo motor for optical adjustment.

For high-precision positioning in optical applications. Compact size, 10 nm resolution, self-locking when powered off.

In the optical industry, precise positioning adjustments of lenses and mirrors significantly affect system performance. Particularly in situations requiring minute adjustments, high-precision positioning capability is essential. Low adjustment accuracy can lead to misalignment of the optical axis and focus, resulting in decreased system performance. The U-723 achieves a compact design with a 22mm range of motion and 10nm resolution, enabling precise positioning adjustments in optical systems. 【Application Scenarios】 - Adjustment of microscope objective lenses - Alignment of laser processing machine optical axes - Sample positioning in optical measurement instruments 【Benefits of Implementation】 - Improved optical performance through high-precision positioning - Space-saving design leading to overall equipment miniaturization - Enhanced safety through position retention when the power is off

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U-723 Small Linear Stage for Microscope XY Axis

For positioning samples in a microscope. High precision, space-saving, self-locking.

In the field of microscopy, precise positioning of samples is essential. Especially when observing tiny subjects, even slight vibrations or misalignments can significantly affect the observation results. The U-723 contributes to stable alignment of samples in microscopy with its high-precision positioning performance and a self-locking mechanism when the power is off. 【Usage Scene】 - Sample positioning stage for microscopes 【Benefits of Implementation】 - Improved observation accuracy through high-precision sample positioning - The driving principle and electrical control of the piezo motor are low-cost and customizable You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

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Miniature X-axis piezo stage with built-in capacitive sensor for microscopes.

For nano-precision scanning of microscope samples. Achieving stable positioning with 0.1nm resolution and high linearity.

In the field of microscopy, precise scanning of samples is required. Especially in high-magnification observations and analysis of fine structures, accurate positioning is essential. Misalignment can lead to degradation of the observed image and a decrease in measurement accuracy. The PIHera P-620.1/629.1 series addresses these challenges with 0.1 nm resolution and high-precision positioning. 【Application Scenes】 - Scanning of microscope samples - Optical alignment - Interferometric measurements 【Benefits of Implementation】 - High-precision observation and measurement - Accurate analysis of fine structures - Improved experimental efficiency You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

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NanoCube 6-Axis Piezo System for Optical Applications

Achieving fine adjustment of optical systems with 6-axis nanopositioning.

In optical field adjustment work, precise positioning of the optical axis is a crucial factor that influences the performance of the system. Particularly in fiber alignment and the arrangement of optical elements, accurate adjustments at the sub-micron level are required. Conventional stages often have limited degrees of freedom for adjustment, making high-precision positioning difficult. The NanoCube 6-axis piezo system P-616.65S addresses these challenges with its six degrees of nano control. 【Application Scenarios】 - Fiber alignment - Position adjustment of optical elements - Precision instruments such as microscopes 【Benefits of Implementation】 - Enables fine positioning at the nanometer level - Achieves stable adjustments with high rigidity and low crosstalk - Reduces maintenance costs through long-term stable operation

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PIHera XY Piezo Stage for Biotechnology

Ideal for cell manipulation and live cell observation. Achieves stable XY positioning with sub-nanometer precision.

In the field of biotechnology, particularly in cell manipulation and live cell observation, even slight positional shifts of samples can significantly impact the results. To achieve smooth and high-precision positioning while minimizing damage to cells, sub-nanometer resolution and high reproducibility are essential. This product offers high resolution below 1nm and bidirectional reproducibility of ±0.2nm, ensuring high reliability and efficiency in cell manipulation. 【Application Scenarios】 - Biosensor evaluation - Integration into microfluidic devices 【Benefits of Implementation】 - Improved reproducibility of experiments - Enhanced research efficiency - For detailed product specifications, please refer to the catalog.

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PIHera XY Piezo Stage for Microscopes

Ideal for microscope sample positioning with a maximum stroke of 1800µm and excellent accuracy provided by capacitive sensors.

