PI Japan Product Lineup

The V-308 is a Z-axis focus stage that combines voice coil direct drive and cross roller guides. With a minimum increment of 10 nm and an adjustable stroke of 7 mm, it allows for optimization of the focal position of optical systems at the nanometer level. It provides high reliability for multiphoton and deep tissue imaging using large-diameter lenses or long working distance lenses. The high rigidity structure of the cross roller guide and the 10 nm resolution encoder ensure smooth nanopositioning across the entire 7 mm range. For more details, please download the PDF or contact us.

• Other machine elements
• Actuator
• Solenoid Actuators

In the field of nanotechnology, high-resolution and stable focus position control is required for the observation and evaluation of nanoscale structures. The P-725.xCDE2 PIFOC is a focus scanner for objective lenses that features a maximum travel range of 800 µm (depending on the model) and sub-nanometer resolution (when used with the appropriate controller). It achieves smooth Z-axis motion without friction or backlash through a piezo actuator and flexure guide mechanism. It is suitable for focus adjustment and Z-scan applications at the nanoscale in microscopy systems. 【Application Scenarios】 - Z-scanning in confocal microscopy - Focus position control in multiphoton microscopy - Height adjustment in semiconductor wafer inspection - Precise focus control during the observation of nanostructures 【Benefits of Implementation】 - Sub-nanometer resolution focus position control - High reproducibility motion without backlash - Wide Z travel range of up to 800 µm (depending on the model) - Flexure guide structure with no wear parts

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• Actuator
• Piezoelectric Devices

In the field of biotechnology, precise focus control is essential for high-resolution observation of the fine structures of cells and tissues in microscopic imaging applications. This is particularly true for 3D imaging techniques such as confocal microscopy and multiphoton microscopy, where high resolution and fast responsiveness along the Z-axis (focus direction) directly impact observation accuracy. The P-725.xCDE2 PIFOC Focus Scanner employs a flexure guide mechanism with PICMA piezo actuators and capacitive sensors to achieve precise focus control with sub-nanometer resolution. It also supports a maximum stroke of 800 µm, enabling fast and high-precision scanning over a wide range in the depth direction. These characteristics help reduce observation time while minimizing focus position shifts, ultimately contributing to improved reliability and efficiency of experiments. 【Application Scenes】 - Confocal microscopy - Multiphoton microscopy - 3D imaging - Live cell imaging - High-throughput microscopy screening 【Benefits of Implementation】 - High-precision Z-direction focus control - Expanded range of focus stroke - Improved observation efficiency through fast scanning - Stable imaging quality

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• Actuator
• Piezoelectric Devices

In the field of optical measurement, the focus accuracy and stability of the detection position are directly linked to the precision of the results in optical imaging and precise measurement. Applications that require evaluation of fine structures or high-speed data acquisition demand high-resolution focus control and responsive operational performance. The P-725.xCDE2 PIFOC focus scanner achieves sub-nanometer resolution position control with a maximum stroke of 800 µm. Equipped with PICMA piezo actuators and high-precision capacitive sensors in a flexure guide mechanism, it provides high linearity and reproducibility in Z-direction focus adjustment for optical measurement devices. This helps to minimize the impact of focus position shifts in optical measurements, contributing to improved measurement accuracy and device yield. 【Use Cases】 - High-precision measurements with confocal microscopy - High-speed Z-scanning in multiphoton microscopy - High-resolution imaging evaluation devices - Optical interferometers and phase measurement devices 【Benefits of Implementation】 - Sub-nanometer resolution focus control - Wide measurement range with a maximum stroke of 800 µm - Reduced inspection and measurement time due to high-speed response - Long-term stability through PIFOC/flexure structure

