Cleaning (Regeneration) of Special Wafers
Removal of contaminants and reduction of metal impurities! We propose cleaning tailored to your specific application.
We perform cleaning (regeneration) of special wafers. The targets include "fixture wafers" such as those with recessed shapes, as well as "special material wafers" made of alumina, quartz, SiC, AlN, and others. We can suggest cleaning methods tailored to your specific applications. Please feel free to consult us about cleaning various types of wafers. 【Overview】 ■Targets ・Fixture wafers: recessed shapes, etc. (Material: Si) ・Special material wafers: alumina, quartz, SiC, AlN, etc. ■Supported size: 12 inches ■Cleaning details ・Removal of contaminants (metal films, organic substances) ・Reduction of metal impurities (5×E10 to 1×E12 atoms/cm2 range) *For more details, please refer to the PDF document or feel free to contact us.
- Company：新菱 電子加工品部
- Price：Other
