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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Deposition device

Deposition device

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OASIS

last updated:Sep 22, 2021

長州産業
長州産業
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Deposition apparatus

We propose solutions to all issues related to the mass production of organic EL. We present high-performance deposition sources for organic EL from Choshu Industry. We provide fully automatic deposition equipment, OASIS. By having a prototype line in-house and creating samples in advance, we offer a more effective system. Centered around our unique K-cell technology, we can achieve consistent production from the anode to the cathode side, regardless of substrate or device structure, through a combination of various processes necessary for the manufacturing and development of organic devices.

    Evaporation Equipment
蒸着装置1.png

Deposition device

蒸着装置1.png
蒸着装置1.png

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basic information

We provide a fully automatic deposition system, OASIS. With a prototype line in-house, we create samples in advance to offer a more effective system. Centered around our unique K-cell technology, we can achieve consistent production from anode to cathode sealing, regardless of substrate or device structure, by combining various processes necessary for the manufacturing and development of organic devices and more.

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Please contact us for details

Applications/Examples of results

It is used in the mass production of micro OLED displays and manufacturing equipment for organic EL devices. For more details, please contact us.

Detailed information

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    There are many successful adoptions as a device manufacturing equipment for verifying organic EL materials.

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    There are also achievements in the manufacturing of inline devices for organic EL lighting.

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    We offer a wide range of products that cover everything from R&D to mass production. TSC Series: This bestselling series supports the development of organic devices with high rate stability and a wide molecular beam distribution. The reliability of innovations that exceed the conventional wisdom of K cells is unmatched. TVC Series: This cell places valves in the molecular beam pathway, enabling instantaneous rate control. It accommodates all applications with point-type and line-type configurations.

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    Evaporation Control Unit / ECU-N01: This unit controls the temperature and rate of the k-cell. It can easily perform evaporation control either independently or through external communication (RS485, I/O). *The evaporation source, heating power supply, and film thickness controller are sold separately. 【Features】 - Excellent rate stability due to unique feedback control. - Compatible with organic materials at low temperatures and inorganic materials at high temperatures. - Capable of low-rate evaporation as well.

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    Film Thickness Gauge / 12 Multi Sensor (MSYH12-ST01W): This is a deposition monitor unit that can accommodate 12 quartz oscillators. *The controller is sold separately. 【Features】 - High reliability allows for long-term operation. - The cover and crystal holder can be attached and detached without tools, providing excellent maintenance.

Company information

長州産業

長州産業

Industrial Machinery

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Choshu Industry is a manufacturing company with advanced technology in a wide range of fields, including cutting-edge energy equipment and organic EL device manufacturing equipment. In the field of energy equipment, centered around renewable energy, it holds a top-class share in the industry and is also engaged in advanced technologies such as hydrogen energy. Additionally, its technology in the manufacturing equipment sector is highly regarded in the industry, and its activities have expanded not only domestically but also internationally.

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  • Manufacturing and processing machinery
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