• Other machine elements
• Actuator
• Piezoelectric Devices

In semiconductor inspection equipment, high-resolution Z-axis position control and rapid step motion are required for detecting fine defects and evaluating 3D focus. The P-725.xCDE2 PIFOC focus scanner is a high-precision actuator that achieves sub-nanometer resolution with a maximum focus range of 800 µm. By combining the PICMA piezo actuator with a flexure guide mechanism that incorporates capacitive sensors, high linearity, reproducibility, and stability are realized. This enables high-precision control of Z focus and high-speed scanning in semiconductor inspection, contributing to improved accuracy in the inspection process and enhanced throughput of the equipment. [Application Scenarios] - Z focus control for wafer surface defect inspection - High-resolution imaging in chip and package inspection - High-speed Z scanning in optical and laser-based inspection equipment - Defect analysis using optical inspection and confocal optical microscopy [Benefits of Implementation] - Improved measurement accuracy through high-precision focus control - Enhanced inspection throughput due to rapid Z step motion - Increased reliability of the equipment with stable long-term operation

• Other machine elements
• Actuator
• Piezoelectric Devices

The P-725.xCDE2 is a focus scanner for objective lenses that employs a flexure guide structure and PICMA® piezo technology. The capacitive sensor achieves sub-nanometer resolution and 0.02% linearity, maintaining high precision even with long strokes of 100 / 400 / 800 µm. With zero wear parts and no need for lubrication, it offers a long lifespan. It contributes to the acceleration of Z-step in confocal and multiphoton microscopy as well as semiconductor inspection. *For more details, please download the PDF or contact us.

• Other machine elements
• Actuator
• Piezoelectric Devices

* Beam deflection angle: maximum 8° * Two orthogonal chip/tilt axes with a common rotation center * Identical motion characteristics of both axes through parallel kinematics * Compact design * High durability and frictionless operation due to flexure * Position measurement using linear encoders Tip/tilt operating range: ± 35 (± 2°) mrad Minimum movement amount: < 1 μrad Reproducibility: < 2 μrad Reference accuracy: ≤ 50 μrad Linearity: < 0.2 % Step response: < 20 ms (depending on load, etc.) Maximum mirror diameter: 1 inch Maximum load: 20g As this is for OEM supply, please consult us for customization options for multiple units to several hundred units.

• Actuator
• Solenoid Actuators
• Optical Experimental Parts

The air bearing rotation stage is not affected by friction or component precision from conventional mechanical guides due to its air levitation guide. As a result, there is no stick-slip or frictional heat, allowing for high-speed operation and enabling very high-precision positioning due to its high flatness and minimal eccentricity. ● For more details, please contact us or refer to the catalog.

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The air bearing rotary stage is not affected by friction or component precision due to conventional mechanical guides, thanks to its air levitation guide. As a result, there is no stick-slip or frictional heat, allowing for high-speed operation and enabling extremely high-precision positioning due to its high flatness and minimal eccentricity. - Wide opening: 260mm, thickness: 113mm, slim type - Incremental or absolute encoder For more details, please contact us or refer to the catalog.

• Actuator
• Other industrial robots
• encoder

PI is expanding its air bearing positioning products! We have released the "A-523 model: Air Bearing Z-axis, Chip/Tilt 3-axis drive stage" designed with a parallel kinematic approach. Achieving ultra-high precision positioning in a slim design A motion platform with no friction Offering the best performance, quality, and lifespan 【Features】 - Travel range: Z-axis ±2.5 mm, θX, θY axes ±1° - Load capacity: 8 kg - Platform: Diameter 250 mm - Height: 60 mm *For more details, please download the PDF or contact us.

• Other machine elements

In the electronic components industry, high positioning accuracy and fast scanning operations are required for board and component inspections. Particularly in the inspection of miniaturized electronic components, stable repeatability and smooth operational performance significantly impact inspection quality and processing capacity. The PIglide IS A-311 is a high-precision XY stage that employs non-contact support through air bearings and linear motor drive. By eliminating mechanical wear and stick-slip, it achieves high-speed and smooth scanning operations, contributing to the reduction of inspection time and stabilization of accuracy in board and wafer inspections. [Application Scenes] - Board Inspection - Wafer Inspection / Electronic Component Inspection - Laser Processing / Marking Processes [Benefits of Implementation] - Reduction of inspection time through high-speed scanning - Improvement of inspection accuracy through stable positioning - Increased efficiency and reproducibility of the inspection process

