From private research institutes to state-run research facilities, we offer a wide range of support! Our services can be utilized in the thin film manufacturing processes for semiconductors, LCDs, plasma displays, optical discs, and more.
This is a multi-purpose PLD device with a sales record of over 70 units. Its design, based on extensive experience, allows for stable operation, and it is also possible to combine it with other sputtering sources or deposition sources.
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basic information
【Features】 - Stable operation is possible due to design based on extensive track record. - It is possible to combine with other sputtering sources and evaporation sources. - Supports substrate sizes up to φ2 inches. - The adoption of φ2 inch compatible lamps allows for experiments at a wide range of pressures. - A wide selection of options is available. For more details, please contact us or download the catalog.
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Applications/Examples of results
- Processes for manufacturing thin films such as semiconductors, liquid crystals, plasma displays, and optical discs - Numerous achievements in research facilities of major domestic manufacturers ● For more details, please contact us.
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Company information
Vacuum Products designs and manufactures vacuum systems and vacuum components. Our vacuum systems are developed for various research fields, including film deposition devices (such as PLD, sputtering, CVD, and multi-source evaporation devices), accelerator peripheral equipment (such as lenses, deflectors, and goniometers), and low-speed positron beam devices. In the industrial sector, we have developed and commercialized various processing devices focusing on the "large area" theme for film deposition equipment. For vacuum components, we have newly developed a two-component mixed gas concentration measurement device based on the technology of our original crystal vacuum gauge, and we plan to sell it as a compact ozone concentration meter in the first phase.