Non-destructive measurement of thin film optical properties! Easy and high-precision measurement with spectral ellipsometry.
The Japan Semi-Lab spectroscopic ellipsometer 'GES5E' has achieved non-destructive measurement of thin film optical properties, which was impossible with conventional optical measuring instruments. It calculates the thickness of thin films and multilayer films, as well as the wavelength dispersion of the refractive index (N, K values) of each layer. It is active in various fields, from research and development to inline production quality control. 【Measurable Physical Properties】 ■ Thickness optical refractive index ■ Refractive index gradient and material composition ■ Dopant concentration
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basic information
【Rich Product Variations】 ○ Research and development applications ○ Automatic measurement of large panels ○ Roll-to-roll measurement ○ FTIR option ○ Optical porosity ○ Pore distribution measurement, and various other products are available. 【Spectroscopic Ellipsometer for Thin Film Solar Cells】 ○ Amorphous silicon ○ Microcrystalline silicon ○ CIGS ○ CdTe ○ DSSC ○ Measurement of optical properties of organic materials, etc. ○ ITO films 【Measurable Physical Properties】 ○ Film thickness and optical refractive index (n, k) ○ Refractive index gradient and material composition 【Applications】 ○ Semiconductors ○ Silicon, organic, compound semiconductors ○ Solar cells ○ Organic EL ○ LEDs ○ Polymers ○ Flat panel displays (FPD) ○ Medical, bio ○ PET films ○ Fuel cells ○ Graphene 【Specifications】 ○ Wavelength range: 190nm-2400nm ○ Measurement speed: Full wavelength range 1 second～ 【Options】 ○ FTIR ○ Porosimeter ○ Microspot ○ Compensator ○ Automatic mapping stage ○ Sheet resistance ○ Reflectance meter ○ Raman spectroscopy ○ Transmittance meter Please feel free to contact us for specifications and pricing.
Price information
The price may vary depending on specifications such as wavelength range, so please feel free to contact us.
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Applications/Examples of results
We have a very strong track record in semiconductors, solar cells, and flat panel displays. *We have a free catalog available. Please feel free to download it or contact us.
Detailed information
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Resistivity and sheet resistance measurement option. Resistivity and sheet resistance measurement function using Eddy Currents. Accurate measurements can be made non-contact.
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Reflectance Measurement Option Uses a long-life xenon lamp and a two-layer structure quartz optical fiber. Non-contact high-precision reflectance measurement is possible.
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Raman Spectroscopy Option Real-time monitoring and characterization using Raman spectroscopy. Non-contact measurement of material crystallinity and composition with high precision.
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Company information
Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.