PI Japan Product Lineup

The N-331 PICMAWalk is a walking drive linear actuator that combines the nano-resolution of piezo elements with stepping motion. It is available in 25mm, 50mm, and 100mm types, with a driving force of 50N and a holding force of 60N. The PiezoWalk® walking drive operates with multiple piezo actuators performing walking motions, leading to the feed motion of the runner. By controlling the actuators, it enables the smallest steps and forward feed motions with a resolution of less than 1 nanometer. It performs high-precision position measurement using an incremental linear encoder. Additionally, it is compatible with actuators that can handle a vacuum of 10⁻⁹ hPa. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The "L-731/V-731" is a PIMag® linear motor XY axis stage that prevents creep in cross roller guide cages. The "L-731" is suitable for environments requiring high rigidity, while the "V-731" is ideal for applications where speed stability is important. They can be used in various fields such as medical and industrial applications, laser cutting, scanning, and biotechnology. 【Features】 ■ Travel range: 205x205mm (8 inches) ■ Incremental linear encoder (resolution 1nm) ■ Prevents creep in cross roller guide cages ■ The L-731 is suitable for environments requiring high rigidity ■ The V-731 is suitable for applications where speed stability is important *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor
• Actuator
• Cartesian Robot

The "L-505" is a compact linear stage that allows for the selection of DC or stepping motors. The linear stage is available in two design variations: a slender type equipped with a flange motor and a wide, compact type equipped with a belt drive (foldable drive train). Additionally, it enables high-precision position measurement using an incremental encoder. 【Features】 ■ Travel range: 13mm or 26mm ■ Choice of stepping motor or DC servo motor without a gear head ■ Speed: 15mm/s ■ Maximum load: 30N ■ Built-in reference point and limit switch *For more details, please refer to the PDF document or feel free to contact us.

• Actuator
• Cartesian Robot
• encoder

The "L-310" is a product that achieves high guide accuracy and rigidity through a ball screw and cross roller guide. It uses a stress-relieving aluminum base that enables high stability. Additionally, it is equipped with a vacuum-compatible version of a non-contact limit switch and a reference point switch, with the reference point switch featuring orientation sensing located at the center of the travel range. 【Features】 ■ Achieves high guide accuracy and rigidity ■ Uses a stress-relieving aluminum base ■ Realizes smooth operation and low friction for long life ■ High-precision position measurement with an incremental encoder ■ Small incremental motion and low-speed motion *For more details, please refer to the PDF materials or feel free to contact us.

• encoder

In the medical field, particularly in surgical assistance, precise control of equipment is essential for patient safety and the success of surgeries. In situations that require fine movements, high accuracy and stability are necessary. The L-239 model enables accurate positioning of surgical assistance robots and precision instruments due to its high resolution and high feed force. This contributes to improved surgical precision. 【Application Scenes】 - Surgical assistance robots - Endoscopic examinations - Microsurgery 【Effects of Implementation】 - Improved surgical precision - Reduced burden on patients - Reduced burden on medical professionals

• Actuator

The "L-239 model" is a high-load linear actuator that is customizable and compatible with vacuum environments. It features built-in sensors with capabilities such as sensor resolution and design resolution. It is suitable for use in research, optical alignment, and automation. 【Features】 ■ High feed force: 300N ■ Travel range: 52mm ■ Speed: up to 50mm/s ■ Vacuum compatible (10-9 hPa) and customizable *For more details, please refer to the PDF document or feel free to contact us.

• Actuator

The PIMag Linear Motor Controller 'C-413' is a digital motion controller for PIMag voice coil drive. It supports one motor channel and two sensor channels, compatible with the V-275 and V-275 linear actuators. It is equipped with a wide range of support functions, including a data recorder that logs movement data such as motor current, speed, position, and position error. Additionally, the PIMag Linear Motor Controller also includes the "C-891" type, which has a maximum average current consumption of 3A. 【Features】 ■ Up to 4 sensor channels with force x2 and position x2 sensors ■ TCP/IP or USB interface for configuration and command transmission (depending on the version) ■ Real-time SPI interface for command transmission (depending on the version) ■ Optional analog input/output ■ Automatic zero function for holding current For more details, please refer to the catalog or feel free to contact us.

