ピーアイ・ジャパン List of Products and Services

PI is expanding its air bearing positioning products! We have released the "A-523 model: Air Bearing Z-axis, Chip/Tilt 3-axis drive stage" designed with a parallel kinematic approach. Achieving ultra-high precision positioning in a slim design A motion platform with no friction Offering the best performance, quality, and lifespan 【Features】 - Travel range: Z-axis ±2.5 mm, θX, θY axes ±1° - Load capacity: 8 kg - Platform: Diameter 250 mm - Height: 60 mm *For more details, please download the PDF or contact us.

• Other machine elements

The PIglide IS A-311 is an air-bearing XY planar scanner that levitates the stage drive surface using air. With a flat structure thinner than stacked types, it achieves a compact device design while operating over a wide scanning range of 300 mm × 400 mm and a sensor resolution of 1 nm. The frictionless linear motor drive contributes to a high-speed response of up to 2 m/s and a load capacity of 147 N, aiding in reducing cycle times for laser processing and semiconductor wafer inspection. Its dust-free structure is suitable for clean rooms, and a rich array of controllers/APIs facilitates the integration of XY synchronization and area scanning. For more details, please download the PDF or contact us.

• Other machine elements
• Cartesian Robot
• encoder

2-axis Tip/Tilt platform for high-speed beam steering. With a parallel kinematic design and strain gauge position sensors, it enables feedback control for high-speed and high-precision positioning and dynamic operation. Ideal for applications requiring high dynamics, such as laser beam stabilization, image stabilization, and satellite optical communication. *For more details, please download the PDF or contact us.

• Other industrial robots
• Piezoelectric Devices
• Actuator

PI is expanding its linear motor products. We have released the "V-857 type" high-precision, long-stroke, and narrow one-axis linear motor stage with a maximum travel distance of 1200mm and a load capacity of 1000N. An XY-axis configuration is also possible. 【Features】 - Load capacity of up to 1000N - Long travel distance (up to 1200mm) with a narrow profile (width 132mm) - Maximum speed of 5 m/s - High-precision incremental or absolute linear encoder - Easy XY installation configuration *For more details, please download the PDF or contact us.

• Linear motor
• Actuator
• Cartesian Robot

The V-855, equipped with a magnetic direct drive, combines a cross roller guide that supports 600N with an ironless three-phase linear motor, achieving vibration-free and smooth high-speed transport. You can choose from three stroke lengths of 200 / 400 / 800 mm, and the absolute encoder model improves operational efficiency by eliminating the need for origin setting. *For more details, please download the PDF or contact us.*

• Other machine elements
• Linear motor
• Cartesian Robot

This optical power meter is capable of converting optical signals into high-resolution and extremely high bandwidth voltage signals. As an alternative to fiber input, external current input is also possible, allowing for the connection of a photodiode to convert diode current. Due to the wide wavelength range of the optical power meter, it can operate in both the visible and infrared areas without switching. This product is ideal for our optical alignment systems using hexapods and piezos. ● For more details, please contact us or refer to the catalog.

• Other optical parts
• Sensors
• Optical Experimental Parts

The E-709.1C1L controller is a piezo-based 1-channel nanopositioning system equipped with capacitive sensors. - Output voltage: -30 to 130 V - Amplifier and sensor optimized for dynamic applications - Digital linearization - Interfaces: USB, SPI, RS-232, 0 to +10 V analog input control *For more details, please download the PDF or contact us.

• controller
• Servo
• Amplifier

The vertical axis of lever amplification using piezo has been proven as a standard solution to this challenge for about 20 years. PI's compact objective positioner portfolio has been completely redesigned. We aimed for higher dynamic characteristics, a travel range of up to 800 microns, and improved ease of use. As a result, we now offer a more powerful product line that can provide optimal solutions for almost all applications. *For more details, please download the PDF or contact us.

