PI Japan Product Lineup

In laser processing, the precision and response speed of beam position and angle control greatly influence processing quality and productivity. Especially in fine processing and high-speed scanning, even slight fluctuations or delays in the beam can lead to decreased processing accuracy and defects. The "S-335" is a chip/tilt-type piezo platform that combines a large deflection angle of up to 35 mrad (optical deflection angle of 70 mrad) with high-speed response. Its parallel kinematics structure enables high-speed and high-precision two-axis control, making it ideal for beam steering and scanning applications. Additionally, the zero-backlash flexure guide and strain sensors ensure high linearity and excellent reproducibility, allowing for stable beam control even during high-speed operation. 【Application Scenarios】 - Precise positioning of laser beams - Image stabilization - Laser beam control - Optical communication 【Benefits of Implementation】 - Improvement in processing accuracy and efficiency - Realization of high-speed and high-precision processing - Response to diverse processing needs

• Other industrial robots
• Actuator
• Piezoelectric Devices

The S-335 Chip/Tilt Piezo Platform is a high-performance stage that achieves both large deflection angles and high dynamic response. It enables high-precision angle control without friction or backlash through piezoelectric elements, and realizes equivalent high performance with a two-axis parallel kinematics design. It is ideal for applications such as microscope scanning, high-speed imaging, and beam steering, supporting stable and high-precision operation. For detailed performance, please refer to the catalog. 【Application Scenes】 - Laser scanning microscopy - High-speed sample scanning and optical imaging - Beam steering/scanning control - Image processing/beam stabilization devices 【Benefits of Implementation】 - Achieves a wide scanning range with ±35 mrad high angle control - Enables high-speed step and settle due to high dynamic performance - High reliability with high-precision angle control without friction or backlash

• Other industrial robots
• Actuator
• Piezoelectric Devices

In the optical industry, alignment work requires precise positioning of laser beams and optical elements. In particular, high-precision alignment is a crucial factor that influences the performance of optical systems. Misalignment can lead to decreased measurement accuracy and system malfunctions. The S-335 chip/tilt piezo platform enables fast and high-precision beam steering, contributing to the efficiency and accuracy of optical alignment tasks. 【Use Cases】 - Precise positioning of laser beams - Angle adjustment of optical elements - Image stabilization - Laser beam control - Optical communication 【Benefits of Implementation】 - Reduced alignment time - Improved system performance - Enhanced measurement accuracy - Improved work efficiency

• Other industrial robots
• Actuator
• Piezoelectric Devices

The resonance frequency of 0.7 kHz (with a 1-inch mirror) enables dynamic movement and fast step & settling. Parallel kinematic design: A two-axis orthogonal platform with a single common pivot point, available without a mirror, with a 1/2-inch mirror, or with a 1-inch mirror type. Ideal for applications requiring high-speed and high-precision deflection, such as image stabilization, laser beam control, and optical communication. *For more details, please download the PDF or contact us.

• Other industrial robots
• Actuator
• Piezoelectric Devices

In high-magnification microscopy, even slight positional shifts can significantly affect the clarity and reproducibility of images. This is especially true for confocal microscopes, fluorescence microscopes, and live cell observations, where precise XYZ control at sub-micron levels is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm on each axis. Its high-stiffness flexure guide structure enables smooth operation without backlash, allowing for fine positioning with nanometer resolution. It also supports Z-axis focus control and XY scanning applications, making it versatile for a wide range of research uses and equipment integration. 【Usage Scenarios】 - Z-axis focus control for confocal microscopes - Multi-point observation with fluorescence microscopes - Live cell imaging - Fine positioning under high-magnification objectives - Observation of nanoscale materials 【Benefits of Implementation】 - High-precision focus control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning operation due to high-stiffness design - Easy integration into existing microscopes with compact design

• Actuator
• Cartesian Robot
• Piezoelectric Devices

In laser microfabrication, even slight deviations in beam position or focus directly affect processing quality. This is especially true for microfabrication and high aspect ratio processing, where precise position control at the sub-micron level is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with 100 µm stroke on each axis. Its high-rigidity flexure guide structure enables backlash-free, highly linear motion, allowing for fine position adjustments with nanometer resolution. By integrating it into laser processing equipment, it supports: - Fine adjustment of beam position - High-precision control of focus position - Correction of processing position to enhance the stability of microfabrication. 【Application Scenarios】 - Integration into laser microfabrication equipment - Precise control of focus position - Position correction for micro-drilling processes - Thin film processing and precision patterning 【Benefits of Implementation】 - High-precision control of focus position with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into equipment with compact design - Stabilization of microfabrication quality

