A positioning stage with excellent position resolution, reproducibility, and retention due to feedback control with 10nm resolution.
This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It performs feedback control based on the encoder's position information, offering high resolution, high positional reproducibility, and high positional stability. When used in combination with the feedback stage controller FC-511, it operates with a resolution of 10nm over a stroke of 20mm.
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basic information
Minimum resolution: 10nm Maximum moving speed: 10mm/sec (when using FC-514) Stroke: 20mm Compatible controller: FC-511 ■For details, please request materials or download the catalog■
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Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical areas of use include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.