Semiconductor heater
We use a thin heater, which allows us to manufacture heater plates that are thinner and lighter than those made with cast heaters. We can also design the heater output freely, so we can accommodate your desired heater output in our designs.
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basic information
Heater plate for semiconductor manufacturing Maximum operating temperature: 250℃ In-plane temperature distribution: ±0.3℃ or less
Price information
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Delivery Time
Applications/Examples of results
Drying of semiconductor Si wafers
Company information
Technical Vision manufactures industrial heaters for various fields, including semiconductor and liquid crystal manufacturing equipment. In the liquid crystal sector, we also handle G10 class compatible heater plates, and in the semiconductor field, we produce 15-inch compatible and vacuum-compatible heater plates. We carry out integrated production from the manufacturing of equipment to the design and production of heater plates. With our experience in semiconductor and liquid crystal device manufacturing, we are also skilled in processing SUS and aluminum, so please feel free to contact us regardless of whether it's in the semiconductor or liquid crystal field.