PI Japan Product Lineup

In the movement of parts in the manufacturing industry, accurate positioning and stable operation significantly affect production efficiency and quality. Especially in the case of heavy components or precise assembly processes, micron-level accuracy is required. Misalignment and vibrations can lead to the occurrence of defective products and delays in the process. The H-850 addresses these challenges with a maximum load capacity of 250 kg and a repeatability of ±0.2µm. By incorporating an absolute encoder, it reduces the positioning time at startup, contributing to increased productivity. 【Usage Scenarios】 - Alignment of heavy components - Supply of parts to robots - Positioning of parts in testing equipment 【Benefits of Implementation】 - Improved quality through high-precision positioning - Increased productivity through fast and stable operation - Reduced startup time with the absolute encoder

• Actuator
• Other industrial robots
• encoder

The H-825 Hexapod is a 6-degree-of-freedom parallel kinematics stage designed for research and experimental applications. With a reproducibility of ±0.1µm (Z-axis) and a high-rigidity structure, it is suitable for optical experiments and precision measurements where even minor positional errors are unacceptable. It achieves stable positioning under high load conditions with a maximum load capacity of 30kg and brushless DC gear motor drive. It is ideal for high-precision alignment and sample position control applications. Please refer to the catalog for detailed specifications. 【Application Scenes】 - Optical experiments / Laser alignment - Precision measurement and evaluation equipment - Semiconductor research and development - Sample stage / Optical system adjustment 【Benefits of Implementation】 - High-precision alignment through simultaneous control of 6 axes - Vibration suppression and stability improvement due to high-rigidity design - Immediate operation with built-in absolute encoder that requires no initialization

• Actuator
• Other industrial robots
• encoder

The H-825 Hexapod is a 6-degree-of-freedom parallel kinematics stage suitable for integration into manufacturing equipment and high-precision alignment applications. With a reproducibility of ±0.1µm (Z-axis) and a high-rigidity structure, it achieves stable precision positioning even with heavy workpieces. With a maximum load capacity of 30kg and brushless DC gear motor drive, it supports high-precision adjustment processes in production lines and inspection equipment. Please refer to the catalog for detailed specifications. 【Application Scenarios】 - High-precision alignment in semiconductor equipment - 6-axis position adjustment of optical components - Integration into inspection and measurement equipment - Precision assembly processes 【Benefits of Implementation】 - High-precision alignment through simultaneous 6-axis control - Vibration suppression and stable operation due to high-rigidity design - No initialization required with built-in absolute encoder for immediate operation - Capable of handling large workpieces with a 30kg load capacity

• Actuator
• Other industrial robots
• encoder

In experimental research fields, precise positioning is essential. Particularly when conducting fine and high-precision measurements, the accuracy of positioning significantly affects the experimental results. Low positioning accuracy can lead to inaccurate data and may compromise the reproducibility of the experiments. The Parallel Kinematic Hexapod H-811.I2 enhances the quality of research experiments through its high precision, rigidity, and flexible pivot point settings. 【Usage Scenarios】 - Optical alignment - Automation - Quality assurance testing - Use in testing equipment 【Benefits of Implementation】 - Improved experimental accuracy through high-precision positioning - Achievement of highly reproducible experimental results - Adaptability to various experiments

• Actuator
• Other industrial robots
• encoder

In positioning tasks within the manufacturing industry, high precision and reliability are required. Particularly in the precise assembly and inspection processes that influence product quality, fine and accurate positioning is essential. Traditional single-axis positioning systems have faced challenges due to the time and effort required for complex multi-axis adjustments. The Parallel Kinematic Hexapod H-811.I2 addresses these issues with its design featuring six degrees of freedom. Additionally, its compact design is a significant advantage due to its small footprint. 【Application Scenarios】 - Assembly of precision components - Positioning in inspection equipment - Fiber optic alignment - Automation systems 【Benefits of Implementation】 - Improved product quality through high-precision positioning - Reduced work time and increased efficiency - Adaptability to diverse applications - Stable operation due to high reliability