• controller

The "PIglide Direct-Drive Air Bearing Series" features magnetically preloaded air bearings and is driven by a linear servo motor with an integrated optical linear encoder. By combining these non-contact components, we have achieved a frictionless motion platform with the best performance, quality, and product lifespan. The air bearing stage series includes options such as the "XY-axis Small Air Bearing Stage," "XY-axis Large Air Bearing Stage," and "Air Bearing Rotary Stage." 【Features】 ■ Non-contact fully preloaded air bearings ■ Ideal for scanning or high-resolution positioning ■ Compatible with clean rooms ■ Customizable ■ Integrated optical linear encoder For more details, please refer to the catalog or feel free to contact us.

• Other machine elements
• Cartesian Robot
• encoder

The H-840 Hexapod is a 6-degree-of-freedom parallel kinematics positioning system suitable for integration into manufacturing equipment and inspection processes. It features a wide operating range of ±50 mm / ±30° and high dynamic performance, achieving high-speed and high-precision simultaneous control of six axes. It supports precise positioning adjustments in optical alignment, precision inspection, and micro-machining processes. For detailed specifications and configuration examples, please refer to the catalog. 【Application Scenarios】 - High-precision inspection of semiconductors/electronic components - 6-axis alignment of optical components - Integration into laser processing equipment - Precision assembly and adjustment processes 【Benefits of Implementation】 - High-precision alignment through simultaneous control of six axes - Reduced takt time due to high-speed response - Compatibility with a variety of workpieces due to a wide range of motion - Compact design suitable for equipment integration

• Other measurement, recording and measuring instruments

The H-840 Hexapod is a 6-degree-of-freedom parallel kinematics positioning system designed for research applications. Despite its compact design, it features high dynamic performance, achieving fast and precise positioning. It is suitable for applications requiring sub-micron level adjustments, such as optical alignment, precision experiments, and laser control. Its high repeatability and stability support improved reproducibility in research environments. For detailed specifications, please refer to the catalog. 【Application Scenarios】 - Optical and laser alignment - Precision measurement/evaluation devices - Biotechnology experiments - Micromanipulation - Position control experiments in universities and research institutions 【Benefits of Implementation】 - High-precision alignment through simultaneous control of 6 axes - Reduced experimental time due to fast response - Improved experimental reproducibility due to high repeatability - Compact design suitable for limited experimental spaces

• Other measurement, recording and measuring instruments

PI Japan Co., Ltd. offers a wide range of 6-axis stages. Starting with the high-speed, high-precision small hexapod "H-811.I2," we also feature the parallel kinematic hexapod "H-840," known for its high-speed operation and moderate load capacity, as well as the high-precision fiber alignment system "F-712." These products are applied in research and industrial applications, micro-manufacturing, medical technology, and tool control. 【Features】 〈Small Hexapod "H-811.I2"〉 ■ Travel Range: ±17mm/±21° ■ Load Capacity: 5kg ■ Repeatability: ±0.06μm ■ Maximum Speed: 20mm/s ■ Extremely long lifespan ■ Vacuum-compatible version available *For more details, please refer to the PDF materials or feel free to contact us.

• Actuator
• Other industrial robots
• encoder

In the nanotechnology manufacturing industry, sub-nanometer positioning accuracy is essential for microfabrication and precision measurement. Particularly in semiconductor manufacturing and the production processes of MEMS devices, even slight positional shifts can significantly impact product quality. The P-620.Z to P-622.Z models achieve high reliability and long lifespan through a combination of a frictionless flexure guide system and PICMA piezo actuators, contributing to the stabilization of manufacturing processes. [Application Scenarios] - Wafer inspection in semiconductor manufacturing - Microfabrication in MEMS device manufacturing - Precision measurements such as interferometers and confocal microscopes [Benefits of Implementation] - Improved yield in manufacturing processes - Enhanced product quality - Increased measurement accuracy You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

• Actuator
• Piezoelectric Devices
• encoder

In the semiconductor industry, high-precision positioning is required. Especially in wafer inspection and measurement of fine structures, sub-nanometer level stability and high-speed control are essential. Positioning errors can compromise the reliability of measurement results and potentially lead to reduced yields. This product achieves high-precision positioning in semiconductor measurements with a resolution of 0.1 nm and linearity of 0.02%. 【Application Scenes】 - Wafer inspection - Measurement of fine structures - Interferometers - Confocal microscopes 【Benefits of Implementation】 - Significant improvement in measurement accuracy - Yield enhancement - High-speed and high-precision positioning - Sub-nanometer level stability You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