• Other machine elements

A high-speed, high-precision photonics alignment system that combines a hexapod 6-axis motor stage with an XYZ-axis piezo stage. Optimized scan/alignment routines for SiPh wafers, photonic devices, PICs, and optical fibers, along with powerful array alignment algorithms, enable fast, high-precision, and simultaneous alignment. The hexapod operates with DC servo motor drive across 6 axes, allowing sub-micron positioning. Additionally, it allows for arbitrary setting of the rotation center to accommodate various devices. The XYZ-axis piezo stage enables nano-level positioning and allows for high-speed response and scanning at high resonance frequencies. Comprehensive and deep software support for rapid process development, including support for common languages such as C#, Python, LabVIEW, and MATLAB on Windows and Linux. *For more details, please download the PDF or contact us.*

• Optical Experimental Parts
• Other industrial robots
• Actuator

The L-836 is a high-precision linear stage with a single axis that can be used for precise positioning in industrial and research fields. It features high travel accuracy and load capacity due to its cross roller guide. Depending on the application, ActiveDriveDC servo motors, stepping motors, and DC gear motor types are available. 【Features】 ■ High travel accuracy and load capacity due to cross roller guide ■ Reproducibility of up to 0.1μm ■ ActiveDriveDC servo motors, stepping motors, and DC gear motor types available depending on the application ■ High stability achieved with a distortion-free aluminum base *For more details, please refer to the PDF document or feel free to contact us.

• Actuator
• Cartesian Robot
• encoder

The "L/V-412, L/V-417" is a PIMag high-load linear stage that improves tracking performance due to the high resolution of the encoder. Tracking errors are reduced, and settling time is shortened. For maximum flexibility, you can choose between incremental and absolute encoders. 【Features】 ■ Maximum travel range: 813mm ■ Rated force: 87N ■ Choice of incremental/absolute encoder ■ Can withstand up to 450N due to the use of circulating ball bearings ■ Dust prevention with the use of a cover strap *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor

The V-738 is a PIMag high-precision XY stage featuring a large opening of 150x150mm, equipped with a non-iron three-phase linear motor. The travel range is 102 mm x 102 mm (4 inches). The speed is 500 mm/s. The reference limit switch is optical. 【Features】 ■ Travel range: 102 mm x 102 mm (4 inches) ■ Large opening of 150x150mm ■ Unidirectional repeatability: 0.1μm ■ Speed: 500 mm/s ■ Three-phase linear motor ■ High-resolution incremental linear encoder *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor
• Actuator
• Cartesian Robot

The V-408 is a PIMag linear stage that transmits driving force to the friction platform without using mechanical parts in the drive train, thanks to its three-phase magnetic direct drive. With cross roller guides, it makes contact with reinforced rollers in lines rather than point contact with balls in ball guides. This significantly increases rigidity while minimizing the required preload, reducing friction and enabling smooth operation. The cross roller guides also feature high guiding accuracy and a large load capacity. 【Features】 ■ Iron core three-phase linear motor ■ High load capacity cross roller guide ■ Minimum incremental motion 20nm ■ Bidirectional repeatability ±0.1μm ■ Compact design *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor

The U-780 is a low-noise XY-axis stage for piezoelectric motor microscopes that self-locks when stationary. It offers a high level of stability due to low thermal load and does not require lubrication. With a wide dynamic range from 10μm/s to 120mm/s, it allows for ideal operation via joystick and software. 【Features】 ■ High level of stability ■ 0.1μm resolution ■ Maximum travel range of 135mm x 85mm ■ Free rotation of the turret suitable for inverted microscopes ■ Compatible Z sample scanner available *For more details, please refer to the PDF document or feel free to contact us.

• Other motors

The U-723 is a PILine XY stage that maintains the mechanical stability of the stage position through a self-locking drive when powered off. Power consumption and heat generation are significantly reduced. These characteristics are advantageous for applications with a small duty cycle, battery operation, or sensitivity to heat. The position of the axis is measured by an encoder, and a optical reference switch enables reliable and reproducible motion. 【Features】 ■ High-speed positioning in two axes ■ Lightweight and space-saving ■ High guide accuracy ■ Sensor resolution of 10nm ■ Self-locking in standby, no heat generation during standby ■ Low noise operation *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor
• Piezoelectric Devices
• Actuator

The U-651 is a PILine high-speed, slim rotating stage that employs a PILine ultrasonic piezo motor, which acts on a ceramic friction ring to drive the platform. The direct drive system enables miniaturization and slim design of the stage. The built-in incremental encoder provides precise position control with a resolution of up to 4μ rad. 【Features】 - Slim design with a height of only 14mm - Direct position measurement with a maximum resolution of 4μ rad - Maximum speed of 540°/second - Maximum torque of 0.3Nm in both directions of rotation - Opening diameter of 36mm - Vacuum-compatible type (10^-6 Pa) available as an option *For more details, please refer to the PDF document or feel free to contact us.