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• Cartesian Robot
• encoder

In the field of optical lens polishing and processing, the shape accuracy and surface quality of the lens significantly influence the final optical performance, necessitating extremely high positioning accuracy and stability. Particularly in the polishing and surface processing stages, even slight vibrations or sliding friction can affect processing accuracy and reproducibility. The PIglide IS A-311 is a high-precision XY stage that employs non-contact support through air bearings and linear motor drive. By eliminating mechanical friction and stick-slip, it achieves smooth and stable planar motion, supporting the high positioning accuracy and repeatability required for optical applications. It contributes to stabilizing processing quality and improving process reproducibility in optical lens polishing processes and precise surface processing and evaluation stages. Additionally, the air bearing structure helps reduce dust generation, making it suitable for use in cleanroom environments. [Application Scenarios] - Lens polishing processes - Situations requiring high-precision surface processing - Use in cleanroom environments [Benefits of Implementation] - Achieves high-precision polishing - Reduces takt time - Improves product quality

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• Cartesian Robot
• encoder

In the semiconductor industry, high-precision inspection is essential for quality control of wafers and improving yield. In particular, the detection of fine defects and foreign substances is a crucial factor that affects product reliability. Traditional inspection methods have limitations in inspection speed and resolution, which can lead to increased takt time and decreased inspection accuracy. The PIglide IS A-311 achieves high-speed and high-precision wafer inspection through a combination of air bearings and linear motors, addressing these challenges. 【Application Scenarios】 - Inspection of foreign substances on wafer surfaces - Measurement of pattern dimensions - Defect detection 【Benefits of Implementation】 - Reduction in inspection time - Improvement in inspection accuracy - Enhancement of yield

• Other machine elements
• Cartesian Robot
• encoder

The PIglide IS A-311 is an air-bearing XY planar scanner that levitates the stage drive surface using air. With a flat structure thinner than stacked types, it achieves a compact device design while operating over a wide scanning range of 300 mm × 400 mm and a sensor resolution of 1 nm. The frictionless linear motor drive contributes to a high-speed response of up to 2 m/s and a load capacity of 147 N, aiding in reducing cycle times for laser processing and semiconductor wafer inspection. Its dust-free structure is suitable for clean rooms, and a rich array of controllers/APIs facilitates the integration of XY synchronization and area scanning. For more details, please download the PDF or contact us.

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• Cartesian Robot
• encoder

In the field of photonics, the angle control and position stability of laser beams greatly influence coupling efficiency and system performance. Particularly in fiber coupling, beam steering, and high-speed correction control, high responsiveness, resolution, and excellent dynamic characteristics are essential. The S-331 is a high-speed Tip/Tilt piezo stage boasting a maximum resonance frequency of 10 kHz. It achieves both high resolution and fast response, enabling real-time beam correction and precise angle control. It contributes to improved focusing efficiency and stable operation in photonics systems. 【Application Scenarios】 - Laser beam steering - High-efficiency coupling to optical fibers - High-speed beam correction control - Optical alignment/stabilization applications 【Benefits of Implementation】 - High-speed and high-precision beam angle control - Improved coupling efficiency and reduced losses - Stabilization through real-time correction - Maximization of photonics device performance

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• Piezoelectric Devices
• Actuator

In the field of optical communication, the angle control precision and response speed of beams in optical fiber coupling and free-space optical communication significantly affect communication quality. Even slight misalignments or vibrations can lead to decreased coupling efficiency and link instability, making a high-speed and high-resolution correction mechanism essential. The S-331 is a two-axis tip/tilt piezo stage with a high resonance frequency of up to 10 kHz and an operating angle of ±5 mrad. Its excellent dynamic performance enables real-time beam correction, supporting the stabilization of optical signals and high-efficiency coupling. It contributes to the high reliability of next-generation optical communication systems. 【Application Scenarios】 - High-precision alignment of optical fibers - Free-space optical communication (FSO) - Laser beam steering - Stabilization control of optical links 【Benefits of Implementation】 - High-speed and high-precision beam angle control - Improved coupling efficiency and reduced losses - Stabilization of communication through real-time correction - Overall performance enhancement of the system

