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ランプ加熱装置(SHM-01型)

φ300mm貼り合わせウェーハを加熱用IRランプにて加熱する装置です

・手動/自動の切り替えおよび任意の温度調整が可能です。 ・加熱温度は最大500℃まで上昇します。

  • その他半導体製造装置

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