In the field of microscopy, it is essential to scan the observation target with high precision to obtain clear images. Particularly in the observation of fine structures and biological samples such as cells, the accuracy of positioning significantly influences the observation results. Low positioning accuracy can lead to a lack of focus, making accurate observation difficult. A compact XY-axis piezo stage achieves high-precision scanning with a resolution of less than 1nm and bidirectional reproducibility of ±0.2nm. 【Application Scenarios】 - Scanning samples in microscopic observation - Fine adjustments during high magnification observation - Cell imaging 【Benefits of Implementation】 - Clear image acquisition through high-precision positioning - Reduction of observation time - Improvement of experimental reproducibility

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Variable Stroke Multi-Axis Compatible Nanopositioner for Optical Adjustment

Ideal for fine-tuning optical systems. High-precision nanopositioner with 0.1 nm resolution.

In optical field adjustment work, even a slight misalignment of the optical axis can significantly impact system performance. Particularly in situations requiring fine positional adjustments, high resolution, excellent linearity, and reproducibility are essential. Inaccurate positioning can lead to a decline in optical performance and measurement errors. This nanopositioner achieves a high resolution of up to 0.1 nm and excellent linearity of 0.02%. Furthermore, it supports variable stroke and multi-axis configurations (X, XY, Z, XYZ), allowing for flexible system construction tailored to specific applications. Direct position measurement using non-contact sensors and zero backlash flexure guides ensure high stability and reproducibility, maximizing the performance of optical systems. [Application Scenarios] - Scanning of microscope samples - Optical alignment - Interferometric measurements [Benefits of Implementation] - Improved optical system performance through high-precision positioning - Enhanced measurement accuracy - Improved work efficiency

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Piezo Nanopositioner for Semiconductor Manufacturing Equipment

Compact design with a 44 mm square. Piezo nano-positioning stage achieving a 120 µm operating range and 0.2 nm resolution.

In semiconductor manufacturing processes, precise positioning at the nanometer level is required during wafer processing and inspection stages. Especially in semiconductor processes where miniaturization is advancing, positioning accuracy significantly impacts product quality and yield. The P-611.XZ / P-611.2 is a piezo nano-positioner that achieves a maximum travel range of 120 µm and a high resolution of 0.2 nm, all within a compact design of 44 mm × 44 mm. With its high-precision flexure guide mechanism and PICMA(R) piezo actuators, it enables stable nano-positioning in semiconductor manufacturing and inspection equipment. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection equipment - Nano fabrication and micro fabrication equipment - Optical alignment equipment 【Benefits of Implementation】 - Improved yield through nano-level positioning - Enhanced inspection accuracy through high-precision positioning - Easier integration into equipment due to compact design - Stable process control due to high reproducibility

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Compact 2-Axis Nanopositioner for Optical Adjustment

44mm square, maximum stroke of 120µm, high-precision nanopositioner with 0.2nm resolution.

In optical field adjustment work, high-precision positioning of the optical axis is required. Particularly in the arrangement of optical elements that require fine adjustments, even slight positional deviations can cause light loss and measurement errors, affecting the performance and quality of the final product. The XZ/XYZ nanopositioner achieves a compact design with a 44mm square footprint, while providing a maximum stroke of 120µm and a high resolution of 0.2nm. Its zero-backlash flexure guide mechanism enables highly reproducible precise positioning. Furthermore, the adoption of PICMA® piezo actuators ensures high reliability and long lifespan. [Application Scenes] - Adjustment of microscope objective lenses - Fiber alignment - Positioning of optical elements [Benefits of Implementation] - Improved measurement accuracy through high-precision positioning - Increased work efficiency - Stabilization of product quality

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Optical Use: Maximum Resolution 0.2nm Piezo Stage P-611.Z

A 44mm square housing that achieves optical system focus adjustment at the nanometer level.

In the optical industry, high-precision focus adjustment is required. Particularly in situations that demand fine manipulation, such as microscopes and laser processing machines, accurate positioning is essential. Even slight misalignments can lead to measurement errors or reduced processing accuracy. Our compact Z-axis piezo stage P-611.Z achieves precise focus adjustment with a resolution of 2nm, maximizing the performance of optical systems. 【Application Scenarios】 - Focus adjustment of microscope objective lenses - Focus adjustment of laser processing machines - Precision positioning of optical measuring instruments 【Benefits of Implementation】 - Improved measurement accuracy through high-precision focus adjustment - Increased yield in fine processing - Enhanced performance and stabilization of equipment

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[For Precision Measurement] 44mm Square Compact Piezo Stage P-611.Z

A 44mm square casing that achieves height measurement at the nanometer level.