• Actuator
• Cartesian Robot
• Piezoelectric Devices

In the field of nanotechnology, the precision of sample and probe positioning significantly affects the reproducibility of experimental results. Scanning Probe Microscopy (SPM) and nano-lithography applications require stable XYZ control with nanometer resolution. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for high-precision positioning at nanometer resolution. It is utilized as a positioning control platform that supports nanoscale measurement, processing, and evaluation, catering to both research applications and device integration. 【Application Scenarios】 - Scanning Probe Microscopy (SPM/AFM/STM) - Nano-lithography equipment - Nano material evaluation - Nano device research and development - High-precision sample positioning 【Benefits of Implementation】 - High-precision position control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning enabled by high-rigidity design - Compact design facilitates integration into vacuum systems and research equipment

• Actuator
• Cartesian Robot
• Piezoelectric Devices

In optical systems, even slight deviations in beam position or optical axis can significantly affect coupling efficiency and measurement accuracy. This is especially critical in applications such as interferometric measurements, laser focusing, and fiber alignment, where sub-micron positioning control is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm per axis. Its flexure guide structure enables backlash-free, highly linear motion. With nanometer resolution for fine positioning and high mechanical stability, it supports the precise alignment of optical systems with high reproducibility. Designed to accommodate a range of applications from research to device integration, it meets the advanced positioning control needs in the photonics field. 【Application Scenarios】 - Optical fiber alignment (optimization of coupling efficiency) - Fine adjustment of laser focusing positions - Interferometric and holography devices - Microscopy stage fine motion control - Integration into photonics research equipment 【Benefits of Implementation】 - Improved optical axis adjustment accuracy with nanometer resolution - High reproducibility due to backlash-free structure - Drift reduction through high-stiffness flexure design - Easier integration into devices due to compact design

• Actuator
• Cartesian Robot
• Piezoelectric Devices

In semiconductor processes and inspection equipment, position correction and focus adjustment at the submicron level are key to stabilizing quality. Particularly in inspection and fine processing stages, high-precision position control with nanometer resolution is required. The P-616 NanoCube is a compact XYZ piezo nano positioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for fine position adjustments with nanometer resolution. It is suitable for applications such as fine motion correction stages in semiconductor manufacturing equipment and integration into inspection devices. 【Application Scenarios】 - Fine position correction for wafer inspection equipment - Mask inspection processes - Focus adjustment for laser annealing devices - Fine motion control for probing equipment - Semiconductor research and development applications 【Benefits of Implementation】 - High-precision position correction with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into devices with compact design - Contributes to the stabilization of fine processes

• Actuator
• Cartesian Robot
• Piezoelectric Devices

The P-616 is an XYZ piezo nanopositioner that employs parallel kinematics. It offers a reproducibility of 10 nm and a system reproducibility of 0.4 nm, featuring high-reliability PICMA piezo ceramics, flexure guides, and capacitive sensors built into each axis. It is ideal for fiber positioning and alignment, microscopy, nano positioning, photonics, and micromanipulation. *For more details, please download the PDF or contact us. 【Features】 *For more details, please refer to the PDF materials or feel free to contact us.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

In the optical industry, precise positioning at the nanometer level is required for the adjustment of intricate optical systems. Particularly in situations such as optical axis alignment and lens positioning, where even slight misalignments can significantly impact system performance, high-precision positioning capability is essential. Inaccurate adjustments can lead to image distortion and reduced measurement accuracy. The high-thrust PICMAWalk actuator N-331 achieves positioning with nanometer precision, maximizing the performance of optical systems. 【Application Scenarios】 - Adjustment of objective lenses in optical microscopes - Optical axis alignment in laser processing machines - Wafer positioning in semiconductor manufacturing equipment 【Benefits of Implementation】 - High-precision positioning at the nanometer level - Improved performance of optical systems - Enhanced work efficiency