• Actuator
• Piezoelectric Devices
• encoder

The PIHera P-620.Z/P-621.Z/P-622.Z is a Z-axis piezo stage that drives vertical strokes of 50, 100, and 250 µm with a resolution of 0.1 nm. The capacitive sensor directly measures the moving platform, suppressing linear errors to 0.02%. The zero-backlash flexure guide requires no lubrication and is dust-free, achieving a resonance frequency in the kHz range and sub-millisecond response. The actuator is an all-ceramic insulated PICMA(R) that has demonstrated a long lifespan of 10 billion cycles. It is ideal for Z-axis control in devices that require both sub-nanometer stability and high speed, such as interferometers, confocal microscopes, and semiconductor inspection. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• encoder

In the focus control of objective lenses in optical instruments and measurement devices, high-precision Z positioning and fast response are required. Particularly when the objective lens is large and has a high numerical aperture (NA), conventional mechanisms face challenges in operational response and stability, which can affect measurement accuracy and observation quality. The P-726 PIFOC high-load objective lens focus scanner achieves high-precision focus control with sub-nanometer resolution obtained through direct measurement using capacitive sensors, with a maximum stroke of 100 µm. Additionally, the flexure guide structure eliminates friction and backlash, maintaining high rigidity and stability even under high-load conditions. This enhances the accuracy and throughput of optical measurement devices, increasing the reliability of measurements and observations. [Application Scenarios] - Precision focus control of objective lenses - Z-scanning for confocal microscopes and super-resolution microscopes - 3D optical imaging devices - High-precision optical measurement devices (interferometers, autofocus systems) [Benefits of Implementation] - Improved optical measurement accuracy through high-precision Z position control - Reduced inspection and observation time due to fast operational response - High-load performance compatible with heavy lenses - Long-term stability and low maintenance requirements

• Actuator
• Piezoelectric Devices
• encoder

In the field of nanotechnology structural analysis, high-precision Z-direction focus control at the nanoscale is essential. The P-726 PIFOC is a high-load compatible focus scanner that achieves a stroke of 100 µm and sub-nanometer resolution (approximately 0.3 nm class). Direct feedback from a capacitive sensor and a flexure guide structure provide high positioning accuracy and reproducibility. Its high-speed settling performance of about 6 ms contributes to the efficiency of nanostructure observation and 3D imaging involving Z-scanning. 【Application Scenarios】 - Nanostructure observation using confocal microscopy - Z-scanning in super-resolution optical microscopy - Optical nanostructure analysis devices - 3D imaging evaluation devices 【Benefits of Implementation】 - High-precision focus control with sub-nanometer resolution - Improved measurement efficiency due to high-speed settling - Increased design flexibility of optical systems due to high load compatibility - Enhanced reproducibility through long-term stable operation

• Actuator
• Piezoelectric Devices
• encoder

In the field of biotechnology, cell observation is affected by minute focus fluctuations that impact image quality. The P-726 PIFOC is a high-load-capable focus scanner with a Z stroke of 100 µm and sub-nanometer resolution. Direct position feedback from a capacitive sensor and a flexure guide structure ensure high positioning accuracy and reproducibility. Furthermore, it maintains high dynamic performance with a resonance frequency of 560 Hz at a load of 210 g, even when equipped with high NA objective lenses. The fast settling time (approximately 6 ms) enhances the efficiency of Z-stack acquisition and focus scanning. 【Application Scenarios】 - Confocal microscopy - Super-resolution microscopy - Live cell imaging - 3D imaging with Z-stack acquisition 【Benefits of Implementation】 - Improved image stability through high-precision focus control - Enhanced measurement efficiency due to fast Z response - Increased design flexibility of optical systems due to high load capacity - High reproducibility in focus positioning

