PI Japan Product Lineup

The A-142 is a compact linear stage driven by a voice coil motor, achieving speeds of up to 200 mm/s and accelerations of 10 m/s² within a travel range of 10 mm. It offers a sensor resolution of 5 nm, a position accuracy of ±0.2 µm, and a minimum incremental motion of 50 nm. With a zero-wear air bearing structure, it requires no lubrication and is suitable for cleanroom applications, making it ideal for semiconductor inspection, optical adjustment, and measurement applications.

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The A-65x is a hemispherical air bearing module that supports a maximum diameter of 300mm and a maximum load of 635kg, providing highly flexible rotational motion across three axes: θX, θY, and θZ. With a design that eliminates friction and requires no lubrication, it achieves high rigidity and reproducibility. The ±45° chip/tilt range makes it ideal for posture control, tilt testing, and simulating artificial weightlessness environments. It is compatible with clean rooms and can be widely used for research purposes as well as satellite structural testing.

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The PIglide A-62x series is an air-bearing rotary stage designed to pursue high precision and high stability required for optical alignment and precision inspection applications. With frictionless, non-contact rotation, it minimizes wobble and eccentricity to the extreme. Flatness and eccentricity are achieved at less than 200nm, enabling control at the nanometer level. Thanks to the torque motor and optional absolute encoders, positioning is both fast and safe. It is compatible with clean room environments and can be installed both horizontally and vertically, allowing for flexible system configurations tailored to experimental conditions.

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The A-81x PIglide motion controller is a multi-axis ultra-precision motion control solution designed for air bearing stages. It allows control of up to 4 axes with a single unit and is suitable for operation in vacuum and non-magnetic environments. It features high-precision control that enables positioning at the nanometer scale and a flexible configuration. It supports high-speed interfaces via EtherCAT and analog signals, making it adaptable for advanced industrial applications such as semiconductor lithography, microscope stages, and measurement devices. It also includes safety features and temperature sensor inputs, ensuring reliable long-term operation.

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The E-881 BIX motion controller is a modular piezo motion controller suitable for embedded device applications. It supports flexible connections via Ethernet/USB. It is compatible with various development environments such as Python, C++, and LabVIEW, allowing for smooth system development. Despite its high performance, its compact housing achieves both space-saving and high-performance control, supporting improved efficiency in device development.

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The "B-421 BIX" is compact, with a width of 25mm and a thickness of 11mm, achieving a maximum travel distance of 33mm. Thanks to its piezo inertia drive, it demonstrates relatively high holding force, high resolution, and position repeatability. It can also be easily combined in multi-axis configurations, enabling nanometer-scale motion while addressing space constraints in equipment design.

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The A-143 PIglide is a compact linear air bearing stage with a travel range of 25 mm. Its non-contact structure eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms. It boasts a minimum increment of 0.025 µm, position accuracy of ±0.2 µm, and straightness of ±0.05 µm, providing nanometer-level precision, making it ideal for staging in measurement, inspection, and optical equipment. It features a built-in linear motor and a 32-bit BiSS-C encoder, enabling high-performance motion with a maximum speed of 390 mm/s and acceleration of 10 m/s².

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The PIglide A-121 is a linear stage that combines magnetic direct drive and air bearing technology. It achieves zero friction and backlash, with excellent straightness (up to ±50nm) and repeatability (up to ±10nm). Its non-contact structure ensures a long lifespan with minimal maintenance. It supports a maximum travel distance of 500mm and a maximum speed of 500mm/s. This configuration is ideal for semiconductor inspection equipment and precision measurement devices that require high-precision positioning and speed control.

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The C-891 is a high-performance motion controller specifically designed for PI's PIMag® linear motors. With a maximum control frequency of 20 kHz and an output of 5 A, it enables high-speed and high-precision positioning. Safety features are also ensured with limit switches and protection against temperature and overcurrent. In addition to USB and RS-232, it is equipped with analog inputs and TTL I/O, making it easy to integrate with external sensors. Compact yet highly functional, it excels in various settings such as research and development and production environments.