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the semiconductor manufacturing industry, high-precision control in the positioning of wafers and masks is essential due to the advancement of manufacturing processes. Particularly in fine processing and inspection stages, accurate positioning at the nanometer level significantly affects product quality and yield. Low positioning accuracy can lead to the occurrence of defective products and a decrease in manufacturing efficiency. The N-331 PICMAWalk is an embedded linear actuator that combines high thrust of up to 50 N with sub-nanometer resolution. It supports high-speed operation of up to 12 mm/s, contributing to the reduction of takt time in inspection equipment. The friction drive mechanism allows for position holding even when the power is off. Additionally, its vacuum-compatible specifications make it suitable for use in semiconductor inspection equipment and clean environments. 【Application Scenarios】 - Wafer positioning in semiconductor manufacturing equipment - Positioning in mask aligners - High-precision positioning in inspection equipment 【Benefits of Implementation】 - Achieves high-precision positioning at the nanometer level - Contributes to improved quality and yield in manufacturing processes - Usable in vacuum environments For details on thrust characteristics, other specifications, and vacuum-compatible options, please refer to the catalog.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The N-331 PICMAWalk is a walking drive linear actuator that combines the nano-resolution of piezo elements with stepping motion. It is available in 25mm, 50mm, and 100mm types, with a driving force of 50N and a holding force of 60N. The PiezoWalk® walking drive operates with multiple piezo actuators performing walking motions, leading to the feed motion of the runner. By controlling the actuators, it enables the smallest steps and forward feed motions with a resolution of less than 1 nanometer. It performs high-precision position measurement using an incremental linear encoder. Additionally, it is compatible with actuators that can handle a vacuum of 10⁻⁹ hPa. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the optical industry, alignment work requires high-precision positioning. Particularly in the adjustment of optical components such as lenses and mirrors, even minor misalignments can significantly affect the system's performance. Low positioning accuracy can lead to optical axis deviations and variations in focal length, potentially compromising the quality of the final product. The V-731 achieves high-precision positioning, contributing to the efficiency and quality improvement of optical alignment work. 【Usage Scenarios】 - Position adjustment of optical components - Laser processing - Scanning 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Reduction in work time - Increased yield

• Linear motor
• Actuator
• Cartesian Robot

The "L-731/V-731" is a PIMag® linear motor XY axis stage that prevents creep in cross roller guide cages. The "L-731" is suitable for environments requiring high rigidity, while the "V-731" is ideal for applications where speed stability is important. They can be used in various fields such as medical and industrial applications, laser cutting, scanning, and biotechnology. 【Features】 ■ Travel range: 205x205mm (8 inches) ■ Incremental linear encoder (resolution 1nm) ■ Prevents creep in cross roller guide cages ■ The L-731 is suitable for environments requiring high rigidity ■ The V-731 is suitable for applications where speed stability is important *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor
• Actuator
• Cartesian Robot

In the assembly process of electronic device manufacturing, the accurate positioning of components affects quality and productivity. Especially in the placement of small parts and precise assembly, high-precision positioning is essential. Positioning errors can lead to product defects and increased assembly time. The small linear stage 'L-505' allows for the selection of DC/stepping motors, achieving high-precision positioning. 【Usage Scenarios】 - Placement of electronic components - Component mounting on circuit boards - Assembly of precision instruments 【Benefits of Implementation】 - Improved quality through high-precision positioning - Reduced assembly time - Decreased defective products

• Actuator
• Cartesian Robot
• encoder

The "L-505" is a compact linear stage that allows for the selection of DC or stepping motors. The linear stage is available in two design variations: a slender type equipped with a flange motor and a wide, compact type equipped with a belt drive (foldable drive train). Additionally, it enables high-precision position measurement using an incremental encoder. 【Features】 ■ Travel range: 13mm or 26mm ■ Choice of stepping motor or DC servo motor without a gear head ■ Speed: 15mm/s ■ Maximum load: 30N ■ Built-in reference point and limit switch *For more details, please refer to the PDF document or feel free to contact us.

• Actuator
• Cartesian Robot
• encoder

In precision measurement and analysis devices, even slight positional shifts in the Z direction can significantly impact measurement accuracy and reproducibility. This is especially true for measurements of fine structures and nanoscale analyses, where a high-precision and stable positioning mechanism is essential. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. It achieves high guide accuracy and rigidity, enabling stable Z-direction positioning in precision measurement devices and research applications. 【Usage Scenarios】 - Precision measurement instruments - Inspection devices - Research and development 【Benefits of Implementation】 - Improved measurement accuracy through high-precision positioning - Increased reliability due to stable operation - Enhanced work efficiency through smooth operation For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.

