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CMPコンディショナ Product List

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研磨技術 CMPコンディショナ

特許取得済 特許第4441552号

内外2層構造のダイヤモンドコンディショナを市場展開し、大幅なコスト削減に貢献しています。

  • ウエハ加工/研磨装置
  • CMPコンディショナ

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