• Actuator
• Piezoelectric Devices
• encoder

In semiconductor wafer inspection, high-resolution Z-axis focus control and fast responsiveness are required to stably detect fine defects. Particularly in optical inspection systems using high NA objectives, focus accuracy and reproducibility are directly linked to the reliability of inspection results. The P-726 PIFOC high-load objective lens focus scanner achieves a Z stroke of up to 100 µm with sub-nanometer resolution in position control. Direct position feedback from a capacitive sensor and a flexure guide structure provide high linearity, repeatability, and long-term stability. Furthermore, its high-speed settling performance of approximately 6 ms contributes to the optimization of inspection processes involving Z-step movements. Due to its high-load design, stable operation is possible even when using high NA objectives or additional optical components. [Application Scenarios] - Z focus control in optical inspection of semiconductor wafer surfaces - Defect analysis equipment using high NA objectives - Three-dimensional inspection using confocal optical systems - Z scanning in laser and optical interference inspection devices [Benefits of Implementation] - Improved measurement stability through high-precision focus control - Reduced Z step time due to high-speed settling - Increased design flexibility of optical systems due to high-load capability

• Actuator
• Piezoelectric Devices
• encoder

The P-726 is a PIFOC® high-load focus scanner that drives heavy high NA objective lenses with high speed and precision. It features built-in flexure guides and capacitive sensors, achieving an OpenLoop resolution of 0.3 nm and a linearity error of 0.02%. The resonance frequency is maintained at 1120 Hz without load and 560 Hz with a 210 g load, accelerating Z-scanning for semiconductor wafer inspection and confocal/super-resolution microscopy. It supports major thread sizes such as M32/M27 with the QuickLock adapter. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• encoder

Precise optical axis adjustment and positioning in the field of optics are crucial elements for maximizing system performance. Especially in high-resolution microscopes and precision measurement devices, even slight positional deviations can significantly impact measurement accuracy and reproducibility. The P-733.2, which employs a high-precision parallel kinematics structure, achieves nano-level positioning with a reproducibility of ±1nm and accommodates transmission light applications with a stroke of 100µm on the XY axis. It contributes to the high precision of optical systems and the efficiency of adjustment tasks, from research and development to device integration. 【Application Scenarios】 - High-precision microscopes - Mask/wafer positioning - Interferometers and optical measurement devices 【Benefits of Implementation】 - High-precision positioning with ±1nm reproducibility - Smooth integration into transmission light optical systems - Reduced optical axis adjustment time and improved development efficiency

• Actuator
• Piezoelectric Devices
• Cartesian Robot

In the semiconductor manufacturing field, extremely high precision and stability are required for the positioning of wafers and masks. With the advancement of miniaturization, we have entered an era where nanometer-level positioning errors directly affect device performance and yield. Particularly in exposure and inspection equipment, precise control that combines reproducibility and stability is essential. The P-733.2 achieves high-precision XY nanopositioning with a reproducibility of ±1nm. With a 100µm stroke and a high-rigidity parallel kinematics structure, it is also suitable for integration into semiconductor manufacturing equipment. High-precision positioning contributes to process stabilization and yield improvement. 【Application Scenarios】 - Exposure equipment - Mask/Wafer positioning - Inspection and measurement equipment 【Benefits of Implementation】 - Process stabilization with reproducibility of ±1nm - Yield improvement through high-precision positioning - Maximization of equipment performance through stable operation

• Actuator
• Piezoelectric Devices
• Cartesian Robot

This is an XYZ-axis nanopositioning stage that performs direct measurement using high-reliability PICMA piezoelectric drive and capacitive sensors. The XY-axis motion range is available in 30 x 30 µm and 100 x 100 µm types, while the Z-axis has a stroke of 10 µm. With an aperture of 50 x 50 mm, it is also ideal for transmitted light applications. It is used in high-precision microscopy, mask/wafer positioning, measurement technology, and more. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Cartesian Robot

In high-precision measurement, the positioning accuracy of the probe affects the reliability of the measurement results. Even slight vibrations or crosstalk can be sources of error, necessitating stable nanopositioning achieved through high rigidity and closed-loop control. The P-561, P-562, and P-563 PIMars Nanopositioning Stages are XYZ multi-axis piezo flexure stages that utilize a parallel kinematics structure and capacitive sensors. They achieve a reproducibility of ±2 nm and linearity of 0.03%, enabling high-precision probe positioning with low crosstalk. With high resonance frequency and excellent dynamic characteristics, they are suitable for high-speed scanning measurements and micro-displacement measurements. They are ideal for precision measurement applications such as semiconductor inspection and nanomaterial analysis. 【Application Scenarios】 - Semiconductor inspection - Super-resolution microscopy - Photonics alignment 【Benefits of Implementation】 - Achievement of high-precision measurement results - Reduction of measurement time - Improvement of product quality

• Actuator
• Piezoelectric Devices
• Cartesian Robot

In high-resolution observation using electron microscopes (SEM/TEM), the positioning accuracy of the sample affects image quality. Even slight vibrations or crosstalk can impact measurement precision, making a high-rigidity and high-response positioning stage essential. The P-561, P-562, P-563, and PIMars Nanopositioning Stages achieve high precision and positioning stability through capacitive sensors. The operational range is 100/200/300 µm in each XYZ direction (depending on the model), with a reproducibility of ±2nm and linearity of 0.03%. [Application Scenarios] - Sample positioning in electron microscope observation - Semiconductor inspection - Super-resolution microscopy - Photonics alignment [Benefits of Implementation] - Improved observation accuracy through precise positioning at the nanoscale - Efficient observation enabled by high resolution and fast response - Stable operation achieved through high reliability and long lifespan

• Actuator
• Piezoelectric Devices
• Cartesian Robot

The P-561 to P-563 series are XYZ-axis piezo nanopositioners that utilize a parallel kinematics structure and capacitive sensors. The operational range is 100/200/300 µm for each XYZ axis (depending on the model), with a reproducibility of ±2 nm and linearity of 0.03%. The aperture is 66×66 mm, ensuring a clear path for transmitted light and laser light. The direct drive type operates at 45 µm on the XY axis and 15 µm on the Z axis, with a resonance frequency of 1000 Hz under no load, achieving high resolution and fast response. Additionally, the PICMA piezo ceramics are fully insulated with all-ceramic construction, providing humidity resistance, high reliability, and long lifespan. They are ideal for semiconductor testing, super-resolution microscopy, and photonics alignment. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• Cartesian Robot

In the field of measurement, calibration and fine positioning require high reproducibility and stable positioning performance. Especially in measurements and alignments at the nanoscale, even slight backlash or friction can affect the reliability of the measurement results. The P-517/P-527 multi-axis piezo scanner adopts an integrated structure with frictionless flexure guides, minimizing hysteresis and mechanical play. With nanometer-level resolution and high reproducibility, it contributes to improving the accuracy of calibration work and precise measurements. Stable operating characteristics also contribute to ensuring long-term measurement reliability. 【Application Scenarios】 - Optical inspection equipment - Wafer inspection and measurement equipment - Nano-positioning applications - Precision measurement systems - Microscopes and scanning systems 【Benefits of Implementation】 - Improved calibration accuracy due to high reproducibility - Stable measurement environment due to frictionless structure - Enhanced reliability of measurement data and strengthened quality control

• Other industrial robots
• Piezoelectric Devices
• Actuator

In the field of precision machining, further miniaturization and quality enhancement are progressing, with positioning accuracy at the nano level becoming a crucial factor that influences product performance. Particularly in laser processing and micro-patterning, even slight errors caused by vibrations and friction directly affect processing quality. The P-517/P-527 multi-axis piezo scanner adopts a frictionless flexure guide integrated structure, eliminating backlash and wear. With PICMA piezo ceramics and high-resolution capacitive sensors, it achieves nano-level reproducibility and high dynamics. Its stable high-speed response enables precise position control in micro-machining, contributing to improved processing quality and yield. 【Application Scenarios】 - Laser micro-machining equipment - Micro-patterning - Wafer processing and inspection equipment - Nano-positioning applications - Precision measurement and machining systems 【Benefits of Implementation】 - Nano-level high-precision machining control - Improved processing quality due to stable operation - Reduced processing time and increased productivity - Cost reduction through improved yield

• Other industrial robots
• Piezoelectric Devices
• Actuator

Positioning in the field of optics is a very important factor in high-precision measurement, inspection, and microfabrication. In particular, the adjustment of the position of optical components such as lenses and mirrors is a critical challenge that affects the performance of the system. Conventional mechanical positioning methods have limitations in accuracy due to friction and backlash, making high-precision positioning difficult in some cases. The P-517/527 multi-axis piezo scanner addresses these challenges in the positioning of optical components with its nano-level resolution and reproducibility. 【Application Scenarios】 - Optical inspection - Wafer inspection - Nano positioning - Measurement - Microscopy 【Benefits of Implementation】 - High-precision positioning with sub-nanometer resolution - Stable operation with frictionless flexure guides - High linearity with capacitive sensors - Capability for transmitted light measurement with a 50 x 50 mm aperture