• encoder

In experimental research and development, positioning accuracy at the nano to micron level affects the reliability and reproducibility of experimental results. Particularly in fields such as microscopic observation, optical experiments, and material evaluation, stable precision positioning in the Z direction is essential. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. In addition to high guide precision and rigidity, it achieves stable Z-axis position control for research and development applications through high-precision position measurement using an incremental encoder. 【Application Scenes】 - Microscopic observation devices - Precision measurement devices - Material testing devices - Optical experiment devices - Experimental devices for research and development 【Benefits of Implementation】 - Improved experimental accuracy through high-precision Z-axis positioning - Enhanced reproducibility of experimental data due to stable operation - Easier fine adjustments due to smooth operation - High reliability for research applications You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

• encoder

In optical devices, misalignment of lenses and sensors significantly affects optical performance. Particularly in optical axis adjustment and focus control, stable positioning at the sub-micron level is required. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. In addition to high guide precision and rigidity, high-precision position measurement using an incremental encoder enables precise Z-axis position control in optical equipment. 【Application Scenarios】 - Position adjustment of optical lenses - Optical alignment devices - Sensor position adjustment - Microscope focus control - Position adjustment of laser optical systems 【Benefits of Implementation】 - Improved optical performance through high-precision Z-axis positioning - Enhanced measurement accuracy due to stable operation - Increased work efficiency through smooth position adjustment - Improved yield due to enhanced stability of the equipment

• encoder

In the semiconductor inspection process, precise positional control at the nano level is required to accurately detect minute defects in wafers and chips. In particular, stable positioning in the Z direction significantly affects inspection accuracy, especially in focus adjustments for inspection cameras and sensors, as well as in controlling the height position of the wafer. The L-310 is a high-precision Z stage that employs ball screw drive and cross roller guides. Its high guide precision and rigidity enable stable Z-direction positioning in semiconductor inspection equipment. 【Application Scenarios】 - Wafer inspection equipment - Semiconductor chip inspection equipment - Image processing inspection equipment - Focus adjustment for inspection cameras - Probe height adjustment 【Benefits of Implementation】 - Improved inspection accuracy through high-precision Z-axis position control - Enhanced reliability of inspection data due to stable operation - Long operating times supported by high duty cycle - Improved yield through enhanced defect detection accuracy

• encoder

The "L-310" is a product that achieves high guide accuracy and rigidity through a ball screw and cross roller guide. It uses a stress-relieving aluminum base that enables high stability. Additionally, it is equipped with a vacuum-compatible version of a non-contact limit switch and a reference point switch, with the reference point switch featuring orientation sensing located at the center of the travel range. 【Features】 ■ Achieves high guide accuracy and rigidity ■ Uses a stress-relieving aluminum base ■ Realizes smooth operation and low friction for long life ■ High-precision position measurement with an incremental encoder ■ Small incremental motion and low-speed motion *For more details, please refer to the PDF materials or feel free to contact us.

• encoder

The "L-239 model" is a high-load linear actuator that is customizable and compatible with vacuum environments. It features built-in sensors with capabilities such as sensor resolution and design resolution. It is suitable for use in research, optical alignment, and automation. 【Features】 ■ High feed force: 300N ■ Travel range: 52mm ■ Speed: up to 50mm/s ■ Vacuum compatible (10-9 hPa) and customizable *For more details, please refer to the PDF document or feel free to contact us.

• Actuator

The PIMag Linear Motor Controller 'C-413' is a digital motion controller for PIMag voice coil drive. It supports one motor channel and two sensor channels, compatible with the V-275 and V-275 linear actuators. It is equipped with a wide range of support functions, including a data recorder that logs movement data such as motor current, speed, position, and position error. Additionally, the PIMag Linear Motor Controller also includes the "C-891" type, which has a maximum average current consumption of 3A. 【Features】 ■ Up to 4 sensor channels with force x2 and position x2 sensors ■ TCP/IP or USB interface for configuration and command transmission (depending on the version) ■ Real-time SPI interface for command transmission (depending on the version) ■ Optional analog input/output ■ Automatic zero function for holding current For more details, please refer to the catalog or feel free to contact us.

