Piezo Walk drive, nanometer precision, for positioning in semiconductor manufacturing.
In the semiconductor manufacturing industry, high precision and stability are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, positioning capability at the nanometer level becomes a crucial factor that affects product quality and yield. Low positioning accuracy can lead to manufacturing defects and inspection errors, potentially resulting in increased costs. Our high-output & high-precision piezo linear stage N-332 achieves nanometer-level positioning through piezo Walk drive, contributing to solving challenges in semiconductor manufacturing. 【Application Scenarios】 - Wafer probing - Mask alignment - Semiconductor manufacturing equipment 【Benefits of Implementation】 - Improved yield through high-precision positioning - Streamlined manufacturing processes - Stabilization of product quality
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【Features】 - Travel range: 25mm and 50mm types - 75 N active force - 3 nm minimum incremental motion - Self-locking when powered off - Multi-axis setup support: XY, XZ, XYZ 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience in our Japanese subsidiary, we provide optimal positioning solutions tailored to our customers' needs. We offer a wide range of products, including the world's number one piezo stage, linear motor-driven products, and high-precision air bearing stages. We provide comprehensive solutions for all positioning challenges.
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Application fields - Scanning Electron Microscopes (SEM) and Transmission Electron Microscopes (TEM) in life sciences and semiconductor manufacturing - Super-resolution microscopy, particularly 4Pi microscopy - Nanoindentation
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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