In the field of precision measurement, accurate height measurement is essential. Particularly in the measurement of fine structures and the precise profiling of surface shapes, nanometer-level accuracy is required. Conventional measurement methods are susceptible to the effects of vibrations and temperature changes, making accurate measurements difficult. The P-611.Z achieves a maximum resolution of 0.2nm and 0.1% linearity, addressing challenges in height measurement. 【Application Scenarios】 - Height measurement of semiconductor devices - Shape measurement of MEMS devices - Thickness measurement of optical components - Surface roughness measurement 【Benefits of Implementation】 - Enables height measurement at the nanometer level - Reduces measurement time - Improves measurement accuracy - Enhances product quality

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High-Precision Piezo Nano Positioner P-611.1 for Semiconductor Manufacturing

Achieving nanometer precision positioning in a compact and cost-effective manner.

In the semiconductor industry, as manufacturing processes become more advanced, high precision in the positioning of wafers and masks is required. Particularly in fine processing and inspection processes, positioning accuracy at the nanometer level affects product quality. Conventional systems have faced challenges such as large size and high costs. The P-611.1 piezo nano-positioner achieves precise positioning in semiconductor manufacturing at a low cost, with a compact design occupying only 44 x 44 mm, while providing a maximum stroke of 120 μm and a resolution of 0.2 nm. 【Application Scenarios】 - Wafer probing - Mask alignment - Fine processing - Inspection processes 【Benefits of Implementation】 - Improved yield through high-precision positioning - Space-saving due to equipment miniaturization - Enhanced return on investment through cost reduction

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P-611.1 Piezo Nanopositioner for Microscopes

Supports microscope scanning with low cost and compact design.

In scanning applications of microscopes, high precision positioning and stability are required. Especially in the observation and image acquisition of fine structures, accurate position control at the nano level is essential. If the positioning accuracy is low, there is a risk of missing the observation target or reducing the resolution of the images. The P-611.1 piezo nanopositioner is ideal for microscope scanning applications due to its compact design and high precision positioning performance. 【Usage Scenarios】 - Microscope observation - Scanning electron microscopy - Precision positioning of samples 【Benefits of Implementation】 - Improved observation accuracy through high precision positioning - Effective use of installation space due to compact design - Cost-effective implementation

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[Piezonano Positioner P-611.1 for Precision Machinery Assembly]

Ideal for nano-precision assembly that cannot be achieved with conventional motor stages.

In the field of precision machinery assembly, the accurate positioning of components affects the quality of the product. Particularly in the assembly of fine parts, high-precision positioning is required. Low positioning accuracy can lead to product defects and increased assembly time. The P-611.1 piezo nanopositioner, while being low-cost and featuring a compact design of 44 x 44 mm, achieves a resolution of 0.2 nm and a maximum stroke of 120 µm. Its high-speed response due to the piezo actuator enables high-precision and stable positioning at the nanoscale, contributing to the advancement of fine assembly processes. 【Application Scenarios】 - Precise positioning of fine components - High-speed assembly of small parts - High-precision inspection processes 【Benefits of Implementation】 - Improved assembly accuracy - Reduced defect rates - Shortened assembly time

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[Piezoscanner P-734] Optimal XY Piezoscanner for Scanning Microscopes

Flatness of 5 nm, resolution of 0.3 nm, achieving high-speed and high-precision operation with an XY-axis piezo scanner.

In the field of microscopic observation, precise positioning of samples and control of fine movements are essential for obtaining clear images. Particularly in high-magnification observations and analysis of microstructures, nanometer-level precision is required. Even slight misalignments or vibrations in positioning can significantly impact the observation results and hinder accurate data acquisition. The P-734 addresses these challenges with high-precision positioning and high-speed operation. 【Application Scenes】 - Optical Microscopes - Scanning Microscopes - Surface Shape Analysis 【Benefits of Implementation】 - Acquisition of high-precision observation images - Accurate analysis of microstructures - Reduction of observation time For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.

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