• controller

In the calibration work of the measurement industry, precise positioning of measuring instruments is essential. Particularly in calibration tasks that require fine movements, the accuracy of the stage significantly affects the calibration results. Inaccurate positioning can lead to decreased calibration accuracy and incorrect measurement results. The PIglide linear air bearing stage 'A-110' achieves high-precision positioning and smooth movement, contributing to improved accuracy in calibration work. 【Application Scenarios】 - Calibration of precision measuring instruments - Calibration of reference instruments - Calibration of inspection equipment 【Benefits of Implementation】 - Improved calibration accuracy through high-precision positioning - Increased work efficiency due to smooth movement - Compatibility with clean room environments

• Other machine elements
• Cartesian Robot
• encoder

In the field of optics, precise positioning of optical elements such as lenses and mirrors greatly influences system performance. Particularly in high-precision positioning and scanning applications, even slight vibrations or friction can affect measurement results and image quality. The PIglide direct drive air bearing stage "A-110" features non-contact air bearings, magnetic linear motors, and optical linear encoders. Its frictionless smooth operation achieves high positioning accuracy and excellent reproducibility. Additionally, it generates no particles, making it ideal for optical applications in cleanroom environments. Furthermore, it supports long strokes of up to 400 mm, accommodating a wide range of high-precision scanning. 【Application Scenes】 - Microscopes - Spectrometers - Laser processing machines - Optical measuring instruments 【Benefits of Implementation】 - Improved measurement accuracy through high-precision positioning - Reduced adjustment time - Enhanced product quality

• Other machine elements
• Cartesian Robot
• encoder

The "PIglide Direct-Drive Air Bearing Series" features magnetically preloaded air bearings and is driven by a linear servo motor with an integrated optical linear encoder. By combining these non-contact components, we have achieved a frictionless motion platform with the best performance, quality, and product lifespan. The air bearing stage series includes options such as the "XY-axis Small Air Bearing Stage," "XY-axis Large Air Bearing Stage," and "Air Bearing Rotary Stage." 【Features】 ■ Non-contact fully preloaded air bearings ■ Ideal for scanning or high-resolution positioning ■ Compatible with clean rooms ■ Customizable ■ Integrated optical linear encoder For more details, please refer to the catalog or feel free to contact us.

• Other machine elements
• Cartesian Robot
• encoder

The H-840 Hexapod is a 6-degree-of-freedom parallel kinematics positioning system suitable for integration into manufacturing equipment and inspection processes. It features a wide operating range of ±50 mm / ±30° and high dynamic performance, achieving high-speed and high-precision simultaneous control of six axes. It supports precise positioning adjustments in optical alignment, precision inspection, and micro-machining processes. For detailed specifications and configuration examples, please refer to the catalog. 【Application Scenarios】 - High-precision inspection of semiconductors/electronic components - 6-axis alignment of optical components - Integration into laser processing equipment - Precision assembly and adjustment processes 【Benefits of Implementation】 - High-precision alignment through simultaneous control of six axes - Reduced takt time due to high-speed response - Compatibility with a variety of workpieces due to a wide range of motion - Compact design suitable for equipment integration

• Other measurement, recording and measuring instruments

The H-840 Hexapod is a 6-degree-of-freedom parallel kinematics positioning system designed for research applications. Despite its compact design, it features high dynamic performance, achieving fast and precise positioning. It is suitable for applications requiring sub-micron level adjustments, such as optical alignment, precision experiments, and laser control. Its high repeatability and stability support improved reproducibility in research environments. For detailed specifications, please refer to the catalog. 【Application Scenarios】 - Optical and laser alignment - Precision measurement/evaluation devices - Biotechnology experiments - Micromanipulation - Position control experiments in universities and research institutions 【Benefits of Implementation】 - High-precision alignment through simultaneous control of 6 axes - Reduced experimental time due to fast response - Improved experimental reproducibility due to high repeatability - Compact design suitable for limited experimental spaces

• Other measurement, recording and measuring instruments

PI Japan Co., Ltd. offers a wide range of 6-axis stages. Starting with the high-speed, high-precision small hexapod "H-811.I2," we also feature the parallel kinematic hexapod "H-840," known for its high-speed operation and moderate load capacity, as well as the high-precision fiber alignment system "F-712." These products are applied in research and industrial applications, micro-manufacturing, medical technology, and tool control. 【Features】 〈Small Hexapod "H-811.I2"〉 ■ Travel Range: ±17mm/±21° ■ Load Capacity: 5kg ■ Repeatability: ±0.06μm ■ Maximum Speed: 20mm/s ■ Extremely long lifespan ■ Vacuum-compatible version available *For more details, please refer to the PDF materials or feel free to contact us.

