Removal of contaminants and reduction of metal impurities! We propose cleaning tailored to your specific application.
We perform cleaning (regeneration) of special wafers. The targets include "fixture wafers" such as those with recessed shapes, as well as "special material wafers" made of alumina, quartz, SiC, AlN, and others. We can suggest cleaning methods tailored to your specific applications. Please feel free to consult us about cleaning various types of wafers. 【Overview】 ■Targets ・Fixture wafers: recessed shapes, etc. (Material: Si) ・Special material wafers: alumina, quartz, SiC, AlN, etc. ■Supported size: 12 inches ■Cleaning details ・Removal of contaminants (metal films, organic substances) ・Reduction of metal impurities (5×E10 to 1×E12 atoms/cm2 range) *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Cleaning Flow】 <Pre-treatment Room> ■ Incoming Inspection: Confirmation of arrival condition (checking for damage, etc.) ■ Pre-cleaning ・ In-house developed chemical treatment for damage-free substrate ・ Removal of metal films and organic substances <Clean Room> ■ Final Cleaning: Use of clean washing machine (decontamination) ■ Final Inspection ・ Visual Inspection: Under particle spotlight, ≤10 particles ・ Metal Impurities: Confirmed by TXRF analysis of simultaneously processed monitor wafers ■ Packaging ■ Shipping *For more details, please refer to the PDF document or feel free to contact us.
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【Purpose】 ■Cleaning of special wafers *For more details, please refer to the PDF document or feel free to contact us.
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Our company’s symbol mark is inspired by a clear sky, expressing kindness and consideration for nature and the environment. A strong desire to protect precious nature and the environment and to pass it on to the next generation forms the foundation of all our business activities. As concrete efforts toward creating a resource-circulating society and reducing environmental impact, we are engaged in a wide range of businesses utilizing chemical technology, including the harmless treatment and recycling of industrial waste, precision cleaning of semiconductor and panel manufacturing equipment parts, silicon wafer recycling, and fine chemicals. We have consistently faced the challenges faced by our customers and society, providing solutions for reduce, reuse, and recycle over many years. Through this accumulation, we are building a valuable asset of "trust" from our customers, both domestically and internationally. Trust and high evaluation are the source of fulfillment for each employee, and we aim to continue to unite, evolve continuously, and always provide new products and services.