High-precision preloaded piezo P-841 for semiconductor manufacturing
Preloaded Piezo Actuator P-841
Innovating semiconductor manufacturing with sub-nanometer resolution positioning.
In the semiconductor manufacturing industry, extremely high precision is required for tasks such as wafer and mask alignment. With advancements in microfabrication technology, the accuracy of positioning has become a crucial factor that influences product quality. Precise positioning at the sub-nanometer level, which is difficult to achieve with conventional technologies, is essential for improving yield and streamlining manufacturing processes. 【Application Scenarios】 - Wafer probing - Mask alignment - Semiconductor manufacturing equipment 【Benefits of Implementation】 - High-precision positioning at the sub-nanometer level - Streamlining of manufacturing processes - Improvement in yield
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basic information
【Features】 - Amazing long lifespan due to PICMA(TM) piezo ceramic layer - Stroke up to 90μm - Compact case - Push force up to 1000N - Pull force up to 50N 【Our Strengths】 With over 50 years of experience at our headquarters in Germany, we provide piezo stages and actuators to various countries and companies around the world, supporting our customers in solving precision positioning challenges.
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Applications/Examples of results
Application examples - Precision positioning of static and dynamic - Disk drive testing - Adaptronics - Smart structures - Active vibration control - Switches - Laser tuning - Patch clamp - Nanotechnology
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