• Actuator
• Other industrial robots
• encoder

In the field of biotechnology, particularly in cell manipulation and live cell observation, even slight positional shifts of samples can significantly impact the results. To achieve smooth and high-precision positioning while minimizing damage to cells, sub-nanometer resolution and high reproducibility are essential. This product offers high resolution below 1nm and bidirectional reproducibility of ±0.2nm, ensuring high reliability and efficiency in cell manipulation. 【Application Scenarios】 - Biosensor evaluation - Integration into microfluidic devices 【Benefits of Implementation】 - Improved reproducibility of experiments - Enhanced research efficiency - For detailed product specifications, please refer to the catalog.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

In the field of microscopy, it is essential to scan the observation target with high precision to obtain clear images. Particularly in the observation of fine structures and biological samples such as cells, the accuracy of positioning significantly influences the observation results. Low positioning accuracy can lead to a lack of focus, making accurate observation difficult. A compact XY-axis piezo stage achieves high-precision scanning with a resolution of less than 1nm and bidirectional reproducibility of ±0.2nm. 【Application Scenarios】 - Scanning samples in microscopic observation - Fine adjustments during high magnification observation - Cell imaging 【Benefits of Implementation】 - Clear image acquisition through high-precision positioning - Reduction of observation time - Improvement of experimental reproducibility

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

In semiconductor manufacturing, precise and stable positioning of wafers and masks is required. Nanometer-level positioning accuracy affects product quality. Positioning errors can lead to reduced yield and product defects. The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability, providing high resolution below 1nm and bidirectional reproducibility of ±0.2nm. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection - Mask alignment - Probing 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity due to stable operation - Ease of integration into equipment due to compact housing - Enhanced maintainability with long-life actuators

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

In the calibration work of the measurement equipment industry, the accuracy and reproducibility of measurement results are crucial. Particularly in the calibration of rotational angles, the rotation precision and stability of the stage directly affect the measurement results. The air bearing rotary stage PIglide A-62x achieves low wobble and smooth rotational motion through frictionless non-contact rotation, supporting high-precision angle calibration. 【Application Scenarios】 - Calibration of angle measuring instruments - Calibration of rotational angle sensors - Adjustment of optical systems 【Benefits of Implementation】 - Realization of high-precision calibration work - Improvement in the reliability of measurement results - Enhancement of work efficiency

• Other machine elements
• Other industrial robots
• encoder

In the optical industry, precise positioning of optical elements such as lenses and mirrors is a crucial factor that affects system performance. Particularly in high-precision optical inspection and alignment, even slight deviations in angle or position can significantly impact measurement results. The air-bearing rotary stage PIglideA-62x high-precision model achieves minimal wobble and eccentricity through frictionless, non-contact rotation, realizing flatness and eccentricity of less than 200nm. This enables precise positioning of optical elements and supports high-precision optical inspection and alignment. 【Usage Scenarios】 - Angle adjustment of optical lenses and mirrors - Precise alignment of optical elements - Construction of optical inspection systems 【Benefits of Implementation】 - Enables precise positioning at the nanometer level - Achieves high-precision optical measurements - Contributes to improved system performance

• Other machine elements
• Other industrial robots
• encoder

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects yield and product quality. Particularly in wafer inspection and exposure processes, accurate positioning at the nanometer level is required. Conventional rotary stages can cause minor vibrations and eccentricities due to friction, which may lead to a decline in quality. The PIglide A-62x series addresses these challenges with its frictionless air bearing technology. 【Application Scenarios】 - Wafer inspection - Exposure equipment - Precision measurement 【Benefits of Implementation】 - Improved yield through high-precision positioning - Stabilization of product quality - Increased productivity

• Other machine elements
• Other industrial robots
• encoder

The L-511 high-precision linear stage is designed for use in a wide range of industries. - It achieves sub-micron reproducibility of up to ±0.15 µm, making it ideal for tasks that require high precision, such as laser cutting and optical alignment. - With a circulating ball bearing guide and a maximum stroke of 155mm, it ensures stability and strength. - The stress-relieving aluminum base provides mechanical stability even in harsh environments, minimizing drift. - Multiple configurations of motors and encoders are available, accommodating a wide range of applications in automation, research and development, and biotechnology.

