Zero friction. Achieving high-precision positioning of ±0.2 µm within a movement range of 25 mm.
The A-143 PIglide is a compact linear air bearing stage with a travel range of 25 mm. Its non-contact structure eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms. It boasts a minimum increment of 0.025 µm, position accuracy of ±0.2 µm, and straightness of ±0.05 µm, providing nanometer-level precision, making it ideal for staging in measurement, inspection, and optical equipment. It features a built-in linear motor and a 32-bit BiSS-C encoder, enabling high-performance motion with a maximum speed of 390 mm/s and acceleration of 10 m/s².
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basic information
- Operating area: 85 mm × 75 mm - Low profile: 40 mm - Travel range: 25 mm - Load capacity: 4 kg - Speed: 390 mm/s - Acceleration: 10 m/s² *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
- X-axis stage of high-precision measurement equipment - Fine positioning of optical elements (including fiber alignment) - Transport system for pattern formation and lithography - Precision stage for scanning systems - Transport section of semiconductor wafer inspection equipment - Non-contact linear motion control in medical devices - Testing equipment and analytical instruments in cleanroom environments *For more details, please refer to the catalog or feel free to contact us.
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.