UPE Series Filter for Precision Filtration
The maximum operating temperature is 60°C! A complete integrity test is conducted before shipping all products.
The "UPE Series" is a filter suitable for the filtration of resists and chemicals used in semiconductors. It uses UPE membrane as the filtering material and HDPE for the structural components. It guarantees low elution and high flow rates while efficiently capturing gel-like foreign substances. Additionally, a integrity test is conducted on all products before shipment. 【Features】 ■ Suitable for the filtration of resists and chemicals used in semiconductors ■ Uses UPE membrane as the filtering material and HDPE for the structural components ■ Guarantees low elution and high flow rates ■ Efficiently captures gel-like foreign substances *For more details, please refer to the PDF document or feel free to contact us.
- Company:日本コベッタ
- Price:Other