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• Piezoelectric Devices
• Actuator

In laser processing, even slight variations in the angle and position of the beam directly affect processing accuracy and finish quality. This is especially true in fine processing and high-speed scanning processes, where a beam control mechanism that combines high-speed responsiveness and high resolution is essential. The S-331 is a high-speed Tip/Tilt piezo stage equipped with a maximum resonance frequency of 10 kHz and an operating angle of ±5 mrad. Its excellent dynamic performance enables real-time beam correction, reducing focus shift and processing unevenness. It contributes to the establishment of a high-precision and stable laser processing process. 【Application Scenarios】 - High-speed steering of laser beams - Precision processing such as fine drilling and grooving - Real-time beam correction during processing - High-precision alignment control 【Benefits of Implementation】 - Improved processing accuracy and reproducibility - Enhanced processing efficiency due to high-speed responsiveness - Reduced processing unevenness and improved yield - Advancement of equipment performance

• Other industrial robots
• Piezoelectric Devices
• Actuator

2-axis Tip/Tilt platform for high-speed beam steering. With a parallel kinematic design and strain gauge position sensors, it enables feedback control for high-speed and high-precision positioning and dynamic operation. Ideal for applications requiring high dynamics, such as laser beam stabilization, image stabilization, and satellite optical communication. *For more details, please download the PDF or contact us.

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• Piezoelectric Devices
• Actuator

PI is expanding its linear motor products. We have released the "V-857 type" high-precision, long-stroke, and narrow one-axis linear motor stage with a maximum travel distance of 1200mm and a load capacity of 1000N. An XY-axis configuration is also possible. 【Features】 - Load capacity of up to 1000N - Long travel distance (up to 1200mm) with a narrow profile (width 132mm) - Maximum speed of 5 m/s - High-precision incremental or absolute linear encoder - Easy XY installation configuration *For more details, please download the PDF or contact us.

• Linear motor
• Actuator
• Cartesian Robot

The V-855, equipped with a magnetic direct drive, combines a cross roller guide that supports 600N with an ironless three-phase linear motor, achieving vibration-free and smooth high-speed transport. You can choose from three stroke lengths of 200 / 400 / 800 mm, and the absolute encoder model improves operational efficiency by eliminating the need for origin setting. *For more details, please download the PDF or contact us.*

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• Linear motor
• Cartesian Robot

- High precision, maximum 64-channel multi-axis synchronous motion - Advanced and high-speed servo control algorithm - EtherCAT-based universal servo drive design - Trigger function suitable for laser applications

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This optical power meter is capable of converting optical signals into high-resolution and extremely high bandwidth voltage signals. As an alternative to fiber input, external current input is also possible, allowing for the connection of a photodiode to convert diode current. Due to the wide wavelength range of the optical power meter, it can operate in both the visible and infrared areas without switching. This product is ideal for our optical alignment systems using hexapods and piezos. ● For more details, please contact us or refer to the catalog.

• Other optical parts
• Sensors
• Optical Experimental Parts

The E-709.1C1L controller is a piezo-based 1-channel nanopositioning system equipped with capacitive sensors. - Output voltage: -30 to 130 V - Amplifier and sensor optimized for dynamic applications - Digital linearization - Interfaces: USB, SPI, RS-232, 0 to +10 V analog input control *For more details, please download the PDF or contact us.