• Actuator
• Other industrial robots
• encoder

The U-628 is a high-speed, compact rotating stage with no range limitations, equipped with an optical encoder for direct measurement. The reference point switch has a central opening with a diameter of 7mm. It operates directly with a ring-shaped runner using a vibrating piezoelectric actuator from the "PILine ultrasonic piezo motor." The speed is high, and the holding torque is 0.1Nm. 【Features】 ■ Side length: 50mm ■ Built-in position encoder ■ Speeds exceeding 1000°/second ■ No limitations on rotation range ■ Opening diameter: 7mm *For more details, please refer to the PDF document or feel free to contact us.

• Actuator
• Other industrial robots
• encoder

The U-521 is a compact linear stage that allows XY combination without the need for an adapter plate. Thanks to its automatic locking during stationary periods, there is no heat generation or vibration from the servo. A vacuum-compatible version is available. It can be used for applications in research and manufacturing, automation, sample manipulation, and more. 【Features】 ■ Compact size of just 35mm square and 10mm high ■ Maximum speed of 200mm/second ■ Travel range of 18mm ■ Excellent motion/stop dynamics ■ Direct measurement linear encoder *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor
• Actuator
• Piezoelectric Devices

The resonance frequency of 0.7 kHz (with a 1-inch mirror) enables dynamic movement and fast step & settling. Parallel kinematic design: A two-axis orthogonal platform with a single common pivot point, available without a mirror, with a 1/2-inch mirror, or with a 1-inch mirror type. Ideal for applications requiring high-speed and high-precision deflection, such as image stabilization, laser beam control, and optical communication. *For more details, please download the PDF or contact us.

• Other industrial robots
• Actuator
• Piezoelectric Devices

The P-616 is an XYZ piezo nanopositioner that employs parallel kinematics. It offers a reproducibility of 10 nm and a system reproducibility of 0.4 nm, featuring high-reliability PICMA piezo ceramics, flexure guides, and capacitive sensors built into each axis. It is ideal for fiber positioning and alignment, microscopy, nano positioning, photonics, and micromanipulation. *For more details, please download the PDF or contact us. 【Features】 *For more details, please refer to the PDF materials or feel free to contact us.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

The N-331 PICMAWalk is a walking drive linear actuator that combines the nano-resolution of piezo elements with stepping motion. It is available in 25mm, 50mm, and 100mm types, with a driving force of 50N and a holding force of 60N. The PiezoWalk® walking drive operates with multiple piezo actuators performing walking motions, leading to the feed motion of the runner. By controlling the actuators, it enables the smallest steps and forward feed motions with a resolution of less than 1 nanometer. It performs high-precision position measurement using an incremental linear encoder. Additionally, it is compatible with actuators that can handle a vacuum of 10⁻⁹ hPa. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The "L-731/V-731" is a PIMag® linear motor XY axis stage that prevents creep in cross roller guide cages. The "L-731" is suitable for environments requiring high rigidity, while the "V-731" is ideal for applications where speed stability is important. They can be used in various fields such as medical and industrial applications, laser cutting, scanning, and biotechnology. 【Features】 ■ Travel range: 205x205mm (8 inches) ■ Incremental linear encoder (resolution 1nm) ■ Prevents creep in cross roller guide cages ■ The L-731 is suitable for environments requiring high rigidity ■ The V-731 is suitable for applications where speed stability is important *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor

The "L-505" is a compact linear stage that allows for the selection of DC or stepping motors. The linear stage is available in two design variations: a slender type equipped with a flange motor and a wide, compact type equipped with a belt drive (foldable drive train). Additionally, it enables high-precision position measurement using an incremental encoder. 【Features】 ■ Travel range: 13mm or 26mm ■ Choice of stepping motor or DC servo motor without a gear head ■ Speed: 15mm/s ■ Maximum load: 30N ■ Built-in reference point and limit switch *For more details, please refer to the PDF document or feel free to contact us.

