[Case Study] Preheating of Film Deposition Equipment
[Case Study] Preheating of Film Formation Equipment
This is a case study of a preheating system for a film deposition device using light sources for light heating from Ushio, a company with a wealth of experience and achievements. By using a halogen lamp heater that has non-contact and high-speed heating capabilities even in a vacuum environment, we can contribute to reducing the takt time in the film deposition processes for semiconductors, FPDs, solar cells, and more. ● For other functions and details, please contact us.
- 企業:ウシオ電機
- 価格:Other