• controller
• Servo
• Amplifier

In the field of optical communication and photonic device development, high-precision alignment between optical fibers and photonic chips greatly affects connection quality. Even slight misalignments can lead to reduced coupling efficiency and signal loss. The F-713.H Compact High-Speed 6-Degree-of-Freedom Photonic Alignment System achieves efficient automatic alignment through Hexapod-based 6DoF control and high-speed scanning capabilities. It supports multi-channel applications and can be widely utilized from research purposes to mass production process development. Its compact design also makes it suitable for equipment integration and production line incorporation. 【Usage Scenarios】 - Automatic alignment of optical fibers and photonic devices - Coupling evaluation of PICs (Photonic Integrated Circuits) - Silicon photonics development - Assembly and evaluation of optical communication modules 【Benefits of Implementation】 - Acceleration of the alignment process - Stabilization of coupling efficiency - Highly reproducible optical connections - Applicable from research to mass production process development

• Optical Experimental Parts
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• Actuator

In the field of defense optics, the high-precision alignment of optical components is a crucial factor that affects system performance. Particularly in precision optical systems such as lasers and sensors, even minor misalignments can lead to performance degradation or malfunction. Fast and accurate alignment is essential to address these issues and enhance system reliability. Our high-speed, 6-degree-of-freedom photonics alignment system F-713.Hxx meets these challenges. 【Application Scenarios】 - Adjustment of optical sensors - Construction of laser systems - Manufacturing of optical components 【Benefits of Implementation】 - Reduction in alignment time - Enhancement of system performance - Improvement in yield

• Optical Experimental Parts
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• Actuator

In the fields of research and experimentation, the high-precision alignment of photonic devices and optical fibers significantly impacts coupling efficiency and the reproducibility of measurement results. Particularly in evaluations using SiPh wafers and PICs, six degrees of freedom positioning with nanometer resolution and fast scanning operations are required. The F-713 compact high-speed 6-degree-of-freedom photonics alignment system combines hexapod-based 6DoF control with high-speed scanning capabilities to achieve efficient automatic alignment. It also supports multi-channel measurements, allowing for flexible experimental configurations in laboratory environments. Due to its compact design, it is suitable for use on optical tables and integration into existing experimental setups. 【Use Cases】 - Optical coupling evaluation of SiPh wafers and PICs - Alignment experiments for optical fibers and photonic devices - Silicon photonics research - Fine-tuning and optimization of optical systems 【Benefits of Implementation】 - Acceleration of the alignment process - Reduction of experimental time - High reproducibility in optical evaluations - High-precision positioning at the nanometer level

• Optical Experimental Parts
• Other industrial robots
• Actuator

A high-speed, high-precision photonics alignment system that combines a hexapod 6-axis motor stage with an XYZ-axis piezo stage. Optimized scan/alignment routines for SiPh wafers, photonic devices, PICs, and optical fibers, along with powerful array alignment algorithms, enable fast, high-precision, and simultaneous alignment. The hexapod operates with DC servo motor drive across 6 axes, allowing sub-micron positioning. Additionally, it allows for arbitrary setting of the rotation center to accommodate various devices. The XYZ-axis piezo stage enables nano-level positioning and allows for high-speed response and scanning at high resonance frequencies. Comprehensive and deep software support for rapid process development, including support for common languages such as C#, Python, LabVIEW, and MATLAB on Windows and Linux. *For more details, please download the PDF or contact us.*

• Optical Experimental Parts
• Other industrial robots
• Actuator

The L-836 is a high-precision linear stage with a single axis that can be used for precise positioning in industrial and research fields. It features high travel accuracy and load capacity due to its cross roller guide. Depending on the application, ActiveDriveDC servo motors, stepping motors, and DC gear motor types are available. 【Features】 ■ High travel accuracy and load capacity due to cross roller guide ■ Reproducibility of up to 0.1μm ■ ActiveDriveDC servo motors, stepping motors, and DC gear motor types available depending on the application ■ High stability achieved with a distortion-free aluminum base *For more details, please refer to the PDF document or feel free to contact us.

