MEMS foundry services (wafer contract processing services)
3D implementation services (implementation services using TSV technology, etc.)
We offer a wide range of services from partial process contracting for MEMS to overall development prototyping and mass production foundry. We can accommodate all requests through our MEMS line network, ranging from 2-inch and irregular substrates to 12-inch (300mm). Please feel free to consult us for exposure, etching contract processing, and film deposition services starting from a single piece. This is a full-fledged foundry service dedicated to MEMS. 【Service List】 - PZT Film Deposition Service Supports 4, 5, 6, and 8 inches using sputtering method. - Si Deep Etching Service Supports 2 to 12 inches. - Low-Temperature CVD Film Deposition Service below 100°C Supports 2 to 6 inches. - 8-inch and 12-inch MEMS Foundry Service Capable of manufacturing MEMS for large chips. *For more details, please download the PDF.
- Company:日本MEMS
- Price:Other