Achieves sub-micron level precision Z-axis control with high-speed response and high rigidity.
In experiments in the field of research and development, precise positioning and stable operation are essential. Particularly in the observation of fine structures and precision machining, accurate control in the Z-axis direction determines the success or failure of the experiment. Conventional stages have issues with positioning accuracy and response speed, which have been factors that reduce the efficiency of experiments. The V-Z03 adopts a direct drive system using a voice coil motor, achieving high-speed and high-precision Z-axis control. 【Application Scenarios】 - Precision positioning in industrial and research fields - Semiconductor inspection 【Benefits of Implementation】 - Precise positioning at the sub-micron level - Reduction in experiment time - Improvement in experimental accuracy - Adaptability to diverse experiments
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【Features】 - Travel range: 5mm - Optical linear encoder - High rigidity, low pitch/yaw - Maximum load: 150N - Equipped with self-locking function 【Our Strengths】 Based on precision control technology cultivated over more than 50 years at our headquarters in Germany, we provide piezo stages and actuators adopted by research institutions and equipment manufacturers worldwide. With a rich lineup and technical expertise, we offer optimal solutions tailored to our customers' needs.
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- Precision positioning in industrial and research fields - Semiconductor inspection, etc. *For more details, please refer to the catalog or feel free to contact us.
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The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.



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