XYZ Axis Nano-Level Precision Piezo Stage with Aperture P-733
P-733.2・P-733.3 XY(Z) Piezo Nanopositioning Stage
Reproducibility ±1nm, XY axis 100 µm + Z axis 10 µm stroke, optimal for transmitted light with a 50 mm aperture.
This is an XYZ-axis nanopositioning stage that performs direct measurement using high-reliability PICMA piezoelectric drive and capacitive sensors. The XY-axis motion range is available in 30 x 30 µm and 100 x 100 µm types, while the Z-axis has a stroke of 10 µm. With an aperture of 50 x 50 mm, it is also ideal for transmitted light applications. It is used in high-precision microscopy, mask/wafer positioning, measurement technology, and more. *For more details, please download the PDF or contact us.*
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basic information
- Stroke: 100 x 100μm in the XY axis direction, approximately 10μm in the height direction - Achieves a resolution of approximately 0.1nm with a capacitive sensor - High-speed version with linear motion - Vacuum-compatible and non-magnetic version - Improved dynamics through parallel control / precise control of multiple axes - Active trajectory control through parallel measurement - Frictionless precision flexure guide system - Center opening of 50 x 50mm suitable for transmitted light applications *For more details, please download the PDF or contact us.
Price information
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Applications/Examples of results
Application examples - Image processing / stabilization - Scanning electron microscope - Surface shape analysis - Biotechnology - Semiconductor testing - Mask / wafer positioning - Micromanipulation - Nano positioning with high flatness / straightness
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