• Actuator
• Cartesian Robot
• encoder

The "L-310" is a product that achieves high guide accuracy and rigidity through a ball screw and cross roller guide. It uses a stress-relieving aluminum base that enables high stability. Additionally, it is equipped with a vacuum-compatible version of a non-contact limit switch and a reference point switch, with the reference point switch featuring orientation sensing located at the center of the travel range. 【Features】 ■ Achieves high guide accuracy and rigidity ■ Uses a stress-relieving aluminum base ■ Realizes smooth operation and low friction for long life ■ High-precision position measurement with an incremental encoder ■ Small incremental motion and low-speed motion *For more details, please refer to the PDF materials or feel free to contact us.

• encoder

The "L-239 model" is a high-load linear actuator that is customizable and compatible with vacuum environments. It features built-in sensors with capabilities such as sensor resolution and design resolution. It is suitable for use in research, optical alignment, and automation. 【Features】 ■ High feed force: 300N ■ Travel range: 52mm ■ Speed: up to 50mm/s ■ Vacuum compatible (10-9 hPa) and customizable *For more details, please refer to the PDF document or feel free to contact us.

• Actuator

The PIMag Linear Motor Controller 'C-413' is a digital motion controller for PIMag voice coil drive. It supports one motor channel and two sensor channels, compatible with the V-275 and V-275 linear actuators. It is equipped with a wide range of support functions, including a data recorder that logs movement data such as motor current, speed, position, and position error. Additionally, the PIMag Linear Motor Controller also includes the "C-891" type, which has a maximum average current consumption of 3A. 【Features】 ■ Up to 4 sensor channels with force x2 and position x2 sensors ■ TCP/IP or USB interface for configuration and command transmission (depending on the version) ■ Real-time SPI interface for command transmission (depending on the version) ■ Optional analog input/output ■ Automatic zero function for holding current For more details, please refer to the catalog or feel free to contact us.

• controller

The "PIglide Direct-Drive Air Bearing Series" features magnetically preloaded air bearings and is driven by a linear servo motor with an integrated optical linear encoder. By combining these non-contact components, we have achieved a frictionless motion platform with the best performance, quality, and product lifespan. The air bearing stage series includes options such as the "XY-axis Small Air Bearing Stage," "XY-axis Large Air Bearing Stage," and "Air Bearing Rotary Stage." 【Features】 ■ Non-contact fully preloaded air bearings ■ Ideal for scanning or high-resolution positioning ■ Compatible with clean rooms ■ Customizable ■ Integrated optical linear encoder For more details, please refer to the catalog or feel free to contact us.

• Other machine elements

Load capacity: 30 kg Travel range: up to 100 mm / 60° Reproducibility: ±0.4 μm Maximum speed: 50 mm/sec Arbitrary setting of pivot point (rotation center) is possible *For more details, please download the PDF or contact us.*

• Other measurement, recording and measuring instruments

PI Japan Co., Ltd. offers a wide range of 6-axis stages. Starting with the high-speed, high-precision small hexapod "H-811.I2," we also feature the parallel kinematic hexapod "H-840," known for its high-speed operation and moderate load capacity, as well as the high-precision fiber alignment system "F-712." These products are applied in research and industrial applications, micro-manufacturing, medical technology, and tool control. 【Features】 〈Small Hexapod "H-811.I2"〉 ■ Travel Range: ±17mm/±21° ■ Load Capacity: 5kg ■ Repeatability: ±0.06μm ■ Maximum Speed: 20mm/s ■ Extremely long lifespan ■ Vacuum-compatible version available *For more details, please refer to the PDF materials or feel free to contact us.

