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半導体ウェーハ研磨機 ノッチ、ベベル、オリフラ研磨装置【日本製】

高品位研磨テープによる低Raの実現

Siウェーハ、化合物ウェーハのベベル、ノッチ、オリフラに対応したフルスペックのテープ式精密研磨装置です。

  • ウエハ加工/研磨装置

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