Type 4 high-performance cryopump
It demonstrates the best exhaust characteristics with a type 4 cryopump.
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【Features】 ○ It exhibits the best exhaust characteristics with a type 4 cryopump. ○ High exhaust speed contributes to improved exhaust efficiency and productivity. ○ Particularly suitable for sputtering processes in semiconductor manufacturing equipment and small-scale devices. ○ It is possible to operate up to four pumps with a single compressor. ○ Custom design and manufacturing are available to suit your application. ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC provides "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services for flat panel displays, electronic components, semiconductors, and general industrial equipment, by bringing together the unique technologies cultivated through years of research and development and production technology reform. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to become a top manufacturer in all cutting-edge fields.