• Actuator

In the field of precision measurement, high-accuracy positioning is essential. Particularly in the measurement and inspection of fine structures, even slight vibrations or errors can significantly impact the measurement results. The A-143 PIglide, with its non-contact structure, eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms, making it ideal for measurement applications that require nanometer-level precision. 【Application Scenarios】 - Precision measurement instruments - Inspection devices - Optical equipment 【Benefits of Implementation】 - Achievement of high-accuracy measurement results - Establishment of a stable measurement environment - Reduction of long-term operational costs

• Other machine elements
• Cartesian Robot
• encoder

In the semiconductor manufacturing industry, precise positioning of wafers and masks is a crucial factor that affects product quality and yield. Particularly in fine processing and inspection processes, nanometer-level accuracy is required. Low positioning accuracy can lead to the occurrence of defective products and a decrease in production efficiency. The A-143 high-precision linear air bearing stage, with its non-contact structure, eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms, thus meeting the high-precision positioning needs in semiconductor manufacturing. 【Usage Scenarios】 - Semiconductor manufacturing equipment - Inspection equipment - Measurement instruments 【Benefits of Implementation】 - Improved quality through high-precision positioning - Extended lifespan due to non-contact structure - High reliability through clean room compatibility

• Other machine elements
• Cartesian Robot
• encoder

In the FPD manufacturing industry, high-precision positioning is required in the inspection process. Particularly in the detection of fine defects and dimensional measurements, accurate positioning is essential to suppress the occurrence of defective products and improve yield. Using a stage with low positional accuracy can compromise the reliability of inspection results and make accurate evaluation difficult. The A-143 PIglide contributes to the improvement of FPD inspection quality with its high-precision positioning of ±0.2 µm. 【Application Scenarios】 - FPD defect inspection - Dimensional measurement - Alignment 【Benefits of Implementation】 - Improved inspection accuracy - Reduced defect rate - Increased productivity

• Other machine elements
• Cartesian Robot
• encoder

In the laser processing industry, the positioning accuracy of the workpiece is crucial for achieving high-quality cutting. Particularly in cases where fine processing and high-precision cutting are required, positioning errors directly affect the quality of the product. The A-143 compact linear air bearing stage significantly enhances positioning accuracy in laser processing with a positioning precision of ±0.2 µm, enabling high-quality cutting. 【Application Scenes】 - Laser cutters - Laser marking 【Effects of Implementation】 - Improved product quality through high-precision cutting - Increased yield - Reduced processing time

• Other machine elements
• Cartesian Robot
• encoder

In the optical equipment industry, precise adjustments of components such as lenses and mirrors are crucial factors that influence product performance. Particularly in situations that require fine positional adjustments, a high-precision staging system is essential. If the adjustment accuracy is low, it can lead to a decline in the performance of the optical system, potentially adversely affecting the quality of the final product. The A-143 PIglide positions with nanometer-level accuracy, streamlining the adjustment tasks for optical equipment. 【Application Scenarios】 - Position adjustment of optical lenses - Calibration of precision measuring instruments - Fiber optic alignment 【Benefits of Implementation】 - Achieving high-precision adjustment tasks - Reducing work time - Improving product quality

• Other machine elements
• Cartesian Robot
• encoder

In the optical industry, the alignment process requires the ultra-precise positioning of optical components such as lenses and mirrors. In particular, misalignment of the optical axis significantly affects system performance, making high-precision positioning essential. Traditional stages that rely on friction are influenced by friction during small movements, making accurate positioning difficult. The PIglide A-121 eliminates friction and backlash, achieving positioning with nanometer-level precision, thus addressing the challenges of optical alignment. 【Application Scenes】 - Alignment of optical lenses - Fiber alignment - Manufacturing of optical fiber devices 【Benefits of Implementation】 - Improved optical performance through high-precision alignment - Increased yield - Enhanced productivity

• Other machine elements
• Cartesian Robot
• encoder

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects product quality and yield. Particularly in microfabrication and inspection processes, accurate positioning at the nanometer level is required. Conventional stages that involve friction have faced challenges with precision degradation due to wear and backlash. The PIglide A-121 combines magnetic direct drive and air bearing technology to address these issues. 【Application Scenarios】 - Semiconductor inspection equipment - Precision measurement devices - Microfabrication 【Benefits of Implementation】 - Improved quality through high-precision positioning - Extended lifespan due to non-contact structure - Reduced maintenance costs