• Actuator
• Cartesian Robot
• encoder

The "L/V-412, L/V-417" is a PIMag high-load linear stage that improves tracking performance due to the high resolution of the encoder. Tracking errors are reduced, and settling time is shortened. For maximum flexibility, you can choose between incremental and absolute encoders. 【Features】 ■ Maximum travel range: 813mm ■ Rated force: 87N ■ Choice of incremental/absolute encoder ■ Can withstand up to 450N due to the use of circulating ball bearings ■ Dust prevention with the use of a cover strap *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor

The V-738 is a PIMag high-precision XY stage featuring a large opening of 150x150mm, equipped with a non-iron three-phase linear motor. The travel range is 102 mm x 102 mm (4 inches). The speed is 500 mm/s. The reference limit switch is optical. 【Features】 ■ Travel range: 102 mm x 102 mm (4 inches) ■ Large opening of 150x150mm ■ Unidirectional repeatability: 0.1μm ■ Speed: 500 mm/s ■ Three-phase linear motor ■ High-resolution incremental linear encoder *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor
• Actuator
• Cartesian Robot

The V-408 is a PIMag linear stage that transmits driving force to the friction platform without using mechanical parts in the drive train, thanks to its three-phase magnetic direct drive. With cross roller guides, it makes contact with reinforced rollers in lines rather than point contact with balls in ball guides. This significantly increases rigidity while minimizing the required preload, reducing friction and enabling smooth operation. The cross roller guides also feature high guiding accuracy and a large load capacity. 【Features】 ■ Iron core three-phase linear motor ■ High load capacity cross roller guide ■ Minimum incremental motion 20nm ■ Bidirectional repeatability ±0.1μm ■ Compact design *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor

The U-723 is a PILine XY stage that maintains the mechanical stability of the stage position through a self-locking drive when powered off. Power consumption and heat generation are significantly reduced. These characteristics are advantageous for applications with a small duty cycle, battery operation, or sensitivity to heat. The position of the axis is measured by an encoder, and a optical reference switch enables reliable and reproducible motion. 【Features】 ■ High-speed positioning in two axes ■ Lightweight and space-saving ■ High guide accuracy ■ Sensor resolution of 10nm ■ Self-locking in standby, no heat generation during standby ■ Low noise operation *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor
• Piezoelectric Devices
• Actuator

The U-651 is a PILine high-speed, slim rotating stage that employs a PILine ultrasonic piezo motor, which acts on a ceramic friction ring to drive the platform. The direct drive system enables miniaturization and slim design of the stage. The built-in incremental encoder provides precise position control with a resolution of up to 4μ rad. 【Features】 - Slim design with a height of only 14mm - Direct position measurement with a maximum resolution of 4μ rad - Maximum speed of 540°/second - Maximum torque of 0.3Nm in both directions of rotation - Opening diameter of 36mm - Vacuum-compatible type (10^-6 Pa) available as an option *For more details, please refer to the PDF document or feel free to contact us.

• Actuator
• Other industrial robots
• encoder

The U-628 is a high-speed, compact rotating stage with no range limitations, equipped with an optical encoder for direct measurement. The reference point switch has a central opening with a diameter of 7mm. It operates directly with a ring-shaped runner using a vibrating piezoelectric actuator from the "PILine ultrasonic piezo motor." The speed is high, and the holding torque is 0.1Nm. 【Features】 ■ Side length: 50mm ■ Built-in position encoder ■ Speeds exceeding 1000°/second ■ No limitations on rotation range ■ Opening diameter: 7mm *For more details, please refer to the PDF document or feel free to contact us.

• Actuator
• Other industrial robots
• encoder

The U-521 is a compact linear stage that allows XY combination without the need for an adapter plate. Thanks to its automatic locking during stationary periods, there is no heat generation or vibration from the servo. A vacuum-compatible version is available. It can be used for applications in research and manufacturing, automation, sample manipulation, and more. 【Features】 ■ Compact size of just 35mm square and 10mm high ■ Maximum speed of 200mm/second ■ Travel range of 18mm ■ Excellent motion/stop dynamics ■ Direct measurement linear encoder *For more details, please refer to the PDF document or feel free to contact us.

