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  6. Modular Piezo Control System E-500/E-501

Modular Piezo Control System E-500/E-501

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last updated:Nov 04, 2025

ピーアイ・ジャパン
ピーアイ・ジャパン
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Flexible construction is possible according to the number of axes used, compatible sensors, and operational specifications.

The E-500/E-501 is a custom-designed controller compatible with piezo systems configured with 1 to 3 channels. It allows for the selection of high-voltage amplifiers (up to 1100V) and multi-channel compatible capacitance and SGS sensor control modules, ensuring compatibility with a wide range of PI products. The system is composed of various modules that enhance control precision and responsiveness while also ensuring flexibility for device integration.

    AmplifiercontrollerServo
csm_PI_E-500_E-501_E-503_E-509_E-518_f03dbdfb45.jpg

Modular Piezo Control System E-500/E-501

csm_PI_E-500_E-501_E-503_E-509_E-518_f03dbdfb45.jpg
csm_PI_E-500_E-501_E-503_E-509_E-518_f03dbdfb45.jpg
  • Related Link - https://www.pi-japan.jp/ja/products/controllers-an…
  • Special site - Product/service details - https://pr.mono.ipros.com/pi-japan/product/

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basic information

- Up to 3 axes, customizable to over 12 axes - Selectable amplifier modules for low voltage (up to 135V) and high voltage (up to 1100V) (peak output 14 to 400W) - Selectable position servo control modules for SGS and capacitive sensors (1 to 3 channels) - Selectable PC interface/display modules - Compatible with high voltage and low voltage piezo systems - 19-inch and 9 1/2-inch chassis available *For more details, please refer to the catalog or feel free to contact us.

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Applications/Examples of results

- High-precision multi-axis control of nano-positioning stages - Optical element alignment using piezo actuators - Z-axis piezo control in interferometers and AFMs - Precision motion control for bio-measurement and microscope systems - Embedded control systems for semiconductor inspection equipment - Non-contact piezo motion control in vacuum environments *For more details, please refer to the catalog or feel free to contact us.*

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Modular Piezo Control System (High Voltage & Low Voltage / 1ch to Multi-ch) E-500/E-501

Modular Piezo Control System (High Voltage & Low Voltage / 1ch to Multi-ch) E-500/E-501

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ピーアイ・ジャパン

ピーアイ・ジャパン

Electronic Components and Semiconductors

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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.

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