• Other industrial robots
• Piezoelectric Devices
• Actuator

The P-517/527 multi-axis piezo scanner uses zero-wear flexure guides, PICMA piezo ceramics, and capacitive sensors to achieve nanometer-level reproducibility and resolution. The available motion axes include XY, XYZ, and XYθz types. The XY axis has options of 100µm and 200µm, the Z axis is 20µm, and θz is 2mrad. It has a load capacity of 50N, making it ideal for applications such as optical inspection, wafer inspection, nanopositioning, measurement, and microscopy. It also allows for transmitted light with an aperture of 50 × 50mm. *For more details, please download the PDF or contact us.

• Other industrial robots
• Piezoelectric Devices
• Actuator

In the field of nanotechnology, precise manipulation at the nanoscale is required. In particular, accurate positioning and stable operation are essential for manipulating materials at the atomic level and for manufacturing fine structures. Conventional technologies have faced challenges due to their susceptibility to environmental changes, making it difficult to maintain precision. The multi-layer PICMA® piezo actuators P-882 and P-888 address these challenges. 【Application Scenarios】 - Scanning Probe Microscopy (SPM) - Nanoindentation - Microfabrication - Precision adjustment of optical systems - Semiconductor manufacturing equipment 【Benefits of Implementation】 - High-precision operation with sub-nanometer resolution - Stable operation in harsh environments - Reduced maintenance costs due to longer lifespan - Flexible system construction through diverse shapes and custom options - Achievement of high throughput

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of precision measurement, measurements requiring nanometer-level accuracy and those conducted in harsh environments are essential. Various external factors, such as temperature changes, vibrations, and vacuum conditions, can affect measurement accuracy, making stable operation and high durability crucial. The PICMA(R) multilayer piezo actuator P-882 and P-888 address these challenges with high rigidity and environmental performance. 【Application Scenes】 - Scanning Probe Microscopes (SPM) - Semiconductor manufacturing equipment - Precision positioning of optical elements 【Benefits of Implementation】 - High-precision positioning with sub-nanometer resolution - Stable operation in harsh environments - Reduced maintenance costs due to increased lifespan

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of microscopy, achieving high precision in focusing on the observation target is essential for obtaining clear images. This is particularly important during high magnification observations or dynamic observations, where fine adjustments to the focus are crucial. If the focus is off, it becomes impossible to see the details of the observation target, hindering accurate analysis and research. The PICMA(R) multilayer piezo actuator P-882 and P-888 precisely control the focus of microscopes with sub-nanometer resolution and ultra-high rigidity, providing clear images. 【Application Scenarios】 - Microscope focus adjustment - Cell observation - Material analysis - Semiconductor inspection 【Benefits of Implementation】 - Clear image acquisition through high-precision focus control - Reduction in observation time - Increased efficiency in research and analysis

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of life sciences, high-precision manipulation and measurement of cells, tissues, and micro-samples are required. In particular, even slight positional errors and vibrations in microscopic manipulation and measurement systems can affect the reproducibility and reliability of experimental results. The PICMA piezo actuators P-882 and P-888 achieve stable precision control with sub-nanometer resolution and ultra-high rigidity, providing strong support for life science research. 【Application Scenarios】 - Precise manipulation of cells and samples under a microscope - Control of micromanipulators and stages - Integration into bio-measurement and interferometer systems 【Benefits of Implementation】 - Improved reproducibility of experiments and measurements - Stabilization of fine manipulation - Enhanced research efficiency

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of optics, high-precision positioning and fine-tuning are required. In particular, the adjustment of the position of lenses and mirrors is a crucial factor that affects the performance of optical systems. Even a slight misalignment can lead to a decrease in image quality or a deterioration in measurement accuracy. The multi-layer PICMA® piezo actuators P-882 and P-888 achieve precise positioning and fine-tuning of optical systems with sub-nanometer resolution and ultra-high rigidity. 【Application Scenarios】 - Wavefront correction of optical systems - Fine adjustment of lenses and mirrors - Control of reference mirrors for interferometers - Stabilization of laser optical systems 【Benefits of Implementation】 - Improved optical performance through high-precision positioning - Fine adjustments enabled by sub-nanometer resolution - Long lifespan and high reliability - Stable operation in harsh environments

