【Lifting Stage】A positioning stage with built-in linear encoder that offers high resolution of 10nm, excellent positioning repeatability, and strong position retention after positioning.
This is a high-resolution positioning stage for the Z-axis equipped with an optical linear encoder. It achieves a resolution of "10nm" with a stroke of "5mm" or "10mm." Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis applications. With our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. (*1) In combination with the feedback stage controller FC-511.
Inquire About This Product
basic information
Minimum resolution: 10nm Maximum moving speed: 5mm/sec (when using FC-511) Stroke: 5mm or 10mm Compatible controller: FC-511 ■□■ For more details, please request documentation or download the catalog ■□■
Price information
-
Delivery Time
Applications/Examples of results
The feedback stage system has been used in various fields in recent years. Typical application areas include information and communication, optics, semiconductors, and biotechnology, among others. Examples include: positioning during MEMS inspection, optical system delay stages, microscope stages, and alignment adjustments.
catalog（5）
Download All Catalogs
Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
