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高輝度・低デブリを実現したLPP-EUV光源

ISTEQ社のTEUSシリーズは、高輝度・低デブリを実現したレーザー生成プラズマ（laser produced plasma）によるEUV光源です。従来の液滴ターゲットと異なりプラズマ発生時に飛散するデブリの光学系への付着を防ぐことができます。

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UV光源 Product List