Semiconductor Manufacturing Equipment Vibration Monitor - Long-term Logging of Displacement Data -
Low-cost semiconductor manufacturing equipment vibration monitor for logging displacement data of the vibration isolation table over an extended period.
■□■Features■□■ ■Regarding vibrations that cause defects in semiconductor manufacturing lines, displacement and acceleration sensors are installed on a vibration isolation table to continuously collect data at a maximum of 10Hz for an extended period. ■The collected data can be displayed directly on the screen or analyzed for frequency and shown in graph form, as well as output as CSV files every hour. ■There is an option to analyze and display the data saved by this system.
- Company：ペリテック 神奈川エンジニアリングセンター、東京営業所、ベトナム事業所
- Price：Other
