Successful Improvement Case Study 2: Metal Vapor Deposition Cell KMDW-Cell
Successful Improvement Case Study 2: Metal Vapor Deposition Cell KMDW-Cell
◆◇◆Background◆◇◆ The conventional metal deposition method uses a boat system, applying a large current of over 100A when depositing the metal film. While the boat system allows even beginners to easily perform deposition, the use of high currents is considered a factor that negatively affects the quality of the film. Additionally, the amount of scattering during deposition is significant, requiring frequent maintenance of the chamber, making it difficult to use in a clean environment.
- Company:北野精機
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