Micro vacuum gauge capable of measuring high vacuum.
Utilizing new technology, the thermal conduction type micro vacuum gauge achieves high vacuum measurement that was previously difficult. With a size of a few hundred microns, it covers the measurement range of the Pirani vacuum gauge.
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basic information
This is a micro-sized thermoelectric vacuum gauge consisting of a thin film thermally separated from a silicon substrate and thermocouples, fabricated using MEMS technology. Its feature is that the structure is designed to broaden the measurement range on the low-pressure side. Additionally, since it is a chip approximately 0.8 mm on each side, it can measure pressure in small spaces.
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Applications/Examples of results
Measurement of vacuum degree in smile space Reliability evaluation of MEMS devices requiring vacuum sealing
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Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.