[XPS] X-ray Photoelectron Spectroscopy

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last updated：Apr 02, 2026

Effective for evaluating the types, quantities, and chemical bonding states of elements on the sample surface (at a depth of about several nanometers).

XPS is a technique that measures the kinetic energy distribution of photoelectrons emitted by X-ray irradiation, providing insights into the types, quantities, and chemical bonding states of elements present on the sample surface (to a depth of about a few nanometers). Because it can provide information about chemical bonding states, it is also known as ESCA: Electron Spectroscopy for Chemical Analysis. - Qualitative and quantitative analysis of elements on solid surfaces (approximately 2 to 8 nm) is possible. - Chemical bonding state analysis is possible. - Non-destructive analysis is possible. - Measurement of depth distribution (using ion sputtering) is possible. - Measurement of insulators is possible. - Measurement under controlled atmospheres is possible.

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basic information

XPS measures the kinetic energy distribution of photoelectrons emitted by X-ray irradiation. The principle of photoelectron generation is as follows. The binding energy can be calculated from the energy of the incident X-rays and the kinetic energy of the photoelectrons (Equation (1)). Since hν is known, Eb can be determined by measuring Ek. Because Eb is a value unique to the element and its electronic state, insights into the identification of elements in the sample and their chemical bonding states can be obtained from this value.

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Applications/Examples of results

- Evaluation of the chemical state and products (deposits) on the plasma-etched surface - Confirmation of the cleaning effect on the wafer surface - Evaluation of the oxidation degree and film thickness of Si oxide films (such as SiON films) - Verification of the chemical state of the surface modification layer of metal films (such as Cu) - Investigation of the composition and chemical state at the electrode surface of secondary battery materials - Evaluation of the passive layer on the SUS surface - Investigation of the composition and chemical state of solar cell materials - Evaluation of the light-emitting characteristics and chemical state of organic EL films - Confirmation of the cleaning effect of masks for lithography - Evaluation of the condition of lubricants on the surface of magnetic disks - Investigation of the causes of performance degradation in water-repellent coatings on glass surfaces - Correlation evaluation of the components and optical properties of anti-reflective films - Evaluation of the composition and chemical state of photocatalytic films, etc.

Detailed information

Please consult with us first. ★ We will start with a proposal for the analysis plan ★ We can also meet at your company, of course. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!
We will hold a visiting seminar. ★ We offer free seminars with engineers tailored to our customers' needs ★ We will introduce analytical techniques and explain analytical data according to your requests. ◆ Examples of seminar content - A broad explanation of MST's analytical methods - A detailed explanation of specific analytical methods from the principles - An explanation of the analytical data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!