High-Precision Parallel Kinematics P-733.2 for Semiconductor Manufacturing
P-733.2 XY Piezo Nanopositioner
Reproducibility ±1nm, XY axis 100µm stroke. High-precision nanopositioner for semiconductor manufacturing equipment.
In the semiconductor manufacturing field, extremely high precision and stability are required for the positioning of wafers and masks. With the advancement of miniaturization, we have entered an era where nanometer-level positioning errors directly affect device performance and yield. Particularly in exposure and inspection equipment, precise control that combines reproducibility and stability is essential. The P-733.2 achieves high-precision XY nanopositioning with a reproducibility of ±1nm. With a 100µm stroke and a high-rigidity parallel kinematics structure, it is also suitable for integration into semiconductor manufacturing equipment. High-precision positioning contributes to process stabilization and yield improvement. 【Application Scenarios】 - Exposure equipment - Mask/Wafer positioning - Inspection and measurement equipment 【Benefits of Implementation】 - Process stabilization with reproducibility of ±1nm - Yield improvement through high-precision positioning - Maximization of equipment performance through stable operation
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basic information
【Features】 - Stroke: 100 x 100μm in the XY axis direction, ~10μm in the height direction - Achieves a resolution of ~0.1nm with a capacitive sensor - High-speed version with linear motion - Vacuum-compatible and non-magnetic version - Improved dynamics through parallel control / precise control of multiple axes 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience with our Japanese subsidiary, we provide optimal positioning solutions tailored to our customers' needs. We offer a wide range of products, including piezo stages, and can propose complex systems that include peripheral equipment such as granite optical tables.
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Applications/Examples of results
Application examples - Image processing / stabilization - Scanning electron microscope - Surface shape analysis - Biotechnology - Semiconductor testing - Mask / wafer alignment - Micromanipulation - Nano-positioning with high flatness / straightness
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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