バキュームプロダクツ Product Lineup

The "Crystal Penning Cold Cathode Vacuum Gauge" can measure from atmospheric pressure to ultra-high vacuum with a single gauge head and controller. It combines a quartz vacuum gauge that utilizes the change in the resonance resistance of the quartz crystal due to gas friction with pressure, and a Penning vacuum gauge that takes advantage of the discharge current in a magnetic field being nearly proportional to pressure, all within one gauge head and one controller. The design ensures high reliability and safety by minimizing electrode contamination at high pressures and eliminating malfunction of control output due to discharge stoppage. 【Features】 ■ Capable of measuring from atmospheric pressure to ultra-high vacuum with a single gauge head and controller ■ The high voltage for the Penning vacuum gauge section is applied below 2.5x10^-2 Torr, resulting in less contamination of electrodes at high pressures *For more details, please refer to the related links or feel free to contact us.

• Vacuum Equipment

The "Crystal Gauge" allows for 8-digit pressure measurement with a single gauge head. The display section uses a liquid crystal representation, showing pressure in both digital (3 digits for the mantissa and 1 digit for the exponent) and analog (30-segment bar graph) formats simultaneously. Additionally, functions such as temperature compensation, selection of analog output, calibration, selection of gas units, set points, leak testing, and sensor temperature display are accessible from the front panel. 【Features】 ■ 8-digit pressure measurement from 0.01x10^-1 to 1.33x10^5 Pa with a single gauge head ■ Calibration curves calculated by a microprocessor, allowing direct reading of pressures for various gases ■ Standard equipped with two non-volatile set points (up to 6 points available as an option) ■ Leak test function detects leaks of 1x10^-5 atm·cc/sec or greater ■ The gauge head is compact and lightweight, with no restrictions on installation position *For more details, please refer to the related links or feel free to contact us.

• Vacuum Equipment

It is a compact control power supply compatible with 30KV.

• others

This device is a film-forming apparatus capable of installing up to four target sputter guns.

• Sputtering Equipment

This is a multi-purpose PLD device with a sales record of over 70 units. Its design, based on extensive experience, allows for stable operation, and it is also possible to combine it with other sputtering sources or deposition sources.

• Other processing machines