• Actuator
• Other industrial robots
• encoder

In the nanotechnology manufacturing industry, sub-nanometer positioning accuracy is essential for microfabrication and precision measurement. Particularly in semiconductor manufacturing and the production processes of MEMS devices, even slight positional shifts can significantly impact product quality. The P-620.Z to P-622.Z models achieve high reliability and long lifespan through a combination of a frictionless flexure guide system and PICMA piezo actuators, contributing to the stabilization of manufacturing processes. [Application Scenarios] - Wafer inspection in semiconductor manufacturing - Microfabrication in MEMS device manufacturing - Precision measurements such as interferometers and confocal microscopes [Benefits of Implementation] - Improved yield in manufacturing processes - Enhanced product quality - Increased measurement accuracy You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

• Actuator
• Piezoelectric Devices
• encoder

In the semiconductor industry, high-precision positioning is required. Especially in wafer inspection and measurement of fine structures, sub-nanometer level stability and high-speed control are essential. Positioning errors can compromise the reliability of measurement results and potentially lead to reduced yields. This product achieves high-precision positioning in semiconductor measurements with a resolution of 0.1 nm and linearity of 0.02%. 【Application Scenes】 - Wafer inspection - Measurement of fine structures - Interferometers - Confocal microscopes 【Benefits of Implementation】 - Significant improvement in measurement accuracy - Yield enhancement - High-speed and high-precision positioning - Sub-nanometer level stability You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

• Actuator
• Piezoelectric Devices
• encoder

The PIHera P-620.Z/P-621.Z/P-622.Z is a Z-axis piezo stage that drives vertical strokes of 50, 100, and 250 µm with a resolution of 0.1 nm. The capacitive sensor directly measures the moving platform, suppressing linear errors to 0.02%. The zero-backlash flexure guide requires no lubrication and is dust-free, achieving a resonance frequency in the kHz range and sub-millisecond response. The actuator is an all-ceramic insulated PICMA(R) that has demonstrated a long lifespan of 10 billion cycles. It is ideal for Z-axis control in devices that require both sub-nanometer stability and high speed, such as interferometers, confocal microscopes, and semiconductor inspection. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• encoder

In the focus control of objective lenses in optical instruments and measurement devices, high-precision Z positioning and fast response are required. Particularly when the objective lens is large and has a high numerical aperture (NA), conventional mechanisms face challenges in operational response and stability, which can affect measurement accuracy and observation quality. The P-726 PIFOC high-load objective lens focus scanner achieves high-precision focus control with sub-nanometer resolution obtained through direct measurement using capacitive sensors, with a maximum stroke of 100 µm. Additionally, the flexure guide structure eliminates friction and backlash, maintaining high rigidity and stability even under high-load conditions. This enhances the accuracy and throughput of optical measurement devices, increasing the reliability of measurements and observations. [Application Scenarios] - Precision focus control of objective lenses - Z-scanning for confocal microscopes and super-resolution microscopes - 3D optical imaging devices - High-precision optical measurement devices (interferometers, autofocus systems) [Benefits of Implementation] - Improved optical measurement accuracy through high-precision Z position control - Reduced inspection and observation time due to fast operational response - High-load performance compatible with heavy lenses - Long-term stability and low maintenance requirements

• Actuator
• Piezoelectric Devices
• encoder

In the field of nanotechnology structural analysis, high-precision Z-direction focus control at the nanoscale is essential. The P-726 PIFOC is a high-load compatible focus scanner that achieves a stroke of 100 µm and sub-nanometer resolution (approximately 0.3 nm class). Direct feedback from a capacitive sensor and a flexure guide structure provide high positioning accuracy and reproducibility. Its high-speed settling performance of about 6 ms contributes to the efficiency of nanostructure observation and 3D imaging involving Z-scanning. 【Application Scenarios】 - Nanostructure observation using confocal microscopy - Z-scanning in super-resolution optical microscopy - Optical nanostructure analysis devices - 3D imaging evaluation devices 【Benefits of Implementation】 - High-precision focus control with sub-nanometer resolution - Improved measurement efficiency due to high-speed settling - Increased design flexibility of optical systems due to high load compatibility - Enhanced reproducibility through long-term stable operation