• Actuator
• Other industrial robots
• encoder

The PIHera P-620.Z/P-621.Z/P-622.Z is a Z-axis piezo stage that drives vertical strokes of 50, 100, and 250 µm with a resolution of 0.1 nm. The capacitive sensor directly measures the moving platform, suppressing linear errors to 0.02%. The zero-backlash flexure guide requires no lubrication and is dust-free, achieving a resonance frequency in the kHz range and sub-millisecond response. The actuator is an all-ceramic insulated PICMA(R) that has demonstrated a long lifespan of 10 billion cycles. It is ideal for Z-axis control in devices that require both sub-nanometer stability and high speed, such as interferometers, confocal microscopes, and semiconductor inspection. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• encoder

The P-726 is a PIFOC® high-load focus scanner that drives heavy high NA objective lenses with high speed and precision. It features built-in flexure guides and capacitive sensors, achieving an OpenLoop resolution of 0.3 nm and a linearity error of 0.02%. The resonance frequency is maintained at 1120 Hz without load and 560 Hz with a 210 g load, accelerating Z-scanning for semiconductor wafer inspection and confocal/super-resolution microscopy. It supports major thread sizes such as M32/M27 with the QuickLock adapter. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• encoder

The P-561 to P-563 series are XYZ-axis piezo nanopositioners that utilize a parallel kinematics structure and capacitive sensors. The operational range is 100/200/300 µm for each XYZ axis (depending on the model), with a reproducibility of ±2 nm and linearity of 0.03%. The aperture is 66×66 mm, ensuring a clear path for transmitted light and laser light. The direct drive type operates at 45 µm on the XY axis and 15 µm on the Z axis, with a resonance frequency of 1000 Hz under no load, achieving high resolution and fast response. Additionally, the PICMA piezo ceramics are fully insulated with all-ceramic construction, providing humidity resistance, high reliability, and long lifespan. They are ideal for semiconductor testing, super-resolution microscopy, and photonics alignment. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Cartesian Robot

The P-517/527 multi-axis piezo scanner uses zero-wear flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nanometer-level reproducibility and resolution. The available motion axes include XY, XYZ, and XYθz types. The XY axis has options of 100µm and 200µm, the Z axis is 20µm, and θz is 2mrad. It has a load capacity of 50N, making it ideal for applications such as optical inspection, wafer inspection, nanopositioning, measurement, and microscopy. It also allows for transmitted light with an aperture of 50 × 50mm. *For more details, please download the PDF or contact us.

• Other industrial robots
• Piezoelectric Devices
• Actuator

The PICMA(R) multi-layer piezo actuator P-882 and P-888 are strong against humidity and electrolytic corrosion due to their ceramic insulation structure, and they exhibit excellent temperature stability. Custom options allow for high-temperature resistance up to 200 degrees, support for high currents up to 20 A, and modifications in shape such as perforated, circular, and rectangular designs. Additionally, they are compatible with UHV 10⁻⁹ hPa, have no outgassing, can withstand high bake temperatures, and operate in harsh environments such as vacuum systems and cryogenic conditions. In addition to a wide variety of sizes and shapes, custom specifications and integrated sensor models are also available. *For more details, please contact us or refer to the catalog.*

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The PIHera P-620.1/629.1 series is a one-axis nanopositioner that combines a flexure guide with PICMA® piezo technology. It has a stroke range of 50 to 1800 µm, a minimum resolution of 0.1 nm, and achieves a linearity error of 0.02% by measuring the actual moving parts with an integrated capacitive sensor. The flexure guide has no wear parts, offers high rigidity, excellent straightness, and outstanding long-term stability. It can also be expanded to X, XY, Z, and XYZ configurations, making it ideal for applications such as microscope sample scanning, optical alignment, and interferometric measurements. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• encoder

The P-5x8 series features the piezo nano stage P-518.TCD with chip tilt and the long-stroke version P-528.TCD/ZCD, both developed on the same platform. It achieves a system resolution of 0.8 nm and a linearity error of 0.03% using highly reliable PICMA piezo ceramics, flexure guides, parallel kinematics, and capacitive sensors. The large aperture of 66 × 66 mm is suitable for interferometric measurements and transmitted light applications, with a load capacity of 50N, making it ideal for semiconductor testing, photonics, microscopy, and high-precision alignment. *For more details, please download the PDF or contact us.

