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Non-contact transport device of the Solar Research Institute: Float Chuck SAC type

Custom-made vertical gas jet non-contact transport device "Float Chuck SAC Type"

We will manufacture a custom-made "Bernoulli chuck - non-contact transport device" that adopts a new mechanism of the Bernoulli chuck "Float Chuck SAC type," which has the Bernoulli effect, ejector effect, and Coanda effect. The new mechanism: The non-contact transport device "Float Chuck SAC type" has been enhanced with the Coanda effect to increase the ejector effect that generates suction power. It is a high-efficiency, low gas consumption non-contact transport device that combines the Bernoulli effect. This new method employs the "vertical jet airflow method" with the Bernoulli chuck for the non-contact transport device.

  • Other semiconductors
  • CVD Equipment
  • LCD display

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