• Actuator
• Piezoelectric Devices
• encoder

In the field of biotechnology, cell observation is affected by minute focus fluctuations that impact image quality. The P-726 PIFOC is a high-load-capable focus scanner with a Z stroke of 100 µm and sub-nanometer resolution. Direct position feedback from a capacitive sensor and a flexure guide structure ensure high positioning accuracy and reproducibility. Furthermore, it maintains high dynamic performance with a resonance frequency of 560 Hz at a load of 210 g, even when equipped with high NA objective lenses. The fast settling time (approximately 6 ms) enhances the efficiency of Z-stack acquisition and focus scanning. 【Application Scenarios】 - Confocal microscopy - Super-resolution microscopy - Live cell imaging - 3D imaging with Z-stack acquisition 【Benefits of Implementation】 - Improved image stability through high-precision focus control - Enhanced measurement efficiency due to fast Z response - Increased design flexibility of optical systems due to high load capacity - High reproducibility in focus positioning

• Actuator
• Piezoelectric Devices
• encoder

In semiconductor wafer inspection, high-resolution Z-axis focus control and fast responsiveness are required to stably detect fine defects. Particularly in optical inspection systems using high NA objectives, focus accuracy and reproducibility are directly linked to the reliability of inspection results. The P-726 PIFOC high-load objective lens focus scanner achieves a Z stroke of up to 100 µm with sub-nanometer resolution in position control. Direct position feedback from a capacitive sensor and a flexure guide structure provide high linearity, repeatability, and long-term stability. Furthermore, its high-speed settling performance of approximately 6 ms contributes to the optimization of inspection processes involving Z-step movements. Due to its high-load design, stable operation is possible even when using high NA objectives or additional optical components. [Application Scenarios] - Z focus control in optical inspection of semiconductor wafer surfaces - Defect analysis equipment using high NA objectives - Three-dimensional inspection using confocal optical systems - Z scanning in laser and optical interference inspection devices [Benefits of Implementation] - Improved measurement stability through high-precision focus control - Reduced Z step time due to high-speed settling - Increased design flexibility of optical systems due to high-load capability

• Actuator
• Piezoelectric Devices
• encoder

The P-726 is a PIFOC® high-load focus scanner that drives heavy high NA objective lenses with high speed and precision. It features built-in flexure guides and capacitive sensors, achieving an OpenLoop resolution of 0.3 nm and a linearity error of 0.02%. The resonance frequency is maintained at 1120 Hz without load and 560 Hz with a 210 g load, accelerating Z-scanning for semiconductor wafer inspection and confocal/super-resolution microscopy. It supports major thread sizes such as M32/M27 with the QuickLock adapter. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• encoder

Precise optical axis adjustment and positioning in the field of optics are crucial elements for maximizing system performance. Especially in high-resolution microscopes and precision measurement devices, even slight positional deviations can significantly impact measurement accuracy and reproducibility. The P-733.2, which employs a high-precision parallel kinematics structure, achieves nano-level positioning with a reproducibility of ±1nm and accommodates transmission light applications with a stroke of 100µm on the XY axis. It contributes to the high precision of optical systems and the efficiency of adjustment tasks, from research and development to device integration. 【Application Scenarios】 - High-precision microscopes - Mask/wafer positioning - Interferometers and optical measurement devices 【Benefits of Implementation】 - High-precision positioning with ±1nm reproducibility - Smooth integration into transmission light optical systems - Reduced optical axis adjustment time and improved development efficiency

• Actuator
• Piezoelectric Devices
• Cartesian Robot

In the semiconductor manufacturing field, extremely high precision and stability are required for the positioning of wafers and masks. With the advancement of miniaturization, we have entered an era where nanometer-level positioning errors directly affect device performance and yield. Particularly in exposure and inspection equipment, precise control that combines reproducibility and stability is essential. The P-733.2 achieves high-precision XY nanopositioning with a reproducibility of ±1nm. With a 100µm stroke and a high-rigidity parallel kinematics structure, it is also suitable for integration into semiconductor manufacturing equipment. High-precision positioning contributes to process stabilization and yield improvement. 【Application Scenarios】 - Exposure equipment - Mask/Wafer positioning - Inspection and measurement equipment 【Benefits of Implementation】 - Process stabilization with reproducibility of ±1nm - Yield improvement through high-precision positioning - Maximization of equipment performance through stable operation

