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  6. High-Resolution Capacitive Sensors for Nanotechnology D-050・D-100

High-Resolution Capacitive Sensors for Nanotechnology D-050・D-100

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Capacitive Sensor D-050・D-100

last updated:Mar 16, 2026

PI Japan
PI Japan
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Achieving nano displacement measurement with sub-nanometer resolution. An optimal non-contact displacement sensor for nano material evaluation and nano positioning.

In the field of nanotechnology, it is important to accurately measure minute displacements and deformations of materials and structures at the nanometer level. In particular, sensors capable of detecting slight changes in displacement with high resolution are required for nanomaterial evaluation, nanomeasurement, and nanopositioning. The D-050 / D-100 is a high-resolution sensor that employs a capacitive method for non-contact displacement measurement. With a maximum resolution of 0.01 nm, it enables nanometer-scale displacement measurement and high-precision position control, facilitating high-accuracy measurements in nanotechnology research and nanomeasurement systems. 【Application Scenarios】 - Evaluation of nanomaterial properties - Measurement of thin film thickness - Precise measurement of surface shapes 【Benefits of Implementation】 - Enables high-precision measurements at the nanometer scale - Minimizes the impact on materials through non-contact measurement - Allows real-time correction through multi-axis control

    Converters and TransducersOther electronic partsSensors
csm_D-050_und_D-100_Leitbild.tif_Bilder-Web_e4fdde7017.jpg

High-Resolution Capacitive Sensors for Nanotechnology D-050・D-100

csm_D-050_und_D-100_Leitbild.tif_Bilder-Web_e4fdde7017.jpg
csm_D-050_und_D-100_Leitbild.tif_Bilder-Web_e4fdde7017.jpg
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【Features】 - Maximum measurement range of 150µm, resolution of 0.01nm - Non-contact measurement - Supports parallel measurement - Linearity of less than 0.01% (when using a digital controller) - Maximum bandwidth of 10kHz 【Our Strengths】 Based on over 50 years of experience from our headquarters in Germany and 30 years of experience from our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we propose optimal solutions tailored to our customers' needs.

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- High-precision positioning and measurement *For more details, please refer to the catalog or feel free to contact us.

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2 Electrode Capacitive Sensor D-050/D-100

2 Electrode Capacitive Sensor D-050/D-100

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Single Electrode Capacitive Sensor D-510 PISecaTM

Single Electrode Capacitive Sensor D-510 PISecaTM

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Company information

PI

PI Japan

Electronic Components and Semiconductors

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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.

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