PI Japan Product Lineup

The P-726 is a PIFOC® high-load focus scanner that drives heavy high NA objective lenses with high speed and precision. It features built-in flexure guides and capacitive sensors, achieving an OpenLoop resolution of 0.3 nm and a linearity error of 0.02%. The resonance frequency is maintained at 1120 Hz without load and 560 Hz with a 210 g load, accelerating Z-scanning for semiconductor wafer inspection and confocal/super-resolution microscopy. It supports major thread sizes such as M32/M27 with the QuickLock adapter. *For more details, please download the PDF or contact us.*

The PIFOC(R) P-737 high-speed vertical positioning system is designed for use with XY stages in microscope inspection. 【Features】 ○ High-speed piezo operation in the vertical direction: Stroke up to 250μm (customizable up to 500μm) ○ Nanometer resolution ○ Accommodates specimen holding with a large central opening ○ Mechanically compatible with manual or motor-driven XY OEM stages ○ Response time in the millisecond range ● For more details, please contact us or refer to the catalog.

P-753 is a one-axis piezo nano positioning stage that controls a travel range of 15 to 38 µm with a resolution of 0.1 nm. By measuring the actual movable part with a two-electrode capacitive sensor and utilizing a frictionless structure with flexure guides, it achieves nanometer-level motion and positioning within a few milliseconds. *For more details, please download the PDF or contact us.*

The P-752 is an excellent single-axis nanopositioning stage with a flexure guide structure that incorporates a two-electrode capacitive sensor, achieving zero friction and outstanding straightness (pitch and yaw error ±1μrad), with an open-loop resolution of 0.1nm. Additionally, the built-in capacitive sensor measures the actual moving parts non-contactly at a sub-nanometer level, providing higher linearity and hysteresis compensation, ensuring long-term stability. *For more details, please download the PDF or contact us.*

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of only 44 x 44 mm ○ Stroke up to 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanism/electronic system configuration ○ Incredible long lifespan with PICMA(TM) piezo actuators ○ Available in Z stage, XY, XZ, and XYZ versions ● For more details, please contact us or refer to the catalog.

The PIHera P-620.1/629.1 series is a one-axis nanopositioner that combines a flexure guide with PICMA® piezo technology. It has a stroke range of 50 to 1800 µm, a minimum resolution of 0.1 nm, and achieves a linearity error of 0.02% by measuring the actual moving parts with an integrated capacitive sensor. The flexure guide has no wear parts, offers high rigidity, excellent straightness, and outstanding long-term stability. It can also be expanded to X, XY, Z, and XYZ configurations, making it ideal for applications such as microscope sample scanning, optical alignment, and interferometric measurements. *For more details, please download the PDF or contact us.*

The P-517/527 multi-axis piezo scanner uses zero-wear flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nanometer-level reproducibility and resolution. The available motion axes include XY, XYZ, and XYθz types. The XY axis has options of 100µm and 200µm, the Z axis is 20µm, and θz is 2mrad. It has a load capacity of 50N, making it ideal for applications such as optical inspection, wafer inspection, nanopositioning, measurement, and microscopy. It also allows for transmitted light with an aperture of 50 × 50mm. *For more details, please download the PDF or contact us.

This is an XYZ-axis nanopositioning stage that performs direct measurement using high-reliability PICMA piezoelectric drive and capacitive sensors. The XY-axis motion range is available in 30 x 30 µm and 100 x 100 µm types, while the Z-axis has a stroke of 10 µm. With an aperture of 50 x 50 mm, it is also ideal for transmitted light applications. It is used in high-precision microscopy, mask/wafer positioning, measurement technology, and more. *For more details, please download the PDF or contact us.*

The P-734 high dynamic XY piezo nano positioning stage achieves a linear stroke of 100 x 100 μm with sub-nanometer resolution and high flatness of motion. 【Features】 ○ Ultra-precise trajectory control ideal for surface shape analysis and scanning microscopy ○ Improved responsiveness through parallel control/measurement and multi-axis precision control ○ Stroke: 100 x 100 μm, center opening of 56 x 56 mm ○ Achieves a resolution of 0.4 nm with capacitive sensors ○ Incredible long lifespan with PICMA(TM) piezo actuators ● For more details, please contact us or refer to the catalog.

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of 44 x 44 mm ○ Stroke up to 120 x 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanical/electronic system configuration ○ Frictionless precision flexure guide system ○ Remarkable long lifespan with PICMA(TM) piezo actuators ○ Available in X, Z, and XYZ versions ● For more details, please contact us or refer to the catalog.

The P-561 to P-563 series are XYZ-axis piezo nanopositioners that utilize a parallel kinematics structure and capacitive sensors. The operational range is 100/200/300 µm for each XYZ axis (depending on the model), with a reproducibility of ±2 nm and linearity of 0.03%. The aperture is 66×66 mm, ensuring a clear path for transmitted light and laser light. The direct drive type operates at 45 µm on the XY axis and 15 µm on the Z axis, with a resonance frequency of 1000 Hz under no load, achieving high resolution and fast response. Additionally, the PICMA piezo ceramics are fully insulated with all-ceramic construction, providing humidity resistance, high reliability, and long lifespan. They are ideal for semiconductor testing, super-resolution microscopy, and photonics alignment. *For more details, please download the PDF or contact us.*

The P-611.Z stage is a piezo-based nanopositioning system featuring a footprint of just 44 x 44 mm and a closed-loop stroke of 100 μm. 【Features】 ○ Compact design: footprint of only 44 x 44 mm ○ Stroke up to 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanism/electronic system configuration ○ Frictionless precision flexure guide system ○ Remarkable long lifespan with PICMA(TM) piezo actuators ○ Available in X, XY, XZ, and XYZ versions ● For more details, please contact us or refer to the catalog.

The P-5x8 series features the piezo nano stage P-518.TCD with chip tilt and the long-stroke version P-528.TCD/ZCD, both developed on the same platform. It achieves a system resolution of 0.8 nm and a linearity error of 0.03% using highly reliable PICMA piezo ceramics, flexure guides, parallel kinematics, and capacitive sensors. The large aperture of 66 × 66 mm is suitable for interferometric measurements and transmitted light applications, with a load capacity of 50N, making it ideal for semiconductor testing, photonics, microscopy, and high-precision alignment. *For more details, please download the PDF or contact us.

The PIHera P-620.Z/P-621.Z/P-622.Z is a Z-axis piezo stage that drives vertical strokes of 50, 100, and 250 µm with a resolution of 0.1 nm. The capacitive sensor directly measures the moving platform, suppressing linear errors to 0.02%. The zero-backlash flexure guide requires no lubrication and is dust-free, achieving a resonance frequency in the kHz range and sub-millisecond response. The actuator is an all-ceramic insulated PICMA(R) that has demonstrated a long lifespan of 10 billion cycles. It is ideal for Z-axis control in devices that require both sub-nanometer stability and high speed, such as interferometers, confocal microscopes, and semiconductor inspection. *For more details, please download the PDF or contact us.*

The S-330 piezo chip/tilt platform is a high-speed and compact chip/tilt unit that accurately realizes the angular movement of the top platform around two orthogonal axes. 【Features】 ○ Resolution up to 20 nrad, excellent position stability ○ Light beam deflection up to 20 mrad (>1°) ○ Improved dynamics, stability, and linearity through parallel control design ○ Same-plane rotation axis and fixed pivot point to avoid polar rotation ○ Sub-millisecond response ○ For mirrors with a maximum diameter of 50 mm ○ Closed-loop version for improved linearity ○ Excellent temperature stability ● For more details, please contact us or refer to the catalog.

The "PIglide Direct-Drive Air Bearing Series" features magnetically preloaded air bearings and is driven by a linear servo motor with an integrated optical linear encoder. By combining these non-contact components, we have achieved a frictionless motion platform with the best performance, quality, and product lifespan. The air bearing stage series includes options such as the "XY-axis Small Air Bearing Stage," "XY-axis Large Air Bearing Stage," and "Air Bearing Rotary Stage." 【Features】 ■ Non-contact fully preloaded air bearings ■ Ideal for scanning or high-resolution positioning ■ Compatible with clean rooms ■ Customizable ■ Integrated optical linear encoder For more details, please refer to the catalog or feel free to contact us.

The PIMag Linear Motor Controller 'C-413' is a digital motion controller for PIMag voice coil drive. It supports one motor channel and two sensor channels, compatible with the V-275 and V-275 linear actuators. It is equipped with a wide range of support functions, including a data recorder that logs movement data such as motor current, speed, position, and position error. Additionally, the PIMag Linear Motor Controller also includes the "C-891" type, which has a maximum average current consumption of 3A. 【Features】 ■ Up to 4 sensor channels with force x2 and position x2 sensors ■ TCP/IP or USB interface for configuration and command transmission (depending on the version) ■ Real-time SPI interface for command transmission (depending on the version) ■ Optional analog input/output ■ Automatic zero function for holding current For more details, please refer to the catalog or feel free to contact us.

The N-331 PICMAWalk is a walking drive linear actuator that combines the nano-resolution of piezo elements with stepping motion. It is available in 25mm, 50mm, and 100mm types, with a driving force of 50N and a holding force of 60N. The PiezoWalk® walking drive operates with multiple piezo actuators performing walking motions, leading to the feed motion of the runner. By controlling the actuators, it enables the smallest steps and forward feed motions with a resolution of less than 1 nanometer. It performs high-precision position measurement using an incremental linear encoder. Additionally, it is compatible with actuators that can handle a vacuum of 10⁻⁹ hPa. *For more details, please download the PDF or contact us.*

The P-616 is an XYZ piezo nanopositioner that employs parallel kinematics. It offers a reproducibility of 10 nm and a system reproducibility of 0.4 nm, featuring high-reliability PICMA piezo ceramics, flexure guides, and capacitive sensors built into each axis. It is ideal for fiber positioning and alignment, microscopy, nano positioning, photonics, and micromanipulation. *For more details, please download the PDF or contact us. 【Features】 *For more details, please refer to the PDF materials or feel free to contact us.

The resonance frequency of 0.7 kHz (with a 1-inch mirror) enables dynamic movement and fast step & settling. Parallel kinematic design: A two-axis orthogonal platform with a single common pivot point, available without a mirror, with a 1/2-inch mirror, or with a 1-inch mirror type. Ideal for applications requiring high-speed and high-precision deflection, such as image stabilization, laser beam control, and optical communication. *For more details, please download the PDF or contact us.

The U-723 is a PILine XY stage that maintains the mechanical stability of the stage position through a self-locking drive when powered off. Power consumption and heat generation are significantly reduced. These characteristics are advantageous for applications with a small duty cycle, battery operation, or sensitivity to heat. The position of the axis is measured by an encoder, and a optical reference switch enables reliable and reproducible motion. 【Features】 ■ High-speed positioning in two axes ■ Lightweight and space-saving ■ High guide accuracy ■ Sensor resolution of 10nm ■ Self-locking in standby, no heat generation during standby ■ Low noise operation *For more details, please refer to the PDF document or feel free to contact us.

In the field of nanotechnology, the fabrication and evaluation of structures require positioning resolution at the nanometer level and high reproducibility. The P-752 is a linear piezo flexure stage equipped with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm (when used with the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash, achieving high straightness. It provides stable micro-displacement control for research and development applications that require positioning control at the nanoscale. 【Application Scenarios】 - Micro-positioning in nanostructure fabrication - Sample/probe position control in scanning probe microscopy (SPM) - Precision alignment in microfabrication processes - Evaluation of nanomaterials and surface analysis 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of micro-displacement control

In the field of measurement and evaluation, calibration and micro-positioning require nanometer-level resolution and high positional reproducibility. The P-752 is a linear piezo flexure stage equipped with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm (when used with an appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash, achieving high straightness. This supports stable micro-positioning in the calibration and evaluation processes of precision measurement instruments. 【Application Scenarios】 - Calibration and performance evaluation of precision measurement instruments - Alignment and positional correction of optical systems - Micro-displacement control in sensor evaluation and material testing 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of measurement accuracy through stable micro-displacement control

The P-752 is a high-precision piezo nano positioning stage with a maximum stroke of 35 µm and a maximum resolution of 0.1 nm. Its flexure guide structure and high-resolution capacitive sensors (closed-loop specification) achieve high reproducibility and stability while minimizing the effects of hysteresis. It provides reliable positioning performance in the field of biotechnology, where nanometer precision is required for applications such as cellular-level observation and manipulation of fine samples. 【Application Scenarios】 - Precision focusing in fluorescence microscopy and confocal microscopy - Nanoscale position control of cells and organoids - Micromanipulation - Biosensor evaluation and nano-level alignment 【Benefits of Implementation】 - High-precision positioning with a maximum resolution of 0.1 nm - High reproducibility and stability through closed-loop control - Compatibility for integration into microscopes and analytical devices due to compact design - Improved measurement efficiency through fast response

In optical system adjustments, it is required to stably control the optical axis and the positions of optical elements with minute precision. The P-753 LISA is a linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It is suitable for micro-position correction and alignment applications in microscopes, laser optical systems, and interferometers. 【Application Scenarios】 - Adjustment of the objective lens position in optical microscopes - Fine-tuning of laser beams - Optical fiber alignment - Slit position adjustment in spectrometers - Mirror position correction in interferometers 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Compact design suitable for device integration - Stabilization of micro-position corrections

In microscopy applications, a stage that can stably position samples and optical systems at the nanometer level is required. The P-753 LISA is a linear piezo stage with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It is suitable for micro-scanning and position correction of samples in microscopy systems. 【Usage Scenarios】 - Micro-scanning of samples using a microscope - Fine adjustment of focus position - Position correction during high-resolution observation Positioning at micro and nano scales 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Compact design suitable for device integration - Stable control of minute displacements

In the field of nanotechnology, positioning mechanisms with nanometer-level resolution and high reproducibility are required. The P-753 LISA is a linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when used with the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It is suitable for research and development applications that require sample positioning adjustments and micro-displacement control at the nanoscale. 【Application Scenarios】 - Position control for scanning probe microscopy (SPM) - Micro-positioning in nano-lithography - Precision alignment in microfabrication processes - Evaluation of nanomaterials and surface analysis 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Compact design suitable for device integration - Stable micro-displacement control

In the field of biotechnology, cell observation and micromanipulation require positioning stages that can stably control minute displacements. The P-753 LISA is a compact linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when used with an appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It supports nanometer-level positioning for integration into microscope systems and for fine adjustment of small samples. 【Application Scenarios】 - Fine adjustment of samples under a microscope - Focus and position correction during cell observation - Micromanipulation applications - Precision positioning of bio-samples 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Suitability for device integration due to compact design

In the field of precision measurement, calibration and micro-positioning corrections require nanometer-level resolution and high reproducibility. The P-753 LISA is a linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It provides stable nanopositioning for calibration processes of measuring instruments and micro-displacement control applications. 【Usage Scenarios】 - Calibration of precision measurement instruments - Micro-position adjustments in sensor evaluation - Reference movement in displacement and position measurement systems - Fine-tuning of optical measurement systems 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of micro-displacement control - Suitability for device integration due to compact design

In the field of photonics, positioning of optical elements and optical fibers requires nanometer-level resolution and high reproducibility. The P-753 LISA is a compact linear piezo stage equipped with a stroke of 15 to 38 µm (depending on the model) and a minimum resolution of 0.1 nm (when using the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash. It provides stable nanopositioning for optical alignment and micro-position correction applications. 【Application Scenarios】 - Optical fiber alignment - Optical fiber alignment - Fine adjustment and position correction of optical elements - Precision positioning of laser beam paths - Evaluation of photonic devices 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Suitability for device integration due to compact design

In the semiconductor industry, high-precision positioning is essential due to the miniaturization of manufacturing processes. Particularly in wafer inspection and exposure processes, even slight positional deviations can significantly affect product quality. The P-620.1/629.1 addresses these challenges and achieves high-precision positioning. With its built-in capacitive sensor, it achieves a linearity error of 0.02%, contributing to improved yield in semiconductor manufacturing. 【Application Scenarios】 - Wafer inspection - Exposure processes - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Increased yield - Streamlined manufacturing processes For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.

In the field of nanotechnology measurement, precise positioning is extremely important. Observing fine structures, performing precise machining, and conducting advanced experiments require nanometer-level accuracy. Positioning errors can compromise the reliability of measurement results and hinder research progress. PI's 0.1nm resolution nanopositioner achieves high-precision positioning through built-in capacitive sensors and flexure guides, addressing these challenges. 【Application Scenarios】 - Scanning microscope samples - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Acquisition of high-precision measurement data - Improved reproducibility of experiments - Enhanced efficiency in research and development

In the field of biotechnology, particularly in cell manipulation, precise positioning is required while minimizing damage to the cells. Nano-level accuracy is essential for elucidating biological phenomena, such as in cell culture, microscopic observation, and microinjection. Inaccurate positioning can lead to experimental failures and decreased reliability of data. PI's 0.1nm resolution nanopositioner enables precise positioning in cell manipulation, contributing to increased efficiency and accuracy in research. 【Application Scenarios】 - Cell culture - Microscopic observation - Microinjection - Cell selection 【Effects of Implementation】 - Minimizing damage to cells and improving the success rate of experiments - Enhancing the reliability of experimental data through accurate positioning - Achieving greater efficiency in research and more detailed observations

In semiconductor wafer inspection, high-resolution Z-axis focus control and fast responsiveness are required to stably detect fine defects. Particularly in optical inspection systems using high NA objectives, focus accuracy and reproducibility are directly linked to the reliability of inspection results. The P-726 PIFOC high-load objective lens focus scanner achieves a Z stroke of up to 100 µm with sub-nanometer resolution in position control. Direct position feedback from a capacitive sensor and a flexure guide structure provide high linearity, repeatability, and long-term stability. Furthermore, its high-speed settling performance of approximately 6 ms contributes to the optimization of inspection processes involving Z-step movements. Due to its high-load design, stable operation is possible even when using high NA objectives or additional optical components. [Application Scenarios] - Z focus control in optical inspection of semiconductor wafer surfaces - Defect analysis equipment using high NA objectives - Three-dimensional inspection using confocal optical systems - Z scanning in laser and optical interference inspection devices [Benefits of Implementation] - Improved measurement stability through high-precision focus control - Reduced Z step time due to high-speed settling - Increased design flexibility of optical systems due to high-load capability

In the field of biotechnology, cell observation is affected by minute focus fluctuations that impact image quality. The P-726 PIFOC is a high-load-capable focus scanner with a Z stroke of 100 µm and sub-nanometer resolution. Direct position feedback from a capacitive sensor and a flexure guide structure ensure high positioning accuracy and reproducibility. Furthermore, it maintains high dynamic performance with a resonance frequency of 560 Hz at a load of 210 g, even when equipped with high NA objective lenses. The fast settling time (approximately 6 ms) enhances the efficiency of Z-stack acquisition and focus scanning. 【Application Scenarios】 - Confocal microscopy - Super-resolution microscopy - Live cell imaging - 3D imaging with Z-stack acquisition 【Benefits of Implementation】 - Improved image stability through high-precision focus control - Enhanced measurement efficiency due to fast Z response - Increased design flexibility of optical systems due to high load capacity - High reproducibility in focus positioning

In the field of nanotechnology structural analysis, high-precision Z-direction focus control at the nanoscale is essential. The P-726 PIFOC is a high-load compatible focus scanner that achieves a stroke of 100 µm and sub-nanometer resolution (approximately 0.3 nm class). Direct feedback from a capacitive sensor and a flexure guide structure provide high positioning accuracy and reproducibility. Its high-speed settling performance of about 6 ms contributes to the efficiency of nanostructure observation and 3D imaging involving Z-scanning. 【Application Scenarios】 - Nanostructure observation using confocal microscopy - Z-scanning in super-resolution optical microscopy - Optical nanostructure analysis devices - 3D imaging evaluation devices 【Benefits of Implementation】 - High-precision focus control with sub-nanometer resolution - Improved measurement efficiency due to high-speed settling - Increased design flexibility of optical systems due to high load compatibility - Enhanced reproducibility through long-term stable operation

In the focus control of objective lenses in optical instruments and measurement devices, high-precision Z positioning and fast response are required. Particularly when the objective lens is large and has a high numerical aperture (NA), conventional mechanisms face challenges in operational response and stability, which can affect measurement accuracy and observation quality. The P-726 PIFOC high-load objective lens focus scanner achieves high-precision focus control with sub-nanometer resolution obtained through direct measurement using capacitive sensors, with a maximum stroke of 100 µm. Additionally, the flexure guide structure eliminates friction and backlash, maintaining high rigidity and stability even under high-load conditions. This enhances the accuracy and throughput of optical measurement devices, increasing the reliability of measurements and observations. [Application Scenarios] - Precision focus control of objective lenses - Z-scanning for confocal microscopes and super-resolution microscopes - 3D optical imaging devices - High-precision optical measurement devices (interferometers, autofocus systems) [Benefits of Implementation] - Improved optical measurement accuracy through high-precision Z position control - Reduced inspection and observation time due to fast operational response - High-load performance compatible with heavy lenses - Long-term stability and low maintenance requirements

In the semiconductor industry, high-precision positioning is required. Especially in wafer inspection and measurement of fine structures, sub-nanometer level stability and high-speed control are essential. Positioning errors can compromise the reliability of measurement results and potentially lead to reduced yields. This product achieves high-precision positioning in semiconductor measurements with a resolution of 0.1 nm and linearity of 0.02%. 【Application Scenes】 - Wafer inspection - Measurement of fine structures - Interferometers - Confocal microscopes 【Benefits of Implementation】 - Significant improvement in measurement accuracy - Yield enhancement - High-speed and high-precision positioning - Sub-nanometer level stability You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

In the nanotechnology manufacturing industry, sub-nanometer positioning accuracy is essential for microfabrication and precision measurement. Particularly in semiconductor manufacturing and the production processes of MEMS devices, even slight positional shifts can significantly impact product quality. The P-620.Z to P-622.Z models achieve high reliability and long lifespan through a combination of a frictionless flexure guide system and PICMA piezo actuators, contributing to the stabilization of manufacturing processes. [Application Scenarios] - Wafer inspection in semiconductor manufacturing - Microfabrication in MEMS device manufacturing - Precision measurements such as interferometers and confocal microscopes [Benefits of Implementation] - Improved yield in manufacturing processes - Enhanced product quality - Increased measurement accuracy You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

Positioning in the field of optics is a very important factor in high-precision measurement, inspection, and microfabrication. In particular, the adjustment of the position of optical components such as lenses and mirrors is a critical challenge that affects the performance of the system. Conventional mechanical positioning methods have limitations in accuracy due to friction and backlash, making high-precision positioning difficult in some cases. The P-517/527 multi-axis piezo scanner addresses these challenges in the positioning of optical components with its nano-level resolution and reproducibility. 【Application Scenarios】 - Optical inspection - Wafer inspection - Nano positioning - Measurement - Microscopy 【Benefits of Implementation】 - High-precision positioning with sub-nanometer resolution - Stable operation with frictionless flexure guides - High linearity with capacitive sensors - Capability for transmitted light measurement with a 50 x 50 mm aperture

In the field of precision machining, further miniaturization and quality enhancement are progressing, with positioning accuracy at the nano level becoming a crucial factor that influences product performance. Particularly in laser processing and micro-patterning, even slight errors caused by vibrations and friction directly affect processing quality. The P-517/P-527 multi-axis piezo scanner adopts a frictionless flexure guide integrated structure, eliminating backlash and wear. With PICMA piezo ceramics and high-resolution capacitive sensors, it achieves nano-level reproducibility and high dynamics. Its stable high-speed response enables precise position control in micro-machining, contributing to improved processing quality and yield. 【Application Scenarios】 - Laser micro-machining equipment - Micro-patterning - Wafer processing and inspection equipment - Nano-positioning applications - Precision measurement and machining systems 【Benefits of Implementation】 - Nano-level high-precision machining control - Improved processing quality due to stable operation - Reduced processing time and increased productivity - Cost reduction through improved yield