• Actuator
• Piezoelectric Devices
• Cartesian Robot

This is an XYZ-axis nanopositioning stage that performs direct measurement using high-reliability PICMA piezoelectric drive and capacitive sensors. The XY-axis motion range is available in 30 x 30 µm and 100 x 100 µm types, while the Z-axis has a stroke of 10 µm. With an aperture of 50 x 50 mm, it is also ideal for transmitted light applications. It is used in high-precision microscopy, mask/wafer positioning, measurement technology, and more. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Cartesian Robot

In high-precision measurement, the positioning accuracy of the probe affects the reliability of the measurement results. Even slight vibrations or crosstalk can be sources of error, necessitating stable nanopositioning achieved through high rigidity and closed-loop control. The P-561, P-562, and P-563 PIMars Nanopositioning Stages are XYZ multi-axis piezo flexure stages that utilize a parallel kinematics structure and capacitive sensors. They achieve a reproducibility of ±2 nm and linearity of 0.03%, enabling high-precision probe positioning with low crosstalk. With high resonance frequency and excellent dynamic characteristics, they are suitable for high-speed scanning measurements and micro-displacement measurements. They are ideal for precision measurement applications such as semiconductor inspection and nanomaterial analysis. 【Application Scenarios】 - Semiconductor inspection - Super-resolution microscopy - Photonics alignment 【Benefits of Implementation】 - Achievement of high-precision measurement results - Reduction of measurement time - Improvement of product quality

• Actuator
• Piezoelectric Devices
• Cartesian Robot

In high-resolution observation using electron microscopes (SEM/TEM), the positioning accuracy of the sample affects image quality. Even slight vibrations or crosstalk can impact measurement precision, making a high-rigidity and high-response positioning stage essential. The P-561, P-562, P-563, and PIMars Nanopositioning Stages achieve high precision and positioning stability through capacitive sensors. The operational range is 100/200/300 µm in each XYZ direction (depending on the model), with a reproducibility of ±2nm and linearity of 0.03%. [Application Scenarios] - Sample positioning in electron microscope observation - Semiconductor inspection - Super-resolution microscopy - Photonics alignment [Benefits of Implementation] - Improved observation accuracy through precise positioning at the nanoscale - Efficient observation enabled by high resolution and fast response - Stable operation achieved through high reliability and long lifespan

• Actuator
• Piezoelectric Devices
• Cartesian Robot

The P-561 to P-563 series are XYZ-axis piezo nanopositioners that utilize a parallel kinematics structure and capacitive sensors. The operational range is 100/200/300 µm for each XYZ axis (depending on the model), with a reproducibility of ±2 nm and linearity of 0.03%. The aperture is 66×66 mm, ensuring a clear path for transmitted light and laser light. The direct drive type operates at 45 µm on the XY axis and 15 µm on the Z axis, with a resonance frequency of 1000 Hz under no load, achieving high resolution and fast response. Additionally, the PICMA piezo ceramics are fully insulated with all-ceramic construction, providing humidity resistance, high reliability, and long lifespan. They are ideal for semiconductor testing, super-resolution microscopy, and photonics alignment. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Cartesian Robot

In the laser processing industry, the precise positioning and control of the laser beam are crucial factors that influence processing accuracy and efficiency. Particularly in fine processing and high-speed processing, nano-level precision and high responsiveness are required. Conventional control methods have limitations in positioning accuracy and response speed, which can lead to a decline in processing quality and stagnation in productivity. The P-517/527 multi-axis piezo scanner utilizes frictionless flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nano-level reproducibility and resolution, enabling precise positioning and control of the laser beam. 【Application Scenarios】 - Laser marking - Laser cutting - Laser fine processing - Laser scanning 【Benefits of Implementation】 - Achieves high-precision laser processing - Reduces processing time - Improves yield - Accommodates diverse processing needs

• Other industrial robots
• Piezoelectric Devices
• Actuator