High-precision parallel kinematics for optical adjustment P-733.2
P-733.2 XY Piezo Nanopositioner
Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner ideal for transmitted light optical systems.
Precise optical axis adjustment and positioning in the field of optics are crucial elements for maximizing system performance. Especially in high-resolution microscopes and precision measurement devices, even slight positional deviations can significantly impact measurement accuracy and reproducibility. The P-733.2, which employs a high-precision parallel kinematics structure, achieves nano-level positioning with a reproducibility of ±1nm and accommodates transmission light applications with a stroke of 100µm on the XY axis. It contributes to the high precision of optical systems and the efficiency of adjustment tasks, from research and development to device integration. 【Application Scenarios】 - High-precision microscopes - Mask/wafer positioning - Interferometers and optical measurement devices 【Benefits of Implementation】 - High-precision positioning with ±1nm reproducibility - Smooth integration into transmission light optical systems - Reduced optical axis adjustment time and improved development efficiency
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【Features】 - Stroke: 100 x 100μm in the XY axis direction, ~10μm in height direction - Achieves a resolution of ~0.1nm with a capacitive sensor - High-speed version with linear motion - Vacuum-compatible and non-magnetic version - Improved dynamics through parallel control / precise multi-axis control - Active trajectory control through parallel measurement - Precision flexure guide system with no friction - Center opening of 50 x 50mm suitable for transmitted light applications 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide optimal positioning solutions tailored to our customers' needs. We offer a wide range of products including piezo stages and can propose complex systems that include peripheral equipment such as granite bases. We provide comprehensive support for all positioning-related challenges.
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Applications/Examples of results
Application examples - Image processing / stabilization - Scanning microscope - Surface shape analysis - Biotechnology - Semiconductor testing - Mask / wafer positioning - Micromanipulation - Nano positioning with high flatness / straightness
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.




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