Dry cleaning device that can expect synergistic effects from each element: UV irradiation, high-concentration ozone, and temperature heating! Low running costs and economical!
This is a dry cleaning device that is expected to have a synergistic effect from UV irradiation, high-concentration ozone, and temperature heating. The UV lamp is economical due to its long lifespan and low cost, resulting in low running costs. 【Features】 - A dry cleaning device that is expected to have a synergistic effect from UV irradiation, high-concentration ozone, and temperature heating - The UV lamp is economical due to its long lifespan and low cost, resulting in low running costs - Ozone concentration control is possible - Substrate heating with an IR heater improves cleaning reaction efficiency *For more details, please request materials or view the PDF data from the download section.
![UVオゾンアッシング装置[1].jpg](https://image.mono.ipros.com/public/product/image/0e3/42552003/IPROS84733464567518271577.jpeg?w=280&h=280)
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basic information
- UV lamps are economical due to their long lifespan and low cost, resulting in low running costs. - Ozone concentration control is possible. (From low concentration ozone atmosphere generated by UV lamps to high concentration atmosphere produced by ozonizers) - Heating of the substrate by IR heaters increases the cleaning reaction rate. - We have technical data and delivery records cultivated through years of technology development. - We meet user demands from large-scale production equipment to small experimental devices. ◎ For other functions, please download the catalog or feel free to contact us.
Price information
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Delivery Time
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Applications/Examples of results
【Usage】 〇 LCD substrate
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Company information
Aiming to become a technology development company, we are focusing our efforts to solidify our position in the LCD and semiconductor markets. With a proper understanding of market needs and responsiveness, we will provide products that meet our customers' demands. Additionally, we aim to develop environmentally related products for future business and strive to build a system that contributes to society.