Achieving a holding force of up to 800N and a resolution of 5nm. High-thrust piezo drive supporting high-precision positioning in semiconductor manufacturing equipment.
In semiconductor manufacturing, high-precision positioning at the nanometer level is required in processes such as wafer inspection and nano-lithography. Even slight positioning errors can lead to a decline in product quality and a deterioration in yield. The N-216 is a high-thrust linear actuator that employs PI's proprietary NEXLINE(R) PiezoWalk(R) walking drive technology. With a high resolution of 0.03nm (open loop) / 5nm (closed loop) and a maximum holding force of 800N, it achieves high-precision and stable nano-positioning in semiconductor manufacturing equipment. [Application Scenarios] - Wafer inspection equipment - Nano-lithography equipment - Semiconductor manufacturing equipment - Nano-measurement equipment - Precision positioning applications [Benefits of Implementation] - Improved yield through high-precision positioning at the nanometer level - Stable positioning performance due to high-thrust drive - Increased efficiency in manufacturing processes - Contribution to the stable production of high-quality semiconductor products
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basic information
【Features】 - Resolution of 0.03nm (open loop) / 5nm (closed loop) - High-load positioning with a maximum holding force of 800N - Non-magnetic, suitable for use in magnetic field environments - Automatic locking function when stationary - Compatible with vacuum and cleanroom environments 【Our Strengths】 Based on over 50 years of experience from our headquarters in Germany and 30 years of experience from our Japanese subsidiary, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide, leveraging our precision control technology. With a rich lineup and technical expertise, we offer optimal solutions tailored to our customers' needs.
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Applications/Examples of results
- Semiconductor manufacturing - Semiconductor testing - Wafer inspection - Nano lithography - Nano imprinting - Nano measurement - Active vibration damping - Operation in a strong magnetic field *For more details, please refer to the catalog or feel free to contact us.*
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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