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The PICMA(R) multi-layer piezo actuator P-882 and P-888 are strong against humidity and electrolytic corrosion due to their ceramic insulation structure, and they exhibit excellent temperature stability. Custom options allow for high-temperature resistance up to 200 degrees, support for high currents up to 20 A, and modifications in shape such as perforated, circular, and rectangular designs. Additionally, they are compatible with UHV 10⁻⁹ hPa, have no outgassing, can withstand high bake temperatures, and operate in harsh environments such as vacuum systems and cryogenic conditions. In addition to a wide variety of sizes and shapes, custom specifications and integrated sensor models are also available. *For more details, please contact us or refer to the catalog.*

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the field of microscopy, precise scanning of samples is required. Especially in high-magnification observations and analysis of fine structures, accurate positioning is essential. Misalignment can lead to degradation of the observed image and a decrease in measurement accuracy. The PIHera P-620.1/629.1 series addresses these challenges with 0.1 nm resolution and high-precision positioning. 【Application Scenes】 - Scanning of microscope samples - Optical alignment - Interferometric measurements 【Benefits of Implementation】 - High-precision observation and measurement - Accurate analysis of fine structures - Improved experimental efficiency You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

• Actuator
• Piezoelectric Devices
• encoder

In the field of biotechnology, particularly in cell manipulation, precise positioning is required while minimizing damage to the cells. Nano-level accuracy is essential for elucidating biological phenomena, such as in cell culture, microscopic observation, and microinjection. Inaccurate positioning can lead to experimental failures and decreased reliability of data. PI's 0.1nm resolution nanopositioner enables precise positioning in cell manipulation, contributing to increased efficiency and accuracy in research. 【Application Scenarios】 - Cell culture - Microscopic observation - Microinjection - Cell selection 【Effects of Implementation】 - Minimizing damage to cells and improving the success rate of experiments - Enhancing the reliability of experimental data through accurate positioning - Achieving greater efficiency in research and more detailed observations

• Actuator
• Piezoelectric Devices
• encoder

In the field of nanotechnology measurement, precise positioning is extremely important. Observing fine structures, performing precise machining, and conducting advanced experiments require nanometer-level accuracy. Positioning errors can compromise the reliability of measurement results and hinder research progress. PI's 0.1nm resolution nanopositioner achieves high-precision positioning through built-in capacitive sensors and flexure guides, addressing these challenges. 【Application Scenarios】 - Scanning microscope samples - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Acquisition of high-precision measurement data - Improved reproducibility of experiments - Enhanced efficiency in research and development

• Actuator
• Piezoelectric Devices
• encoder

In the semiconductor industry, high-precision positioning is essential due to the miniaturization of manufacturing processes. Particularly in wafer inspection and exposure processes, even slight positional deviations can significantly affect product quality. The P-620.1/629.1 addresses these challenges and achieves high-precision positioning. With its built-in capacitive sensor, it achieves a linearity error of 0.02%, contributing to improved yield in semiconductor manufacturing. 【Application Scenarios】 - Wafer inspection - Exposure processes - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Increased yield - Streamlined manufacturing processes For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.

• Actuator
• Piezoelectric Devices
• encoder

The PIHera P-620.1/629.1 series is a one-axis nanopositioner that combines a flexure guide with PICMA® piezo technology. It has a stroke range of 50 to 1800 µm, a minimum resolution of 0.1 nm, and achieves a linearity error of 0.02% by measuring the actual moving parts with an integrated capacitive sensor. The flexure guide has no wear parts, offers high rigidity, excellent straightness, and outstanding long-term stability. It can also be expanded to X, XY, Z, and XYZ configurations, making it ideal for applications such as microscope sample scanning, optical alignment, and interferometric measurements. *For more details, please download the PDF or contact us.*