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It is a high-performance motion controller that precisely controls the operation of voice coil actuators. Equipped with a servo control cycle of up to 20kHz and PID control, it achieves fine positioning and speed control. It provides a maximum output current of 5A and operates within a range of 24 to 48V. It supports a variety of interfaces (TCP/IP, USB) and can be controlled using common programming environments such as LabVIEW, MATLAB, and Python. Additionally, it features an auto-zero function with automatic adjustment capabilities and a built-in data recorder function, making it easy to record operational data. Its compact and lightweight design makes it ideal for integration into OEM equipment and for research and development purposes.

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The Direct Drive High-Precision Rotary Stage V-62x is a frictionless torque motor-driven stage equipped with a high-resolution encoder. It achieves excellent rotational accuracy (eccentricity and flatness <1 µm) and minimal tilt error (±20 µrad), making it ideal for applications that require advanced alignment and rotational control. The platform diameter ranges from 85 mm to 210 mm and supports installation in any orientation. It can be utilized in a wide range of fields, including optics, semiconductors, and biomedical applications.

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The V-P01 is an XY stage that boasts high precision and high stability driven by a linear motor. It can handle loads of up to 100N and achieves high-speed and high-acceleration movement. With a position accuracy of ±1µm and a minimum incremental motion of 0.1µm, it is suitable for AOI automatic optical inspection and scanning applications.

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The V-Z03 achieves high-speed and high-precision Z-axis control through a direct drive system using a voice coil motor. With a high-rigidity cross roller guide and linear encoder, it enables fine movements with a minimum of 0.035µm. It supports a maximum load of 150N and is equipped with a self-locking function and pneumatic counterbalance. It demonstrates excellent performance in demanding fields such as semiconductor manufacturing and precision measurement.

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High-precision linear stage for industrial automation. The V-D07 high-load linear motor stage is a high-performance platform ideal for industrial automation, laser processing, and precision inspection equipment. With direct drive using iron core linear motors, it achieves frictionless high-speed and high-acceleration operation. It boasts a maximum travel speed of 3000 mm/s and a load capacity of 1000 N, enabling positioning in nanometer units thanks to a high-precision linear encoder. It offers a new option for the manufacturing industry that demands precise operation in high-load environments.

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PICMAWalk for Walking Drive - Plug and play with PI's unique controller technology - Interfaces: TCP/IP, USB, RS-232, SPI - Waveform generation function - Data recorder

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- Travel range: 25mm and 50mm types - 75 N active force - 3 nm minimum incremental motion - Self-locking when power is off - Multi-axis setup compatible: XY, XZ, XYZ - Vacuum compatible

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PI's Hexapod 6-axis stage has been uniquely developed and produced in-house for over 40 years, just like our piezo stages, and it is a market leader in hexapods as well as in piezo positioning products. <Features of the Hexapod> - Easy to set the rotation center at any position - No cumulative error due to parallel drive - Compact, high rigidity, and high stability - Can be installed in any orientation, etc. *For product details, please refer to our catalog or company website. We also have videos of the hexapod available.

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PI's hexapod 6-axis stage has been uniquely developed and produced in-house for over 40 years, just like our piezo stages, and it is a market leader in hexapods as well as in piezo positioning products. <Features of the Hexapod> - Easy to set the rotation center at any position - No cumulative error due to parallel drive - Compact, high rigidity, and high stability - Can be installed in any orientation, etc. *For product details, please refer to our catalog or website. We also have videos of the hexapod available.

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PGW Corporation (hereinafter referred to as PGW) was established in 1997 as a manufacturer specializing in stone processing, using granite for stone plates and jigs. We possess extremely high stone polishing technology and manufacture bases, plates, jigs, and other products primarily for the FPD industry, which requires large and high-precision granite. In addition, we design and develop high-precision unit devices that combine stages, linear motors, guides, encoders, and other components based on granite to meet our customers' specifications. In 2021, we became a member of PI Japan, Inc., a market leader in ultra-precision positioning products using piezo technology. We will be able to provide even more solutions for device design, development, and manufacturing requested by customers from PI (Physik Instrumente) subsidiaries in Asia, as well as within Japan. *For more details, please download the PDF or contact us.

