Maximum measurement range of 150µm, compatible with high-precision nano displacement control.
The D-050/D-100 is a two-electrode capacitive sensor provided by PI that achieves a measurement range of up to 150µm and a resolution of 0.01nm. It is ideal for nanometer-scale measurements due to its higher resolution than interferometers and its non-contact method. It supports parallel measurements and allows for real-time correction in multi-axis control. Linearity is less than 0.01% (when using a digital controller), and the bandwidth is up to 10kHz. It is suitable for clean environments, semiconductor manufacturing, and integration into measuring instruments.
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basic information
- Ideal for applications requiring high precision - Measurement range: ~ 0.01nm - Resolution: 0.01nm - When using a digital controller - Linearization: ~ 0.01% - Bandwidth: ~ 10kHz *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
- High-precision positioning and measurement *For more details, please refer to the catalog or feel free to contact us.
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.