Innovating nano positioning with a holding force of up to 800N and a resolution of 5nm.
The N-216 is a piezo stepping actuator with a maximum holding force of 800N and a resolution of 0.03nm (open loop) / 5nm (closed loop). Thanks to its unique PiezoWalk® technology, it enables high-speed and nano-precision positioning while switching between full-step mode and nano-stepping mode. It is suitable for non-magnetic, clean, and vacuum environments, making it ideal for applications that require fine control, such as semiconductor manufacturing, wafer inspection, and nano-lithography.
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basic information
- Stroke: 20mm - Resolution: 0.03nm (open loop) - 5nm (closed loop) - Maximum holding force: 800N - Automatic lock when stationary - Non-magnetic and vacuum-compatible operating principle - Clean room compatible *For more details, please refer to the catalog or feel free to contact us.*
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Applications/Examples of results
- Semiconductor manufacturing - Semiconductor testing - Wafer inspection - Nano lithography - Nano imprinting - Nano measurement - Active vibration damping - Operation in a strong magnetic field *For more details, please refer to the catalog or feel free to contact us.*
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.