Achieving sub-micron precision Z-axis control with high-speed response and high-rigidity guide.
The V-Z03 achieves high-speed and high-precision Z-axis control through a direct drive system using a voice coil motor. With a high-rigidity cross roller guide and linear encoder, it enables fine movements with a minimum of 0.035µm. It supports a maximum load of 150N and is equipped with a self-locking function and pneumatic counterbalance. It demonstrates excellent performance in demanding fields such as semiconductor manufacturing and precision measurement.
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basic information
- Travel range: 5mm - Optical linear encoder - High rigidity, low pitch/yaw - Maximum load: 150N - Equipped with self-locking function *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
- Precision positioning in industrial and research fields - Semiconductor inspection, etc. *For more details, please refer to the catalog or feel free to contact us.
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.