• Linear motor
• Actuator
• Piezoelectric Devices

The S-335 Chip/Tilt Piezo Platform is a high-performance stage that achieves both large deflection angles and high dynamic response. It enables high-precision angle control without friction or backlash through piezoelectric elements, and realizes equivalent high performance with a two-axis parallel kinematics design. It is ideal for applications such as microscope scanning, high-speed imaging, and beam steering, supporting stable and high-precision operation. For detailed performance, please refer to the catalog. 【Application Scenes】 - Laser scanning microscopy - High-speed sample scanning and optical imaging - Beam steering/scanning control - Image processing/beam stabilization devices 【Benefits of Implementation】 - Achieves a wide scanning range with ±35 mrad high angle control - Enables high-speed step and settle due to high dynamic performance - High reliability with high-precision angle control without friction or backlash

• Other industrial robots
• Actuator
• Piezoelectric Devices

The resonance frequency of 0.7 kHz (with a 1-inch mirror) enables dynamic movement and fast step & settling. Parallel kinematic design: A two-axis orthogonal platform with a single common pivot point, available without a mirror, with a 1/2-inch mirror, or with a 1-inch mirror type. Ideal for applications requiring high-speed and high-precision deflection, such as image stabilization, laser beam control, and optical communication. *For more details, please download the PDF or contact us.

• Other industrial robots
• Actuator
• Piezoelectric Devices

In high-magnification microscopy, even slight positional shifts can significantly affect the clarity and reproducibility of images. This is especially true for confocal microscopes, fluorescence microscopes, and live cell observations, where precise XYZ control at sub-micron levels is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm on each axis. Its high-stiffness flexure guide structure enables smooth operation without backlash, allowing for fine positioning with nanometer resolution. It also supports Z-axis focus control and XY scanning applications, making it versatile for a wide range of research uses and equipment integration. 【Usage Scenarios】 - Z-axis focus control for confocal microscopes - Multi-point observation with fluorescence microscopes - Live cell imaging - Fine positioning under high-magnification objectives - Observation of nanoscale materials 【Benefits of Implementation】 - High-precision focus control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning operation due to high-stiffness design - Easy integration into existing microscopes with compact design

• Actuator
• Cartesian Robot
• Piezoelectric Devices

In laser microfabrication, even slight deviations in beam position or focus directly affect processing quality. This is especially true for microfabrication and high aspect ratio processing, where precise position control at the sub-micron level is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with 100 µm stroke on each axis. Its high-rigidity flexure guide structure enables backlash-free, highly linear motion, allowing for fine position adjustments with nanometer resolution. By integrating it into laser processing equipment, it supports: - Fine adjustment of beam position - High-precision control of focus position - Correction of processing position to enhance the stability of microfabrication. 【Application Scenarios】 - Integration into laser microfabrication equipment - Precise control of focus position - Position correction for micro-drilling processes - Thin film processing and precision patterning 【Benefits of Implementation】 - High-precision control of focus position with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into equipment with compact design - Stabilization of microfabrication quality

• Actuator
• Cartesian Robot
• Piezoelectric Devices

In the field of nanotechnology, the precision of sample and probe positioning significantly affects the reproducibility of experimental results. Scanning Probe Microscopy (SPM) and nano-lithography applications require stable XYZ control with nanometer resolution. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for high-precision positioning at nanometer resolution. It is utilized as a positioning control platform that supports nanoscale measurement, processing, and evaluation, catering to both research applications and device integration. 【Application Scenarios】 - Scanning Probe Microscopy (SPM/AFM/STM) - Nano-lithography equipment - Nano material evaluation - Nano device research and development - High-precision sample positioning 【Benefits of Implementation】 - High-precision position control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning enabled by high-rigidity design - Compact design facilitates integration into vacuum systems and research equipment

• Actuator
• Cartesian Robot
• Piezoelectric Devices

In optical systems, even slight deviations in beam position or optical axis can significantly affect coupling efficiency and measurement accuracy. This is especially critical in applications such as interferometric measurements, laser focusing, and fiber alignment, where sub-micron positioning control is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm per axis. Its flexure guide structure enables backlash-free, highly linear motion. With nanometer resolution for fine positioning and high mechanical stability, it supports the precise alignment of optical systems with high reproducibility. Designed to accommodate a range of applications from research to device integration, it meets the advanced positioning control needs in the photonics field. 【Application Scenarios】 - Optical fiber alignment (optimization of coupling efficiency) - Fine adjustment of laser focusing positions - Interferometric and holography devices - Microscopy stage fine motion control - Integration into photonics research equipment 【Benefits of Implementation】 - Improved optical axis adjustment accuracy with nanometer resolution - High reproducibility due to backlash-free structure - Drift reduction through high-stiffness flexure design - Easier integration into devices due to compact design

• Actuator
• Cartesian Robot
• Piezoelectric Devices

In semiconductor processes and inspection equipment, position correction and focus adjustment at the submicron level are key to stabilizing quality. Particularly in inspection and fine processing stages, high-precision position control with nanometer resolution is required. The P-616 NanoCube is a compact XYZ piezo nano positioner with a stroke of 100 µm on each axis. Its high-rigidity flexure guide structure enables smooth operation without backlash, allowing for fine position adjustments with nanometer resolution. It is suitable for applications such as fine motion correction stages in semiconductor manufacturing equipment and integration into inspection devices. 【Application Scenarios】 - Fine position correction for wafer inspection equipment - Mask inspection processes - Focus adjustment for laser annealing devices - Fine motion control for probing equipment - Semiconductor research and development applications 【Benefits of Implementation】 - High-precision position correction with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into devices with compact design - Contributes to the stabilization of fine processes

• Actuator
• Cartesian Robot
• Piezoelectric Devices

The P-616 is an XYZ piezo nanopositioner that employs parallel kinematics. It offers a reproducibility of 10 nm and a system reproducibility of 0.4 nm, featuring high-reliability PICMA piezo ceramics, flexure guides, and capacitive sensors built into each axis. It is ideal for fiber positioning and alignment, microscopy, nano positioning, photonics, and micromanipulation. *For more details, please download the PDF or contact us. 【Features】 *For more details, please refer to the PDF materials or feel free to contact us.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

In the optical industry, precise positioning at the nanometer level is required for the adjustment of intricate optical systems. Particularly in situations such as optical axis alignment and lens positioning, where even slight misalignments can significantly impact system performance, high-precision positioning capability is essential. Inaccurate adjustments can lead to image distortion and reduced measurement accuracy. The high-thrust PICMAWalk actuator N-331 achieves positioning with nanometer precision, maximizing the performance of optical systems. 【Application Scenarios】 - Adjustment of objective lenses in optical microscopes - Optical axis alignment in laser processing machines - Wafer positioning in semiconductor manufacturing equipment 【Benefits of Implementation】 - High-precision positioning at the nanometer level - Improved performance of optical systems - Enhanced work efficiency

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

In the semiconductor manufacturing industry, high-precision control in the positioning of wafers and masks is essential due to the advancement of manufacturing processes. Particularly in fine processing and inspection stages, accurate positioning at the nanometer level significantly affects product quality and yield. Low positioning accuracy can lead to the occurrence of defective products and a decrease in manufacturing efficiency. The N-331 PICMAWalk is an embedded linear actuator that combines high thrust of up to 50 N with sub-nanometer resolution. It supports high-speed operation of up to 12 mm/s, contributing to the reduction of takt time in inspection equipment. The friction drive mechanism allows for position holding even when the power is off. Additionally, its vacuum-compatible specifications make it suitable for use in semiconductor inspection equipment and clean environments. 【Application Scenarios】 - Wafer positioning in semiconductor manufacturing equipment - Positioning in mask aligners - High-precision positioning in inspection equipment 【Benefits of Implementation】 - Achieves high-precision positioning at the nanometer level - Contributes to improved quality and yield in manufacturing processes - Usable in vacuum environments For details on thrust characteristics, other specifications, and vacuum-compatible options, please refer to the catalog.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators