Achieves high-speed and smooth sub-micron operation with 5nm resolution at 200mm/s.
The A-142 is a compact linear stage driven by a voice coil motor, achieving speeds of up to 200 mm/s and accelerations of 10 m/s² within a travel range of 10 mm. It offers a sensor resolution of 5 nm, a position accuracy of ±0.2 µm, and a minimum incremental motion of 50 nm. With a zero-wear air bearing structure, it requires no lubrication and is suitable for cleanroom applications, making it ideal for semiconductor inspection, optical adjustment, and measurement applications.
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basic information
- Speed: Maximum 200 mm/s - Acceleration: Maximum 10 m/s² - Sensor resolution: 5 nm - Slim design: 27 mm - Ultra-compact motion platform: 75 mm × 80 mm - Travel range: 10 mm - Load capacity: 3 kg *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
- Fine positioning and scan control in semiconductor inspection equipment - High-precision alignment of optical elements and fibers - High-speed alignment of micro components in the field of photonics - Non-contact nano positioning in clean rooms - Smooth linear motion control in precision measurement equipment - Modular configuration of vertical Z-axis stages and XY stages *For more details, please refer to the catalog or feel free to contact us.
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.