• Other machine elements
• Cartesian Robot
• encoder

In measurements, testing, and inspections, accurate precision is required. Reducing errors and precise positioning are essential. The Direct Drive High-Precision Rotary Stage V-62x series supports accurate calibration work with less than 1µm of eccentricity and flatness. 【Application Scenarios】 - Optical measurement and inspection - Precision inspection of semiconductors and electronic components - Calibration of sensors and measuring instruments 【Benefits of Implementation】 - Reduction of measurement errors and improvement of reproducibility - High-precision and stable angular positioning - Enhanced measurement reliability through long-term stable operation

• Actuator
• Other industrial robots
• encoder

In the semiconductor manufacturing industry, precise positioning of wafers and masks is a crucial factor that affects product quality and yield. Particularly with advancements in microfabrication technology, there is a demand for higher precision and stability. Low positioning accuracy can lead to processing defects and a decline in device performance. The Direct Drive High-Precision Rotary Stage V-62x series achieves excellent rotational accuracy and minimal tilt error, enabling advanced alignment and rotation control. 【Application Scenarios】 - Wafer probing - Mask alignment - Laser processing - Inspection equipment 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity through high-speed, high-precision operation - Compatibility with a wide range of fields

• Actuator
• Other industrial robots
• encoder

In the field of research and experimentation, precise positioning and rotation control are crucial elements that influence the accuracy and reproducibility of experiments. Conventional rotary stages often lack the necessary precision and speed, which can affect experimental results. The Direct Drive High-Precision Rotary Stage V-62x series achieves excellent rotational accuracy and minimal tilt error, enabling advanced alignment and rotation control. 【Application Scenarios】 - Adjustment of optical systems - Semiconductor manufacturing equipment - Experiments in the biomedical field 【Benefits of Implementation】 - Improved experimental accuracy - Highly reproducible experimental results - Utilization across a wide range of fields

• Actuator
• Other industrial robots
• encoder

In the laser processing industry, high precision positioning and stable operation are required. Particularly in fine processing and precise pattern formation, misalignment and vibrations significantly affect processing accuracy. The Direct Drive High Precision Rotary Stage V-62x series contributes to improving the accuracy of laser processing with eccentricity and flatness of less than 1µm. 【Application Scenarios】 - Angle-dependent fine pattern processing - Prototype processing of optical and precision components - Development of laser processing processes and condition verification 【Effects of Implementation】 - Improvement in processing accuracy and quality - Enhanced reproducibility of fine processing - Increased reliability of processing processes

• Actuator
• Other industrial robots
• encoder

In laser microprocessing, even slight positional shifts or posture errors can significantly affect processing quality. The H-815 hexapod maintains optimal conditions for processing points, focal positions, and workpiece posture through sub-micron precision positioning and high reproducibility achieved by simultaneous control of six axes. This ensures stable processing quality. 【Application Scenarios】 - Reduction of processing variation - Integration into semiconductor manufacturing equipment - High-precision inspection processes 【Benefits of Implementation】 - Stabilization of manufacturing processes - Improved reproducibility of fine patterns - Stable operation 24 hours a day, 365 days a year

• Testing Equipment and Devices

In the optical components industry, precise and demanding positioning is a crucial factor that influences quality. Our H-815 industrial hexapod achieves high-precision positioning, contributing to the improvement of product quality. 【Application Scenarios】 - Addressing demanding alignment processes in photonics - Alignment of extremely small components such as lenses and other optical parts 【Benefits of Implementation】 - Increased productivity in complex manufacturing and measurement processes - Alignment of small components - Long-life design capable of handling high-load cycles

• Testing Equipment and Devices

In the manufacturing industry, there is a demand for improvements in quality and production efficiency. Particularly in the assembly and inspection processes of precision components, the accuracy of positioning is crucial for determining product quality. If the positioning accuracy is low, it can lead to the occurrence of defective products and an increase in assembly time. The Parallel Kinematic Hexapod H-811 addresses these challenges with its high-precision positioning performance. [Application Scenarios] - Improving productivity in complex manufacturing processes and measurement procedures [Benefits of Implementation] - Compact installation area - Increased productivity

• Actuator
• Other industrial robots
• encoder

The NanoCube P-616.65S is a multi-degree-of-freedom piezo stage that achieves 6-axis nanopositioning, including linear movement in the X, Y, and Z directions, as well as rotation in θX, θY, and θZ. Thanks to its parallel kinematics and flexure guide structure, it provides high rigidity, low crosstalk, and high dynamic performance that cannot be achieved with conventional stages. With a movement range of ±250 µm and a rotation range of ±26.2 mrad, it enables fine positioning at the nanometer level. It excels in environments requiring sub-micron precision, such as photonics and fiber alignment.

• Other optical parts

In research, high reproducibility and reliability are required even under limited conditions. For over 50 years, PI has provided positioning solutions that achieve both nanometer-level high precision and long-term stability. They can be smoothly integrated into existing research facilities and are compatible with major software such as LabVIEW, MATLAB, and Python. They enable precise and stable operation even in harsh environments, such as microscopy inspection, photonics, and quantum research. They can also flexibly respond to short-term projects and urgent needs. Please check the detailed page for PI's latest technologies that support precision research.

• Other inspection equipment and devices

- Precision nanopositioning stage designed for optical phase shifting in advanced interferometer applications. - Thin-stage - Achieves Z motion with tilt error correction through a tripod piezo-driven design. - Custom model support (e.g., closed-loop)

• Other optical parts
• Optical Measuring Instruments

A robust and highly precise hexapod designed for industrial applications, based on the premise of operating 24 hours a day, 365 days a year. Despite its compact design, it offers high durability and achieves reliable positioning even in harsh environments.

• Testing Equipment and Devices

The C-887.52X is equipped with a 32-bit PID controller optimized for hexapod control, allowing for 6 degrees of freedom positioning with a single command. It supports various communications such as EtherCAT, USB, and RS-232, and is also equipped with analog/digital I/O and BNC connectors. LabVIEW, Windows DLL, and Linux drivers are provided, enabling flexible control according to the development environment. It also features reference switches and stall detection functions, ensuring safety considerations are taken into account.

• controller
• Servo
• Amplifier

The H-850 is a high-rigidity hexapod boasting a maximum load capacity of 250 kg, capable of extensive movement with ±50 mm (XY) / ±25 mm (Z) and ±30° range of motion. Its reproducibility is highly precise, with a Z-axis accuracy of ±0.2 µm and a rotational axis accuracy of ±7.5 µrad. Smooth operation is achieved through a brushless DC gear motor, and immediate position acquisition is facilitated by an absolute encoder, allowing for fast and stable control. The structure employs a parallel kinematic design, making it ideal for robotics, heavy object alignment, and testing equipment.

• Actuator
• Other industrial robots
• encoder

The H-840 is a high-precision hexapod that employs a Stewart platform structure and is driven in parallel by six actuators. It achieves flexible motion with a Z-axis range of ±25mm, X/Y direction of ±50mm, and rotation of ±30°, enabling advanced position control for applications such as optical alignment and micromanipulation. It can accommodate loads of up to 30kg and features a position repeatability of ±0.1µm along with high control accuracy.

• Actuator
• Other industrial robots
• encoder

The H-825, with a Z-axis reproducibility of ±0.1µm and a high-rigidity design, is suitable for precise operations in semiconductor manufacturing and optical adjustment fields. It has a maximum load capacity of 30kg and can operate immediately without initialization due to its brushless DC gear motor drive and absolute rotary encoder. It achieves stable high-precision positioning and posture control.

• Actuator
• Other industrial robots
• encoder

The H-811.I2 is a compact hexapod capable of high-precision positioning across all six axes. In addition to a movement range of ±17mm in the XY plane and ±6.5mm in the Z direction, it allows for rotation control of ±21°. Thanks to its parallel kinematic design, interference and errors are minimized, ensuring stable operation. It is particularly reliable for operation in vacuum or confined spaces, excelling in precision fields that require reproducibility and rigidity. It can support loads of up to 5kg.

• Other industrial robots
• Actuator
• encoder

The D-510 PISeca is a single-electrode capacitive sensor that achieves a maximum measurement range of 500µm and a resolution of less than 1nm. The sensor probe is easy to install with a LEMO connector. Uniformity of the electric field is ensured by the guard ring electrode, achieving high linearity (maximum 0.1%). When combined with dedicated electronics such as the E-852.10, it enables excellent nanometer-level displacement measurements with both static and dynamic resolution.

• Sensors
• Converters and Transducers
• Other electronic parts

The D-050/D-100 is a two-electrode capacitive sensor provided by PI that achieves a measurement range of up to 150µm and a resolution of 0.01nm. It is ideal for nanometer-scale measurements due to its higher resolution than interferometers and its non-contact method. It supports parallel measurements and allows for real-time correction in multi-axis control. Linearity is less than 0.01% (when using a digital controller), and the bandwidth is up to 10kHz. It is suitable for clean environments, semiconductor manufacturing, and integration into measuring instruments.

• Sensors
• Converters and Transducers
• Other electronic parts

The U-781 is an XY stage that utilizes PILine® piezo linear motors, featuring stability due to its self-locking function and a lubrication-free silent design. Its compact and flat design does not hinder sample access under a microscope. It is compatible with various software such as LabVIEW, MATLAB, and µManager, allowing for flexible integration and automation of the device. There are also plenty of options available, such as sample holders and Z stages.

• Other machine elements
• Cartesian Robot
• Piezoelectric Devices

The N-472 series is a highly reliable closed-loop actuator that employs the Piezoelectric Inertia Drive method. It enables high-precision positioning control, with position feedback obtainable via an incremental encoder. While ensuring a maximum driving force of 22N and a holding force of over 100N, it requires no current when not in operation, minimizing heat generation. It allows for easy installation with an M10×1 screw and a 9.5mm clamp shank, making it suitable for device integration.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The N-470 is a compact inertial drive actuator with high holding force (over 100N) and a movement range of 7 to 13mm. Designed to replace conventional manual screw mechanisms, it is ideal for fine adjustment of optical mirror chip tilts and for long-term stable fixation of small components. It can be easily mounted to devices with an M10×1 screw and a 9.5mm clamp shank. When combined with the E-872 controller, it enables precise micro-motion control.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The N-216 is a piezo stepping actuator with a maximum holding force of 800N and a resolution of 0.03nm (open loop) / 5nm (closed loop). Thanks to its unique PiezoWalk® technology, it enables high-speed and nano-precision positioning while switching between full-step mode and nano-stepping mode. It is suitable for non-magnetic, clean, and vacuum environments, making it ideal for applications that require fine control, such as semiconductor manufacturing, wafer inspection, and nano-lithography.

• Actuator
• Piezoelectric Devices
• Other machine elements

The E-727 is a digital control unit that supports up to 4 channels, with a lineup that includes a high-output current model (up to 1500mA) in addition to standard specifications. It is equipped with analog input/output terminals, digital I/O, sensor monitor output, and waveform generator functions, fully supporting advanced piezo motion applications. It is capable of signal processing with a sensor bandwidth of 10kHz and a sampling rate of 100kHz, demonstrating excellent performance in dynamic measurement and synchronous control.

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• Servo
• Amplifier

The E-625 is a high-performance servo controller designed for low-voltage piezo actuators. It allows for parallel networking of up to 12 units and can flexibly accommodate multi-axis control systems. With a 24-bit high-resolution A/D and a 20-bit D/A converter, it achieves high-precision position detection and smooth operation. Sensors can be selected from capacitive or strain gauge (SGS) options. It features PI's unique GCS command system, software compatible with LabVIEW and DLL, and waveform memory functionality, making it ideal for device development and experimental applications.

• controller
• Servo
• Amplifier

The E-500/E-501 is a custom-designed controller compatible with piezo systems configured with 1 to 3 channels. It allows for the selection of high-voltage amplifiers (up to 1100V) and multi-channel compatible capacitance and SGS sensor control modules, ensuring compatibility with a wide range of PI products. The system is composed of various modules that enhance control precision and responsiveness while also ensuring flexibility for device integration.

• controller
• Servo
• Amplifier

The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability. It offers high resolution of less than 1nm and bidirectional repeatability of ±0.2nm, making it reliable for use in applications that require high reliability, such as quality assurance testing and semiconductor inspection. The housing is extremely compact, making it ideal for integration into devices.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot