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Filter for semiconductor industry processes

Filter for semiconductor industry processes

A wide range of high-performance products for materials and gases used in device manufacturing processes, from the purification of materials used in semiconductor manufacturing processes.

We adopt a consistent system from development to production and sales, providing filtration solutions that quickly respond to customer needs with a diverse product lineup and high-quality technology. In particular, for filters used in semiconductor manufacturing processes, we offer options with high removal efficiency and high cleanliness of filters for cutting-edge device applications.

  • Other semiconductor manufacturing equipment

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Semiconductor industry process filter - Metal impurity removal filter for organic solvents

Semiconductor industry process filter - Metal impurity removal filter for organic solvents

A wide range of products from general ion-exchange type metal removal membranes to metal removal membranes specialized for semiconductor applications.

Iongard SL purifier Ion exchange type metal removal for organic solvents Nylonpolar Purifier Cobetter's original metal removal membrane. Uses a surface-modified nylon-based membrane. Ideal for lithography materials as it does not generate acids. Iongard Polar Purifier Effective metal removal for polar organic solvents Cemdeion Purifier Surface-modified Teflon-based membrane. Usable for IPA, which is used as a final cleaning solution, and for organic solvents that require chemical resistance.

  • Resist Device
  • Etching Equipment

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Polyethylene filter for semiconductors Photopex PE

Polyethylene filter for semiconductors Photopex PE

Polyethylene filters with a wide range of pore sizes suitable for various applications (including fine pore sizes equivalent to 1nm) and high purity.

The Cobetter Photopex series is a high-retention filter with a wide range of pore sizes from 1 nm equivalent to 5 μm, meeting the stringent cleanliness requirements of semiconductor manufacturing processes, particularly in the lithography process. Due to this high cleanliness, it demonstrates excellent shedding performance, reducing extraction from the filter. Additionally, the membrane area can be selected according to the application.

  • Resist Device
  • Other polymer materials

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Pure Water Precision Filtration Filter "APP Series"

Pure Water Precision Filtration Filter "APP Series"

Introducing a polypropylene filter with a high filtration efficiency, close to absolute filtration efficiency.

The "APP Series" is a depth pleat filter with a density gradient structure of two layers, allowing it to capture a greater amount of foreign substances. It employs nano PP fibers in the secondary filtration material. It has a very high filtration efficiency for particles and is expected to have a high removal effect even for gel-like foreign substances that are difficult to capture. It is suitable for the filtration of pure water and precision chemical products. 【Features】 ■ Capable of capturing a greater amount of foreign substances due to the density gradient structure of the two layers ■ Uses nano PP fibers in the secondary filtration material ■ Has a very high filtration efficiency for particles ■ Expected to have a high removal effect even for gel-like foreign substances that are difficult to capture ■ Suitable for the filtration of pure water and precision chemical products *For more details, please refer to the PDF document or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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High viscosity gel filtration filter "SHP Series"

High viscosity gel filtration filter "SHP Series"

We would like to introduce a depth pleated filter suitable for filtering high-viscosity liquids with many impurities.

The "SHP Series" features a unique multi-layer PP nanofiber filter that efficiently captures gel-like foreign substances. It enhances the strength of the support material, making it suitable for filtering high-viscosity liquids with many impurities. The "Y Type" uses glass fiber, effectively capturing gel foreign substances with its fine fibers, and has a wide dust collection space for a long lifespan. By performing pure water washing treatment before shipment, we provide a clean filter. 【Features】 ■ Utilizes a unique multi-layer PP nanofiber ■ Capable of efficiently capturing gel-like foreign substances ■ Increased strength of the support material ■ The "Y Type" has less fiber shedding than standard products due to fiber fixation technology ■ Provides a clean filter through pure water washing treatment before shipment *For more details, please refer to the PDF document or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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Filter "H2D Series" with a wide filtration area.

Filter "H2D Series" with a wide filtration area.

A depth pleated filter with excellent chemical resistance! It can also be used when high filtration precision is required.

The "H2D Series" is a filter that employs advanced pleating technology. It has more pleat peaks than a standard filter, ensuring a larger filtration area, which enhances dust collection capability and extends service life. It can handle particles down to 0.3 micrometers and is suitable for applications requiring high filtration precision. All materials used are polypropylene, providing excellent chemical resistance. No binders or surfactants are used, eliminating concerns about leachables. 【Features】 ■ Utilizes advanced pleating technology ■ More pleat peaks than standard filters, ensuring a larger filtration area ■ High dust collection capability and excellent service life ■ Capable of filtering down to 0.3 micrometers ■ No binders or surfactants used *For more details, please refer to the PDF document or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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Low Dissolution Countermeasure Filter "EPP Series"

Low Dissolution Countermeasure Filter "EPP Series"

Various filtration precisions are selectable! A depth pleat filter with excellent cost performance.

The "EPP Series" uses high-purity polypropylene resin and employs thermal welding technology, which means it does not use adhesives, resulting in a leaching of metal ions that meets the requirements of the electronics industry. With a nanofiber filter medium, it achieves high flow rates and long service life. It has excellent chemical resistance and is suitable for filtering various acids, alkalis, and solvents. Additionally, a wide range of filtration precision from 0.1μm to 25μm is available. 【Features】 ■ Uses high-purity polypropylene resin ■ Leaching of metal ions meets the requirements of the electronics industry ■ Achieves high flow rates and long service life with nanofiber filter medium ■ Excellent cost performance and chemical resistance ■ Suitable for filtering various acids, alkalis, and solvents *For more details, please refer to the PDF document or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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Long Life Pre-Filter "GUF Series"

Long Life Pre-Filter "GUF Series"

A depth filter with selectable diverse filtration precision! It can be used in most housings.

The "GUF Series" achieves high capture efficiency through its unique pore size gradient structure, making it a long-lasting filter compared to standard melt-blown filters. The roll structure design improves the filtration efficiency of the filter, providing superior particle capture capability compared to ordinary melt-blown filters. Additionally, the "CM Series" is based on the GUF Series and offers the same long lifespan while enhancing filtration precision. 【Features】 ■ Longer lifespan compared to standard melt-blown filters ■ A variety of filtration precision options from 0.5μm to 50μm ■ Customizable to meet customer requirements ■ Compatible with most housings due to various connection types *For more details, please refer to the PDF document or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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High filtration efficiency roll filter "RMF-CR Series"

High filtration efficiency roll filter "RMF-CR Series"

The maximum operating temperature is 80°C! We present a depth-type filter with a two-layer density gradient structure.

The "RMF-CR Series" is a filter made by winding polypropylene sheets. Thanks to its two-layer density gradient structure, the filtration efficiency is twice that of conventional melt-blown filters, and its lifespan is three times longer. Cobetter quickly responds to customer needs with high-quality and diverse products and technologies through an integrated industrial system of independent development, production, and sales. 【Features】 ■ Made by winding polypropylene sheets ■ Depth type ■ Filtration efficiency is twice that of conventional melt-blown filters, and lifespan is three times longer *For more details, please refer to the PDF document or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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Ultra-high capture capability melt-blown filter "MBCY Series"

Ultra-high capture capability melt-blown filter "MBCY Series"

Introducing a depth filter that uses no binders or surfactants at all! No worries about leachables!

The "MBCY Series" is a melt-blown filter with an outer layer that continuously decreases in pore size, providing ultra-high capture capability. By using nanofibers in the inner part, it has a high removal efficiency while maintaining a high dust collection capacity. The pore size of the filtration layer in the inner part is uniform, allowing it to capture fine foreign substances, making it suitable for final filtration of slurries, plating solutions, solvents, etc. 【Features】 ■ Continuous decrease in pore size from the outside ■ Use of nanofibers in the inner part ■ High removal efficiency while maintaining high dust collection capacity ■ Uniform pore size in the filtration layer of the inner part, capable of capturing fine foreign substances ■ Suitable for final filtration of slurries, plating solutions, solvents, etc. *For more details, please refer to the PDF document or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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High Purity Ion Exchange Filter "IXF Series"

High Purity Ion Exchange Filter "IXF Series"

A depth filter that can reduce TOC in a short time, in addition to ion removal in pure water.

The "IXF Series" is a filter filled with ion exchange resin, capable of removing ionic bases by exchanging ions with those in pure water. It can raise the resistivity of pure water to 18MΩ in a short time and can provide a variety of ion exchange resins to meet different purification requirements. The components are made of high-purity PP material, and no adhesives or similar substances are used. 【Features】 ■ Filled with ion exchange resin ■ Capable of removing ionic bases by exchanging ions with those in pure water ■ Can raise the resistivity of pure water to 18MΩ in a short time ■ Can provide various types of ion exchange resins for different purification requirements ■ Components made of high-purity PP material ■ No adhesives or similar substances used *For more details, please refer to the PDF document or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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Nano-level ultra-high precision filter "HAPES Series"

Nano-level ultra-high precision filter "HAPES Series"

Introducing a membrane filter with high flow rate and dust collection capability compared to conventional PES membrane products!

The "HAPES series" is a filter that utilizes a uniquely developed highly asymmetric PES membrane. The dense highly asymmetric membrane structure, with decreasing pore size from the primary side to the secondary side, achieves ultra-high filtration precision down to the 1nm level and long lifespan. Additionally, it can suppress the generation of fine bubbles, making it suitable for filtering low-temperature chemicals used in wet etching and cleaning processes. 【Features】 ■ Utilizes a uniquely developed highly asymmetric PES membrane ■ Dense highly asymmetric membrane structure with decreasing pore size from the primary side to the secondary side ■ Achieves ultra-high filtration precision down to the 1nm level and long lifespan ■ Uses HDPE for components, resulting in extremely low elution ■ PP is also available for components to accommodate various usage situations *For more details, please refer to the PDF document or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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Pure water PES membrane filter "APSHA series"

Pure water PES membrane filter "APSHA series"

Filtration of weakly acidic/alkaline fluids and pure water! Membrane filter with a distinctive asymmetric structure.

The "APSHA series" is a filter that employs hydrophilic asymmetric PES membranes. Thanks to its characteristic asymmetric structure, it achieves high filtration capacity and long lifespan, contributing to the reduction of operational costs for filtration systems. It is suitable for filtering weakly acidic/alkaline fluids and pure water. Additionally, we also handle the "APSFJ series," which has a minimum filtration grade of 0.03μm and is widely used for ultrapure water filtration in the semiconductor field. 【Features】 <Common> ■ Uses hydrophilic asymmetric PES membranes ■ Completeness testing and 18MΩ pure water washing treatment are performed on all products before shipment <APSHA series> ■ Achieves high filtration capacity and long lifespan ■ Contributes to the reduction of operational costs for filtration systems *For more details, please refer to the PDF document or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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High cost-performance PTFE membrane filter "LPF/LHPF series"

High cost-performance PTFE membrane filter "LPF/LHPF series"

Membrane filters suitable for filtering most chemical products in the electronics field and organic solvents!

The "LPF/LHPF Series" uses a PTFE membrane and is a filter that has chemical resistance for a wide range of fluids. It employs PP for molded products and components, achieving high cost performance. It is suitable for filtering most chemical products in the electronics field and organic solvents. The "LPF Series" uses hydrophobic PTFE membranes, while the "LHPF Series" uses hydrophilic PTFE membranes. 【Features】 ■ Uses PTFE membranes ■ Chemical resistance for a wide range of fluids ■ Employs PP for molded products and components ■ Achieves high cost performance *For more details, please refer to the PDF materials or feel free to contact us.

  • Filtration Equipment
  • Solid-liquid separation filter

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Nylon filter for solvent filtration "NY6 Series"

Nylon filter for solvent filtration "NY6 Series"

High flow rate! The maximum operating temperature is 50°C and the maximum operating differential pressure is 0.34 MPa at 25°C.

The "NY6 Series" is a filter that employs a naturally hydrophilic nylon membrane with a positive charge. It exhibits high flow rates while having chemical resistance to many organic solvents. The components can be selected from PP and HDPE. The use of HDPE reduces leaching, making it suitable for the filtration of solvent-based photochemicals. 【Features】 ■ Utilizes a naturally hydrophilic nylon membrane with a positive charge ■ Chemical resistance to many organic solvents ■ Components can be selected from PP and HDPE ■ The use of HDPE reduces leaching *For more details, please refer to the PDF document or feel free to contact us.

  • Solid-liquid separation filter
  • Filtration Equipment

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