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A hexapod with 6 degrees of freedom, featuring a parallel kinematic design that is more compact and rigid than a single-axis kinematic system. It offers a large dynamic range, operates without cables, and provides high reliability. Additionally, it allows for user-defined pivot point settings via software. Main body dimensions: ultra-compact design of φ136×115mm, direct drive type using brushless DC motors (BLDC) and long-life ball screws. A vacuum-compatible version (10^-6 hPa) is also available for use in optical alignment, automation, quality assurance testing, and testing equipment. 【Features】 ■ Minimum hexapod (vacuum option available) ■ Travel range: 34mm / 42° ■ Load capacity: 5kg ■ Actuator resolution: 40nm ■ Minimum incremental motion: 0.2μm ■ Reproducibility: ±0.1μm ■ Includes scanning algorithm for fiber optical alignment ■ Arbitrary setting of pivot point (rotation center) is possible *For more details, please download the PDF or contact us.

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【Linear Stage Using DC Motors and Stepper Motors】 ■Travel Range: 5–25mm ■Minimum Movement: 0.2µm ■Load Capacity: 30N ■Size: 60×62×20mm～ ■Can be set up on XY or XYZ axes, and compatible with vacuum (10^-6hPa) 【Compact Linear Stage, Multi-purpose】 ■A compact-sized linear stage with belt drive that is stacked ■Opening diameter is 10 mm ■XY setup can be directly mounted without an adapter plate 【Position Measurement】 ■Another type equipped with a DC gear motor: features a rotary encoder on the motor shaft ■Non-contact Hall effect reference point switch and limit switch 【Drive】 ■2-phase stepper motor or closed-loop DC gear motor ■Lead screw or ball screw with backlash compensation *For more details, please download the PDF or contact us.

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The V-817, which combines the PI Mag(R) linear motor and direct encoder, achieves non-contact drive to reduce dust generation and ensures long-term stability. It supports a maximum load of 600 N and achieves positioning repeatability at the 2 µm level. There are four types of travel lengths available: 204, 407, 610, and 813 mm, and it can be quickly systematized with a wide range of accessories, including drag chains and M6 mounting plates with dimensions of 75 to 150 mm square. It supports a wide range of industrial applications, including assembly of sensors and cameras, precision inspection and measurement, wafer processing and inspection, and laser processing. *For more details, please download the PDF or contact us.

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In optical equipment adjustment work, high-precision positioning and stable operation are required. Particularly in the alignment of optical components such as lenses and mirrors, even slight positional deviations can lead to misalignment of the optical axis or focus errors, which can significantly impact the final performance of the device. The multi-axis motion system X-417 is an integrated motion platform based on a high-load linear stage XY positioning system. It allows for the selection of either a servo motor + ball screw stage or a linear motor stage, and flexible configurations such as the addition of a Z-axis can be made according to application needs. With high-precision positioning performance and stable operation, it supports the precise adjustment of optical components and the assembly process of optical systems. 【Application Scenarios】 - Position adjustment of lenses and mirrors - Assembly of optical systems - Precision inspection 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Reduction of work time - Increased yield

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In experimental research and development, high-precision positioning and stable motion control are required. Particularly in experiments that require fine adjustments and high repeatability, the performance of the motion system significantly impacts the experimental results and reproducibility. The multi-axis motion system X-417 is an integrated motion platform based on a high-load linear stage XY positioning system, allowing for flexible selection of axis configurations according to application needs. It can be equipped with either a servo motor + ball screw stage or a linear motor stage, and it supports flexible system configurations such as the addition of a Z-axis. With high-precision positioning performance and stable control, it supports the construction of experimental devices and testing systems in research and development. 【Application Scenarios】 - Laser processing experiments - Ultrafast pulse laser processing - Testing and evaluation devices - Precision inspection - Research on electronic device manufacturing processes 【Benefits of Implementation】 - Improved reproducibility of experiments through high-precision positioning - Increased design flexibility of devices due to flexible axis configurations - Easier system integration with EtherCAT(R) compatible controllers - Enhanced safety with Z-axis holding brake support