• Actuator
• Piezoelectric Devices
• encoder

In the field of precision measurement, even slight positional shifts or angular errors can significantly impact measurement results. This is especially true for the evaluation of fine structures and measurements using transmitted light, where nanometer-level resolution, high stability, and sufficient aperture diameter are required. The P-518/P-528 series is a high-precision piezo stage that combines a Z-axis stroke of 100µm/200µm with chip tilt control. Its large aperture design of 66mm accommodates transmitted light measurements, achieving high linearity and reproducibility. This contributes to improved reliability in precision measurements and alignment processes. [Application Scenarios] - Semiconductor inspection and evaluation equipment - Photonics/optical measurements - Microscope/interferometer systems - High-precision alignment applications [Benefits of Implementation] - High-precision Z and angular adjustments at the nanometer level - Compatibility with transmitted light measurements due to the 66mm aperture - Enhanced measurement reliability through high linearity and stability

• Actuator
• Piezoelectric Devices
• encoder

In scanning microscopy, even slight misalignments or tilts of the sample or objective lens can significantly affect the resolution and contrast of the image. This is especially critical in high-magnification observations and fine structure analyses, where nanometer-level Z control, angle correction, and high stability are essential. The P-518/P-528 series is a high-precision piezo stage that combines Z-axis strokes of 100µm/200µm with chip tilt control. Its large aperture design of 66mm accommodates transmitted observations. With high linearity and reproducibility, it enables the acquisition of high-quality images with minimized blur and distortion, contributing to the performance enhancement of microscopy systems. 【Application Scenes】 - Confocal microscopy - Fluorescence microscopy - Scanning probe microscopy (SPM) - Cell and live cell observation - Material and fine structure analysis 【Benefits of Implementation】 - High-precision Z scanning at the nanometer level - Stabilization of images through chip tilt correction - 66mm aperture for transmitted observations - Improved high-resolution image acquisition and reproducibility - Enhanced research and development efficiency

• Actuator
• Piezoelectric Devices
• encoder

In optical system adjustments, even a slight misalignment of the optical axis can significantly impact resolution and measurement accuracy. This is especially critical in applications such as interferometers, high-resolution microscopes, and precision alignment, where nano-level Z control and tip-tilt adjustments are essential. The P-518/P-528 series achieves high-precision control with Z-axis strokes of 100µm/200µm and tip-tilt of 1mrad/2mrad. Its large aperture design of 66mm makes it ideal for transmitted light applications. The high-rigidity flexure guide structure ensures stable reproducibility, contributing to improved accuracy and efficiency in optical adjustment tasks. 【Application Scenarios】 - Adjustment of microscope objective lenses and samples - Optical fiber alignment - Interferometer and wavefront measurement systems - Semiconductor inspection equipment 【Benefits of Implementation】 - Nano-level Z and angle adjustments - Flexible adaptation to transmitted light optical systems - Improved measurement accuracy through stable optical axis maintenance - Enhanced work efficiency due to reduced adjustment time

• Actuator
• Piezoelectric Devices
• encoder

The P-5x8 series features the piezo nano stage P-518.TCD with chip tilt and the long-stroke version P-528.TCD/ZCD, both developed on the same platform. It achieves a system resolution of 0.8 nm and a linearity error of 0.03% using highly reliable PICMA piezo ceramics, flexure guides, parallel kinematics, and capacitive sensors. The large aperture of 66 × 66 mm is suitable for interferometric measurements and transmitted light applications, with a load capacity of 50N, making it ideal for semiconductor testing, photonics, microscopy, and high-precision alignment. *For more details, please download the PDF or contact us.

• Actuator
• Piezoelectric Devices
• encoder

The P-752 is a high-precision piezo nano positioning stage with a maximum stroke of 35 µm and a maximum resolution of 0.1 nm. Its flexure guide structure and high-resolution capacitive sensors (closed-loop specification) achieve high reproducibility and stability while minimizing the effects of hysteresis. It provides reliable positioning performance in the field of biotechnology, where nanometer precision is required for applications such as cellular-level observation and manipulation of fine samples. 【Application Scenarios】 - Precision focusing in fluorescence microscopy and confocal microscopy - Nanoscale position control of cells and organoids - Micromanipulation - Biosensor evaluation and nano-level alignment 【Benefits of Implementation】 - High-precision positioning with a maximum resolution of 0.1 nm - High reproducibility and stability through closed-loop control - Compatibility for integration into microscopes and analytical devices due to compact design - Improved measurement efficiency through fast response

• Actuator
• Piezoelectric Devices
• Solenoid Actuators