In the field of measurement, calibration and fine positioning require high reproducibility and stable positioning performance. Especially in measurements and alignments at the nanoscale, even slight backlash or friction can affect the reliability of the measurement results. The P-517/P-527 multi-axis piezo scanner adopts an integrated structure with frictionless flexure guides, minimizing hysteresis and mechanical play. With nanometer-level resolution and high reproducibility, it contributes to improving the accuracy of calibration work and precise measurements. Stable operating characteristics also contribute to ensuring long-term measurement reliability. 【Application Scenarios】 - Optical inspection equipment - Wafer inspection and measurement equipment - Nano-positioning applications - Precision measurement systems - Microscopes and scanning systems 【Benefits of Implementation】 - Improved calibration accuracy due to high reproducibility - Stable measurement environment due to frictionless structure - Enhanced reliability of measurement data and strengthened quality control

In optical system adjustments, even a slight misalignment of the optical axis can significantly impact resolution and measurement accuracy. This is especially critical in applications such as interferometers, high-resolution microscopes, and precision alignment, where nano-level Z control and tip-tilt adjustments are essential. The P-518/P-528 series achieves high-precision control with Z-axis strokes of 100µm/200µm and tip-tilt of 1mrad/2mrad. Its large aperture design of 66mm makes it ideal for transmitted light applications. The high-rigidity flexure guide structure ensures stable reproducibility, contributing to improved accuracy and efficiency in optical adjustment tasks. 【Application Scenarios】 - Adjustment of microscope objective lenses and samples - Optical fiber alignment - Interferometer and wavefront measurement systems - Semiconductor inspection equipment 【Benefits of Implementation】 - Nano-level Z and angle adjustments - Flexible adaptation to transmitted light optical systems - Improved measurement accuracy through stable optical axis maintenance - Enhanced work efficiency due to reduced adjustment time

In scanning microscopy, even slight misalignments or tilts of the sample or objective lens can significantly affect the resolution and contrast of the image. This is especially critical in high-magnification observations and fine structure analyses, where nanometer-level Z control, angle correction, and high stability are essential. The P-518/P-528 series is a high-precision piezo stage that combines Z-axis strokes of 100µm/200µm with chip tilt control. Its large aperture design of 66mm accommodates transmitted observations. With high linearity and reproducibility, it enables the acquisition of high-quality images with minimized blur and distortion, contributing to the performance enhancement of microscopy systems. 【Application Scenes】 - Confocal microscopy - Fluorescence microscopy - Scanning probe microscopy (SPM) - Cell and live cell observation - Material and fine structure analysis 【Benefits of Implementation】 - High-precision Z scanning at the nanometer level - Stabilization of images through chip tilt correction - 66mm aperture for transmitted observations - Improved high-resolution image acquisition and reproducibility - Enhanced research and development efficiency

In the field of precision measurement, even slight positional shifts or angular errors can significantly impact measurement results. This is especially true for the evaluation of fine structures and measurements using transmitted light, where nanometer-level resolution, high stability, and sufficient aperture diameter are required. The P-518/P-528 series is a high-precision piezo stage that combines a Z-axis stroke of 100µm/200µm with chip tilt control. Its large aperture design of 66mm accommodates transmitted light measurements, achieving high linearity and reproducibility. This contributes to improved reliability in precision measurements and alignment processes. [Application Scenarios] - Semiconductor inspection and evaluation equipment - Photonics/optical measurements - Microscope/interferometer systems - High-precision alignment applications [Benefits of Implementation] - High-precision Z and angular adjustments at the nanometer level - Compatibility with transmitted light measurements due to the 66mm aperture - Enhanced measurement reliability through high linearity and stability