Non-contact displacement measurement sensor with a resolution of less than 1 nm and a maximum bandwidth of 10 kHz.
The D-510 PISeca is a single-electrode capacitive sensor that achieves a maximum measurement range of 500µm and a resolution of less than 1nm. The sensor probe is easy to install with a LEMO connector. Uniformity of the electric field is ensured by the guard ring electrode, achieving high linearity (maximum 0.1%). When combined with dedicated electronics such as the E-852.10, it enables excellent nanometer-level displacement measurements with both static and dynamic resolution.
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basic information
- Non-contact measurement of distance/movement/vibration - Absolute position detection - Sub-nanometer resolution - Measurement range up to 500μm - Easy to integrate - Compatible with high frequency bands *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
- Semiconductor manufacturing/testing and measurement - Precision machining *For more details, please refer to the catalog or feel free to contact us.
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.