[For FPD Manufacturing] Small Linear Air Bearing Stage A-143
A-143 PIglide Small Linear Air Bearing Stage
Zero friction, high-precision positioning. Contributes to quality improvement in the FPD inspection process.
In the FPD manufacturing industry, high-precision positioning is required in the inspection process. Particularly in the detection of fine defects and dimensional measurements, accurate positioning is essential to suppress the occurrence of defective products and improve yield. Using a stage with low positional accuracy can compromise the reliability of inspection results and make accurate evaluation difficult. The A-143 PIglide contributes to the improvement of FPD inspection quality with its high-precision positioning of ±0.2 µm. 【Application Scenarios】 - FPD defect inspection - Dimensional measurement - Alignment 【Benefits of Implementation】 - Improved inspection accuracy - Reduced defect rate - Increased productivity
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basic information
**Features** - Zero friction non-contact structure - High precision positioning of ±0.2 µm within a movement range of 25 mm - Minimum increment of 0.025 µm - Maximum speed of 390 mm/s, acceleration of 10 m/s² - Compatible with clean rooms **Our Strengths** Based on over 50 years of experience at our headquarters in Germany and 30 years of experience with our Japanese subsidiary, we provide optimal positioning solutions tailored to our customers' needs. We offer a wide range of products, including piezo stages, as well as peripheral equipment such as granite bases, and we can also propose complex systems.
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Applications/Examples of results
- X-axis stage of high-precision measurement devices - Fine positioning of optical elements (including fiber alignment) - Transport system for pattern formation and lithography - Precision stage of scanning systems - Transport section of semiconductor wafer inspection equipment - Non-contact linear motion control in medical devices - Testing and analysis equipment in cleanroom environments *For more details, please refer to the catalog or feel free to contact us.
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
![[A-143 High Precision Linear Air Bearing Stage for Semiconductor Manufacturing]](https://image.mono.ipros.com/public/product/image/311014/IPROS4415732724823624608.jpg?w=280&h=280)
