Eraser Disk
Inline cleaning of particles on the stage - wafer-type stage cleaner
In semiconductor manufacturing equipment, the presence of particles on pin chucks or electrostatic chucks, which serve as processing stages, can lead to process errors or equipment downtime. Generally, particle removal is performed using inline cleaning (dummy runs) with dummy wafers, but particles that cannot be removed even during dummy runs require the equipment to be stopped for manual cleaning. However, it is a reality that this process takes a significant amount of time until the equipment is restored. To address this situation, Creative Technology has developed the wafer-type stage cleaner "eRaser Disk" as an inline stage cleaning tool for semiconductor manufacturing equipment. By coating a special resin on silicon wafers, it enhances particle removal performance, contributing to a reduction in dummy run time and a decrease in equipment downtime frequency.
- Company：クリエイティブテクノロジー
- Price：100,000 yen-500,000 yen