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In the field of electronic device assembly, the precise placement and assembly of electronic components significantly influence the quality and reliability of products. This is especially true for electronic devices that are becoming smaller and more densely packed, where high-precision positioning is essential. Misalignment can lead to circuit shorts or disconnections, potentially causing defects. The multi-axis motion system X-417 is an integrated motion platform based on a high-load linear stage XY positioning system. It allows for the selection of either a servo motor + ball screw stage or a linear motor stage, enabling flexible system configurations such as the addition of a Z-axis depending on the application. Furthermore, the ACS-based G-901 controller integrates motion control, I/O, and safety functions. The EtherCAT(R) connection facilitates smooth collaboration with the device PLC. 【Application Scenarios】 - Assembly of electronic components - Placement of components on circuit boards - Electronic component inspection equipment 【Benefits of Implementation】 - Improved assembly quality through high-precision positioning - Collaboration with device PLC via EtherCAT(R) connection - Increased design flexibility of devices through a flexible axis configuration

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■Performance 1: Servo motor and ball screw stage configuration ■Performance 2: High precision, servo motor and ball screw drive stage configuration ■Performance 3: High speed and high precision, linear motor stage configuration The Z-axis is supported with a type that includes a holding brake. The ACS-based G-901 controller integrates motion, I/O, and safety functions, completing the EtherCAT(R) connection with the device PLC immediately. Ideal for laser processing, ultra-short pulse laser processing, testing and precision inspection, and electronic device manufacturing. *For more details, please download the PDF or contact us.

• Linear motor
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• Cartesian Robot

In the fields of optical systems and precision measurement, sub-micron level alignment and six degrees of freedom control significantly impact device performance and measurement accuracy. Particularly in laser optical systems, interferometers, and photonics evaluation devices, a high-rigidity and high-resolution alignment mechanism is required. The H-840.G2IHP hexapod features high rigidity and dynamics due to its parallel kinematics structure, achieving six degrees of freedom positioning with nanometer resolution. Its compact design also makes it suitable for integration into optical benches and inspection devices. 【Application Scenarios】 - High-precision alignment of optical systems - Position adjustment of laser optical systems - Interferometers and precision measurement devices - Evaluation of photonics devices 【Benefits of Implementation】 - Efficient alignment through simultaneous control of six degrees of freedom - Precise positioning with nanometer resolution - Stable measurement environment due to high-rigidity structure - Easy integration into optical devices

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In the field of life sciences, advanced imaging and analysis require precise three-dimensional positioning and stable alignment of samples, which significantly impact the reproducibility of acquired data and the accuracy of analyses. Particularly in cutting-edge bioimaging devices such as multiphoton microscopes and light sheet microscopes, precise control in six degrees of freedom is essential. The H-840.G2IHP hexapod adopts a high-rigidity design based on parallel kinematics, achieving six degrees of freedom positioning with nanometer resolution. Its high-speed response capability allows for complex alignment operations and 3D position adjustments. It is also suitable for research applications and integration into advanced bioanalysis devices. 【Use Cases】 - Sample positioning in multiphoton microscopy - 3D alignment in light sheet microscopy - High-precision adjustments for bioimaging devices - Six degrees of freedom positioning for biological samples 【Benefits of Implementation】 - High-precision positioning with nanometer resolution - Flexible alignment through simultaneous control of six degrees of freedom - Stable observation environment due to high-rigidity structure - Easy integration into complex optical systems

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We have been providing hexapod stages for over 20 years, and based on customer feedback, we have released a hexapod with enhanced drive precision! It enables step movements of 40 nm on the XY axis and 20 nm on the Z axis. It can meet the highest demands for alignment and positioning applications in production and measurement technologies. <Specifications> - Drive Axes: 6 axes - Travel Range: XY = ±50mm, Z = ±25mm, θxθy = ±15 degrees, θz = ±30 degrees - Minimum Movement: XY = 40nm, Z = 20nm, θxθy = 0.2µrad, θz = 0.4µrad - Maximum Speed: 2.5mm/second, 30mrad/second - Load Capacity: 40Kg (horizontal) - Arbitrary rotation center setting For more details, please contact us or refer to the catalog.

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Rectangular bed-shaped hexapod design. The PI multi-axis motion and positioning solution hexapod (derived from the Greek word for six legs) is a motion platform controlled by six actuators (supports). They all operate simultaneously on a single platform, enabling movement in six degrees of freedom.

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We would like to introduce a case study that applies products handled by PI Japan Co., Ltd. The 50 antennas at the ALMA Observatory use our "high-precision hexapod." Under the harsh environmental conditions of the Atacama Desert, it was adopted to precisely align the sub-reflector of the radio telescope. It is suitable for extreme environmental conditions, including low pressure, temperature differences of up to 50 degrees, strong winds, dust, rain, and an altitude of 5,000 meters. It can adjust the position of the sub-reflector with high precision down to a few millimeters. [Case Study] <50 Hexapod Systems for ALMA Telescope Array> ■ Uses high-precision hexapod ■ Adopted to precisely align the sub-reflector of the radio telescope under the harsh environmental conditions of the Atacama Desert ■ Positioning possible with sub-micron arc-second resolution ■ Developed a high-stiffness and robust joint for the hexapod for ALMA to withstand harsh environmental conditions *For more details, please refer to the PDF document or feel free to contact us.

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In the field of biotechnology, particularly in microscopic observation and deep tissue imaging, it is important to position the target area with high precision along the Z-axis and optimize the focus. The V-308 Voice Coil PIFOC is a high-precision focus stage that allows for fine adjustments of the objective lens or sample position in minimum steps of 10 nm. With an adjustment range of up to 7 mm and high-rigidity guides, it provides stable nano-positioning even under various observation conditions, including long working distance lenses. Additionally, it features built-in weight compensation for loads of up to 1 kg, accommodating heavy optical systems such as objective lenses and adapters. 【Application Scenes】 - Focus adjustment using high-magnification microscopes - Z-direction scanning for multiphoton fluorescence and deep tissue imaging - High-speed autofocus in automated microscope systems 【Benefits of Implementation】 - Acquisition of high-resolution images through nano-level focus control - Improved stability and reproducibility due to high-rigidity structure - Reduction of the impact of objective lens weight through gravity compensation

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In the semiconductor manufacturing field, with the advancement of miniaturization, high-precision position control in the Z-axis direction during inspection, measurement, and exposure processes is becoming increasingly important. Even slight variations in focal position can impact inspection accuracy and process stability. The V-308 Voice Coil PIFOC is a Z-axis focus drive with a minimum resolution of 10 nm and a maximum travel range of 7 mm. Its gravity compensation feature supports stable positioning even for heavy optical systems and objective lenses, with a capacity of up to 1 kg. The direct drive system provides smooth and fast responsiveness along with high reproducibility, supporting precise focus control in semiconductor manufacturing equipment. 【Application Scenarios】 - Autofocus control for wafer inspection equipment - Z-axis positioning for optical measurement devices - Focus correction for mask inspection equipment - Fine pattern inspection processes 【Benefits of Implementation】 - Improved inspection accuracy through nano-level focus control - Stable holding of optical systems due to weight compensation features - Enhanced inspection throughput due to fast response - Improved process stability

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In the field of laser processing, precise control of the focal position greatly influences processing quality. Particularly in fine processing and high-precision marking, even slight focal variations in the Z-axis can affect processing width and energy density. The V-308 Voice Coil PIFOC is a Z-axis focus drive with a minimum resolution of 10 nm and a maximum travel range of 7 mm. Its direct drive system enables smooth and fast response, supporting precise focus control for laser processing heads and optical systems. Additionally, it can accommodate heavy optical modules with a gravity compensation function of up to 1 kg. 【Application Scenarios】 - Focus control for laser marking devices - Z-axis positioning for laser fine processing equipment - Focus correction for galvanometer scanner optical systems - Laser processing systems for research and development 【Benefits of Implementation】 - Stabilization of processing quality through improved focus control accuracy - Optimization of processing processes due to high-speed response - Stable optical system control through weight compensation function - Enhanced reproducibility in fine processing

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In the field of optical microscopy, precise focus adjustment is essential for clearly capturing the fine structures of the observation target. Particularly in high-magnification observations and multiphoton/deep tissue imaging, optimizing the focal position at the nanoscale greatly influences the quality of the observation. If the precision of focus adjustment is low, the observed image may become blurred, making accurate data acquisition difficult. The V-308 optimizes the focal position of the optical system at the nanoscale with a minimum increment of 10 nm and an adjustable stroke of 7 mm, providing clear observation images. 【Usage Scenarios】 - Observation of fine structures with optical microscopes - Multiphoton and deep tissue imaging - Use of large-diameter lenses and long working distance lenses 【Benefits of Implementation】 - Achieving clear observation images through accurate focus adjustment at the nanoscale - Improved reliability of observation data - Enhanced experimental efficiency

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The V-308 is a Z-axis focus stage that combines voice coil direct drive and cross roller guides. With a minimum increment of 10 nm and an adjustable stroke of 7 mm, it allows for optimization of the focal position of optical systems at the nanometer level. It provides high reliability for multiphoton and deep tissue imaging using large-diameter lenses or long working distance lenses. The high rigidity structure of the cross roller guide and the 10 nm resolution encoder ensure smooth nanopositioning across the entire 7 mm range. For more details, please download the PDF or contact us.

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In the field of nanotechnology, high-resolution and stable focus position control is required for the observation and evaluation of nanoscale structures. The P-725.xCDE2 PIFOC is a focus scanner for objective lenses that features a maximum travel range of 800 µm (depending on the model) and sub-nanometer resolution (when used with the appropriate controller). It achieves smooth Z-axis motion without friction or backlash through a piezo actuator and flexure guide mechanism. It is suitable for focus adjustment and Z-scan applications at the nanoscale in microscopy systems. 【Application Scenarios】 - Z-scanning in confocal microscopy - Focus position control in multiphoton microscopy - Height adjustment in semiconductor wafer inspection - Precise focus control during the observation of nanostructures 【Benefits of Implementation】 - Sub-nanometer resolution focus position control - High reproducibility motion without backlash - Wide Z travel range of up to 800 µm (depending on the model) - Flexure guide structure with no wear parts

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In the field of biotechnology, precise focus control is essential for high-resolution observation of the fine structures of cells and tissues in microscopic imaging applications. This is particularly true for 3D imaging techniques such as confocal microscopy and multiphoton microscopy, where high resolution and fast responsiveness along the Z-axis (focus direction) directly impact observation accuracy. The P-725.xCDE2 PIFOC Focus Scanner employs a flexure guide mechanism with PICMA piezo actuators and capacitive sensors to achieve precise focus control with sub-nanometer resolution. It also supports a maximum stroke of 800 µm, enabling fast and high-precision scanning over a wide range in the depth direction. These characteristics help reduce observation time while minimizing focus position shifts, ultimately contributing to improved reliability and efficiency of experiments. 【Application Scenes】 - Confocal microscopy - Multiphoton microscopy - 3D imaging - Live cell imaging - High-throughput microscopy screening 【Benefits of Implementation】 - High-precision Z-direction focus control - Expanded range of focus stroke - Improved observation efficiency through fast scanning - Stable imaging quality

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In the field of optical measurement, the focus accuracy and stability of the detection position are directly linked to the precision of the results in optical imaging and precise measurement. Applications that require evaluation of fine structures or high-speed data acquisition demand high-resolution focus control and responsive operational performance. The P-725.xCDE2 PIFOC focus scanner achieves sub-nanometer resolution position control with a maximum stroke of 800 µm. Equipped with PICMA piezo actuators and high-precision capacitive sensors in a flexure guide mechanism, it provides high linearity and reproducibility in Z-direction focus adjustment for optical measurement devices. This helps to minimize the impact of focus position shifts in optical measurements, contributing to improved measurement accuracy and device yield. 【Use Cases】 - High-precision measurements with confocal microscopy - High-speed Z-scanning in multiphoton microscopy - High-resolution imaging evaluation devices - Optical interferometers and phase measurement devices 【Benefits of Implementation】 - Sub-nanometer resolution focus control - Wide measurement range with a maximum stroke of 800 µm - Reduced inspection and measurement time due to high-speed response - Long-term stability through PIFOC/flexure structure

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In semiconductor inspection equipment, high-resolution Z-axis position control and rapid step motion are required for detecting fine defects and evaluating 3D focus. The P-725.xCDE2 PIFOC focus scanner is a high-precision actuator that achieves sub-nanometer resolution with a maximum focus range of 800 µm. By combining the PICMA piezo actuator with a flexure guide mechanism that incorporates capacitive sensors, high linearity, reproducibility, and stability are realized. This enables high-precision control of Z focus and high-speed scanning in semiconductor inspection, contributing to improved accuracy in the inspection process and enhanced throughput of the equipment. [Application Scenarios] - Z focus control for wafer surface defect inspection - High-resolution imaging in chip and package inspection - High-speed Z scanning in optical and laser-based inspection equipment - Defect analysis using optical inspection and confocal optical microscopy [Benefits of Implementation] - Improved measurement accuracy through high-precision focus control - Enhanced inspection throughput due to rapid Z step motion - Increased reliability of the equipment with stable long-term operation

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The P-725.xCDE2 is a focus scanner for objective lenses that employs a flexure guide structure and PICMA® piezo technology. The capacitive sensor achieves sub-nanometer resolution and 0.02% linearity, maintaining high precision even with long strokes of 100 / 400 / 800 µm. With zero wear parts and no need for lubrication, it offers a long lifespan. It contributes to the acceleration of Z-step in confocal and multiphoton microscopy as well as semiconductor inspection. *For more details, please download the PDF or contact us.

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In optical communication and optical systems, the precise control and stability of light beams are crucial factors that influence system performance. In particular, even slight misalignments or fluctuations in the beam can lead to signal attenuation and increased noise, potentially affecting communication quality and measurement accuracy. The V-931 is a voice coil-driven tip/tilt mirror stage capable of driving large angles of up to 8°. It allows for high-precision and high-speed control of the light beam's angle, enabling beam deflection and stabilization in optical systems. [Application Scenarios] - Beam adjustment in optical communication systems - Optical fiber alignment - Optical fiber sensor systems [Benefits of Implementation] - Improved communication quality through beam stabilization - Enhanced alignment efficiency through high-precision positioning - Increased system reliability

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• Optical Experimental Parts

In laser processing, precise beam control is a crucial factor that influences processing accuracy and production efficiency. Especially in fine processing and high-precision cutting and welding, accurate positioning and stable control of the laser beam are essential. Even slight deviations or fluctuations in the beam can lead to a decline in processing quality and a deterioration in yield. This product is a voice coil-driven tip/tilt mirror stage capable of large-angle drive up to 8°. It enables high-precision and high-speed control of the laser beam's angle, achieving stable beam operation. [Application Scenarios] - Angle adjustment of the beam in laser processing - Laser applications requiring precise positioning - Laser systems requiring laser beam stabilization [Benefits of Implementation] - Realization of high-precision laser processing - Improvement in processing quality - Enhancement of yield

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* Beam deflection angle: maximum 8° * Two orthogonal chip/tilt axes with a common rotation center * Identical motion characteristics of both axes through parallel kinematics * Compact design * High durability and frictionless operation due to flexure * Position measurement using linear encoders Tip/tilt operating range: ± 35 (± 2°) mrad Minimum movement amount: < 1 μrad Reproducibility: < 2 μrad Reference accuracy: ≤ 50 μrad Linearity: < 0.2 % Step response: < 20 ms (depending on load, etc.) Maximum mirror diameter: 1 inch Maximum load: 20g As this is for OEM supply, please consult us for customization options for multiple units to several hundred units.

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• Optical Experimental Parts

The air bearing rotation stage is not affected by friction or component precision from conventional mechanical guides due to its air levitation guide. As a result, there is no stick-slip or frictional heat, allowing for high-speed operation and enabling very high-precision positioning due to its high flatness and minimal eccentricity. ● For more details, please contact us or refer to the catalog.

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