• Actuator
• Piezoelectric Devices
• encoder

The P-752 is an excellent single-axis nanopositioning stage with a flexure guide structure that incorporates a two-electrode capacitive sensor, achieving zero friction and outstanding straightness (pitch and yaw error ±1μrad), with an open-loop resolution of 0.1nm. Additionally, the built-in capacitive sensor measures the actual moving parts non-contactly at a sub-nanometer level, providing higher linearity and hysteresis compensation, ensuring long-term stability. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of 44 x 44 mm ○ Stroke up to 120 x 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanical/electronic system configuration ○ Frictionless precision flexure guide system ○ Remarkable long lifespan with PICMA(TM) piezo actuators ○ Available in X, Z, and XYZ versions ● For more details, please contact us or refer to the catalog.

• Piezoelectric Devices
• Actuator
• encoder

The S-330 piezo chip/tilt platform is a high-speed and compact chip/tilt unit that accurately realizes the angular movement of the top platform around two orthogonal axes. 【Features】 ○ Resolution up to 20 nrad, excellent position stability ○ Light beam deflection up to 20 mrad (>1°) ○ Improved dynamics, stability, and linearity through parallel control design ○ Same-plane rotation axis and fixed pivot point to avoid polar rotation ○ Sub-millisecond response ○ For mirrors with a maximum diameter of 50 mm ○ Closed-loop version for improved linearity ○ Excellent temperature stability ● For more details, please contact us or refer to the catalog.

• Laser Components

The P-734 high dynamic XY piezo nano positioning stage achieves a linear stroke of 100 x 100 μm with sub-nanometer resolution and high flatness of motion. 【Features】 ○ Ultra-precise trajectory control ideal for surface shape analysis and scanning microscopy ○ Improved responsiveness through parallel control/measurement and multi-axis precision control ○ Stroke: 100 x 100 μm, center opening of 56 x 56 mm ○ Achieves a resolution of 0.4 nm with capacitive sensors ○ Incredible long lifespan with PICMA(TM) piezo actuators ● For more details, please contact us or refer to the catalog.

• Actuator
• Piezoelectric Devices
• encoder

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of only 44 x 44 mm ○ Stroke up to 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanism/electronic system configuration ○ Incredible long lifespan with PICMA(TM) piezo actuators ○ Available in Z stage, XY, XZ, and XYZ versions ● For more details, please contact us or refer to the catalog.

• Actuator
• Piezoelectric Devices
• encoder

The N-111 NEXLINE(R) OEM drive is a compact nano-positioning actuator with a stroke of up to 5mm, high resolution, and a generated force of up to 40N. 【Features】 ○ Stroke: 5mm ○ Resolution: 0.025nm (open loop) and 5nm (closed loop) ○ Push-pull force up to 40N and holding force of 60N ○ Automatic locking when stationary, no heat generation ○ Non-magnetic and vacuum-compatible operating principle ● For more details, please contact us or refer to the catalog.

• Actuator
• Linear motor
• Piezoelectric Devices

P-753 is a one-axis piezo nano positioning stage that controls a travel range of 15 to 38 µm with a resolution of 0.1 nm. By measuring the actual movable part with a two-electrode capacitive sensor and utilizing a frictionless structure with flexure guides, it achieves nanometer-level motion and positioning within a few milliseconds. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-speed piezo-driven nano-focus device for microscope objective lenses. It allows positioning with a stroke of 100μm at sub-nanometer resolution and high linearity. 【Points】 - Scanning and positioning of objective lenses with sub-nanometer resolution - Stroke up to 100μm, with millisecond-level settling time - High-speed response and long lifespan far surpassing motor-driven Z stages - Excellent focus stability through high-precision flexure guides with parallel control - Choice of position sensors: direct measurement via capacitance (high performance) or strain gauges (low cost) - Compatible with Metamorph(TM) imaging software - Achieves long lifespan with PICMA(TM) piezo actuators - Improved operability with quick-lock adapter ● For more details, please contact us or refer to the catalog.

• Actuator

The PIFOC(R) P-737 high-speed vertical positioning system is designed for use with XY stages in microscope inspection. 【Features】 ○ High-speed piezo operation in the vertical direction: Stroke up to 250μm (customizable up to 500μm) ○ Nanometer resolution ○ Accommodates specimen holding with a large central opening ○ Mechanically compatible with manual or motor-driven XY OEM stages ○ Response time in the millisecond range ● For more details, please contact us or refer to the catalog.

• Other microscopes