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  6. P-5x8 Piezo Stage with Z Chip Tilt Aperture for Scanning Microscopy

P-5x8 Piezo Stage with Z Chip Tilt Aperture for Scanning Microscopy

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P-518, P-528 Piezo Z/Chip/Tilt Stage

last updated:Feb 19, 2026

PI Japan
PI Japan
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Nano-level scanning supporting high magnification observation. Z-chip tilt piezo stage with a 66mm aperture.

In scanning microscopy, even slight misalignments or tilts of the sample or objective lens can significantly affect the resolution and contrast of the image. This is especially critical in high-magnification observations and fine structure analyses, where nanometer-level Z control, angle correction, and high stability are essential. The P-518/P-528 series is a high-precision piezo stage that combines Z-axis strokes of 100µm/200µm with chip tilt control. Its large aperture design of 66mm accommodates transmitted observations. With high linearity and reproducibility, it enables the acquisition of high-quality images with minimized blur and distortion, contributing to the performance enhancement of microscopy systems. 【Application Scenes】 - Confocal microscopy - Fluorescence microscopy - Scanning probe microscopy (SPM) - Cell and live cell observation - Material and fine structure analysis 【Benefits of Implementation】 - High-precision Z scanning at the nanometer level - Stabilization of images through chip tilt correction - 66mm aperture for transmitted observations - Improved high-resolution image acquisition and reproducibility - Enhanced research and development efficiency

    Piezoelectric DevicesencoderActuator
csm_PI_P-518.ZCD_b91.jpg_Bilder-Web_c2fc5486d0.jpg

P-5x8 Piezo Stage with Z Chip Tilt Aperture for Scanning Microscopy

csm_PI_P-518.ZCD_b91.jpg_Bilder-Web_c2fc5486d0.jpg
csm_PI_P-518.ZCD_b91.jpg_Bilder-Web_c2fc5486d0.jpg
  • Related Link - https://www.pi-japan.jp/ja/products/nanopositionin…
  • Special site - Product/service details - https://pr.mono.ipros.com/pi-japan/product/

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【Features】 - Available in 1-axis and 3-axis versions - Achieves closed-loop vertical/tilt range of up to 200μm/2mrad - Improved responsiveness and multi-axis precision control through parallel control/measurement structure - Frictionless precision flexure guide system - Remarkable long lifespan with PICMA(TM) piezo actuators - Center opening of 66 x 66mm - High linearity with capacitive sensors 【Our Strengths】 With over 50 years of experience at our headquarters in Germany and 30 years as a Japanese corporation, PI offers new solutions in precision positioning products. We provide positioning products such as piezo stages & actuators and hexapods. Additionally, we have expanded our lineup of linear motor-driven products and high-precision air bearing stages. Attention to the foundation is also crucial in positioning, and we offer granite bases, allowing us to propose composite systems. We provide comprehensive solutions for production sites worldwide, advanced equipment, and cutting-edge research across various fields. Please take a look.

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Applications/Examples of results

Application examples - Various measurements - Interferometer - Optics - Scanning microscope - Mass storage device testing - Laser technology - Micro-machining

catalog(3)

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P-518~P-528 Z-chip tilt opening piezo stage

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PI

PI Japan

Electronic Components and Semiconductors

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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.

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