Maximum 90 µm stroke, high load capacity, sub-nanometer precision piezo actuator.
In the field of manufacturing, high load, high precision, and fast response are required. With a maximum stroke of 90 µm and sub-nanometer resolution, stable operation is achieved in processes that require fine positioning and high-precision control. Additionally, by adopting PICMA piezo elements, long life and highly reliable performance are provided. This contributes to improved product quality and process efficiency. 【Application Scenarios】 - Precision positioning in semiconductor manufacturing processes - High-precision alignment of optical fibers and laser optical systems - Micro-motion control in MEMS and micro-device manufacturing - Drive components for high-precision assembly and inspection equipment 【Effects of Implementation】 - High-precision positioning with sub-nanometer accuracy - Robust operation with high load capacity (maximum pushing force of 3000 N / pulling force of 700 N) - Fast control with microsecond response - Long life and highly reliable driving characteristics
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basic information
【Features】 - Incredible long lifespan due to PICMA(TM) piezo ceramic layer - Stroke up to 90μm - Push force up to 3000N - Pull force up to 700N - Sub-millisecond response - Sub-nanometer resolution - Options: Vacuum-compatible version, waterproof case 【Our Strengths】 Based on over 50 years of experience at our headquarters in Germany and 30 years of experience with our Japanese subsidiary, we provide optimal solutions tailored to our customers' needs. We can also propose integrated systems that combine various positioning products, including piezo stages, with peripheral equipment such as granite tables. We leverage our expertise and extensive experience to support our customers in solving their challenges.
Price information
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Delivery Time
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Applications/Examples of results
Application examples - Precision positioning of static and dynamic - Disk drive testing - Optics - Various measurements/interferometers - Smart structures/adaptronics - Precision mechanisms/machining - Active vibration control - Switches - Laser tuning
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Download All Catalogs![[P-844 - P-845 with preload] Piezo actuator](https://image.mono.ipros.com/public/catalog/image/01/2cc/800167/IPROS4563526486605055832.jpeg?w=120&h=170)
Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
